关键词: 测试, 高过载, 加速度传感器

Abstract: Aiming at testing in special situation, a high-overload piezoresistive acceleration sensor with four-end fixed beam-island structure is designed. The mass of the tower and the distance between the center of tower and beam is decreased by KOH etch at the back of the mass, which combines the merits of beam-island structure and beam structure. The processing technique is simple and feasible. Hopkinson impact equipment is used to calibrate the dynamic characteristic of impact acceleration. The test result indicates that the sensitivity of the micro acceleration sensor is 0.71μV/g, basically tallying with the theoretical value. The output signal is still normal when the structure has suffered an impact of 200 000g，so it can satisfy the special test requirements in a high impact and intense vibration environment.

Key words: Acceleration sensor, High overloading, Test