• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

›› 2005, Vol. 41 ›› Issue (3): 53-58.

• 论文 • 上一篇    下一篇

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基于ETAEMS/GPGP-CN的半导体生产线动态调度技术研究

翟文彬;张洁;严隽琪;马登哲   

  1. 上海交通大学计算机集成制造研究所
  • 发布日期:2005-03-15

RESEARCH ON ETAEMS/GPGP-CN BASED DYNAMIC SCHEDULING TECHNOLOGY OF SEMICONDUCTOR FABRICATION LINE

Zhai Wenbin;Zhang Jie;Yan Juanqi;Ma Dengzhe   

  1. Institute of Computer Integrated Manufacturing, Shanghai Jiaotong University
  • Published:2005-03-15

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摘要： 针对缺乏半导体生产线动态调度分布协同机制的研究现状，提出了基于扩展的任务分析环境建模与仿真/通用部分全局规划—合同网(ETAEMS/GPGP-CN)的动态调度技术。对TAEMS的非局部影响进行扩展，以实现调度过程中协同关系的定量描述与分析。利用GPGP获取上、下游协同信息，结合合同网的招投标机制，以解决其动态调度。以某150 mm晶圆生产线为例，仿真试验表明了该动态调度算法的有效性。

关键词: 半导体生产线, 动态调度, 多代理, 分布协同

Abstract: There is a lack of distributed coordination mechani- sm for semiconductor fabrication line dynamic scheduling status in quo. To resolve this problem, a novel modeling and scheduling technology, ETAEMS/GPGP-CN, for dynamic scheduling of semiconductor fabrication line is proposed. To extend the non-local effect of TAEMS, ETAEMS can be used to quantitatively model and analyze the coordination relatio- nship. Integrating the GPGP for upstream or downstream coo- rdination information and contract net, GPGP-CN algorithm for dynamic scheduling is given. An illustrative example of a 150 mm semiconductor fabrication line in shanghai demonstra- tes the effectiveness of approach.

Key words: Distributed coordination, Dynamic scheduling, Multi-agent, Semiconductor fabrication line

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