关键词: 电感, 互感, 射频集成电路, 微机电系统, 微加工

Abstract: Concave solenoid inductors and transformers are fabricated with a post-CMOS microfabrication process. The fabricated devices are air suspending which depresses substrate effects. The concave embedding device structures are compatible with standard integrated circuit packaging. The inductors have achieved both high qulity-factor and self-resonant frequency. The transformers have achieved high available gain within a broad frequency range. Experiments and analysis have proved reliability and stability under environment vibration and thermal expansion. The inductors and transformers implemented are suitable for applications in high performance radio-frequency integrated circuits (RFIC).

Key words: Inductors, Micro electromechanical system(MEMS), Microfabrication, Radio-frequency integrated circuits(RFIC), Transformers