关键词: 化学气相沉积, 微纳传感器件, 悬空单壁碳纳米管阵列, 应变传感

Abstract: Traditional silicon micro-machining technology is utilized to produce parallel micro-electrodes on silicon chips, and silicon chips are deeply etched to wear a rectangular hole between the parallel micro-electrodes. Next, ultra-long single-walled carbon nanotube (SWCNT) array is grown across micro-electrodes and rectangular hole to suspend well aligned between the parallel micro-electrodes by the method of large gas flow directional chemical vapor deposition (CVD). The Si chip attached with SWCNTs is then mounted onto a thin PVC base and the connections of Si island are cut by laser technology, so that the force acting on the PVC base can directly transfer to SWCNT array. After extraction of wires, the fabrication of micro-nano-force-sensing unit is finished. Later, the research is carried out mainly on strain sensing of suspended SWCNT array. High gauge factor and linearity are obtained. The experimental results show that this sensor unit is simple and low in cost, thus providing a new way of thinking upon the preparation for micro-nano integrated sensor unit based on carbon nanotubes.

Key words: Chemical vapor deposition, Micro-nano-sensing device, Strain-sensing, Suspended single-walled carbon nanotube array