关键词: 电驱动微纳结构模塑, 麦克斯韦应力, 纳米压印, 图形转移, 微纳制造

Abstract: Electric field driven micro-/nano-molding utilizes Maxwell tensor rather than mechanical pressure to drive the polymer to flow and to realize the pattern transferring, which can avoid the loading force induced distortion in conventional imprint lithography and form uniform micro-/nano-structures. Two kinds of electric field driven micro-/nano-molding methods, contact case and non-contact case, divided according to the differences on the implement of the electric field and the constraint of the geometric template are proposed and researched. Based on the theoretical analysis, numerical simulation and experimental approach, forming mechanisms and critical process parameters of the electric field driven micro-/nano-molding methods are discussed, and the comparisons between the contact case and the non-contact one is performed. Research results indicate that two kind of electric field driven micro-/nano-molding methods can both avoid the disadvantages of the conventional imprint lithography and form micro-/nano-structures identified with template without any mechanical pressure, however, the contact electric field driven micro-/nano-molding method is a better micro-/nano-fabrication method from the viewpoint of the accuracy, efficiency and controllability.

Key words: Electric field driven micro and nano-molding, Maxwell tensor, Micro and nano-fabrication, Nanoimprint lithography, Pattern transferring