关键词: MEMS, 流场仿真, 微型无阀泵

Abstract: The structure and the operating principle of miero valveless pump are presented. The computatkma! Fluid dynamics approaches are applied to achieve the time dependent flowfield within the miero valveless pump imder the typical driving frequenoy. The experiments are carried out with different structural parameters , driving frequencies and amplitudes of vibration and stiffhess of the driving diaphragm on of the pump are also experimentally investigated. The effeots of the structural parameter and driving condition on the operation performance of the pump are discussed in details. The relationsofthepipe-periodicity. Driving frequencyi diaphragm stiffhess and flow parameters are also presented. Finally an applicable suggestion is put forward for improving designing and controlling scheme of the miero valveless pump.

Key words: Micro valveless pump MEMS Computational fluid dynamics