超声椭圆振动磨削SiC陶瓷的砂轮磨损与磨削性能研究

doi:10.3901/JME.2024.09.057

摘要/Abstract

摘要： 为探究超声椭圆振动磨削下砂轮磨损机制及其磨削性能，选用SiC陶瓷为加工对象，分别开展普通磨削(Conventionalgrinding,CG)、超声椭圆振动磨削(Elliptical ultrasonic vibration assisted grinding,EUVAG)的砂轮磨损试验。首先，利用超景深显微镜追踪观测砂轮表面微观形貌，并表征磨粒磨损形式，包括统计分析磨粒磨耗平台面积、磨粒出刃高度等，从而揭示超声椭圆振动对砂轮磨损机理的影响；其次，分析砂轮磨损对磨削过程(磨削力、比能和材料去除率)和工件表面质量(表面粗糙度、微观形貌)的影响规律，以及不同磨损状态下砂轮主要磨削性能随加工参数的变化规律。研究表明：相比CG，EUVAG能够减少磨粒大破碎和脱落比例、增大磨耗平台面积、延缓磨粒出刃高度下降速度；随着磨损状态的增加，两种磨削方式的磨削力总体上呈先快速增长、后波动性起伏、再小幅度下降趋势；超声椭圆振动的引入可显著降低磨削比能(e_s)，且稳定磨损阶段的降低幅度范围为12.4%～ 34.0%；不论CG还是EUVAG，材料去除率均随磨损状态的增加而先增长、后减小，且EUVAG在磨损状态4时，材料去除率取得最佳值38.2×10⁶ μm³/mm·s；在稳定磨削阶段，两种磨削方式的划痕表面均以脆性断裂为主，但施加超声椭圆振动有助于形成延性光滑平面。此外，总体上，较高磨削速度、较低进给速度更有利于降低磨削力；在各磨损状态下，提高磨削速度是降低表面粗糙度的直接手段，但不同磨损状态下获取最低表面粗糙度的进给速度不同。

关键词: 超声椭圆振动磨削, SiC, 砂轮磨损, 磨削力, 工件表面质量

Abstract: In order to investigate the wear mechanism and grinding performance of wheel under elliptical ultrasonic vibration assisted grinding, SiC ceramics were selected as the processing object to conduct wheel wear tests on conventional grinding (CG) and elliptical ultrasonic vibration assisted grinding (EUVAG). Firstly, the VHX-5000 ultra-depth of field three-dimensional microscope is used to track and observe the micro morphology of wheel surface, and to characterize the form of grain wear, including statistics and analysis the grain wear platform area, grain cutting height, etc., then reveal the influence of elliptical ultrasonic vibration on wheel wear mechanism; Secondly, analyzing the impact of the wheel wear on the grinding process (grinding force, specific energy, and material removal rate) and workpiece surface quality (surface roughness, micro morphology), as well as the variation of the main grinding performance of wheel with processing parameters under different wear states. Research has shown that compared to CG, EUVAG can reduce the proportion of large breakage and grain shedding, increase the wear platform area, and delay the descent speed in the grain cutting height. As the wear status increases, the grinding forces of the two grinding methods generally show a trend of rapid growth at first, followed by fluctuations, and then a slight decrease. The introduction of elliptical ultrasonic vibration can significantly reduce grinding specific energy (e_s), and the reduction amplitude ranges from 12.4% to 34.0% in the stable wear stage. Whether in CG or EUVAG, material removal rate (MRR) first increases and then decreases with the increase of wear state, and the MRR of EUVAG reaches the optimal value (38.2×10⁶ μm³/mm·s) at wear state 4; In the stable grinding stage, the scratch surfaces of both grinding methods are mainly characterized by brittle fracture, but the application of elliptical ultrasonic vibration helps to form a ductile smooth surface. In addition, higher wheel speed and lower workpiece feed speed are more conducive to reducing grinding force as a whole. Increasing the grinding speed is a direct means to reduce surface roughness in various wear states, but the workpiece feed speed for obtaining the lowest surface roughness varies under different wear states.

Key words: EUVAG, SiC, wheel wear, grinding force, surface quality of workpiece

中图分类号:

TG663
TG580

殷振, 张坤, 戴晨伟, 程敬彩, 徐海龙, 李华. 超声椭圆振动磨削SiC陶瓷的砂轮磨损与磨削性能研究[J]. 机械工程学报, 2024, 60(9): 57-74.

YIN Zhen, ZHANG Kun, DAI Chenwei, CHENG Jingcai, XUN Hailong, LI Hua. Research on Wheel Wear and Grinding Performance of Elliptical Ultrasonic Vibration Assisted Grinding SiC Ceramics[J]. Journal of Mechanical Engineering, 2024, 60(9): 57-74.

参考文献

[1] ZHANG W. Tribology of SiC ceramics under lubrication: Features，developments，and perspectives[J]. Current Opinion in Solid State & Materials Science，2022，26：101000.
[2] WANG Y Y，DONG S，LI X T，et al. Synthesis，properties，and multifarious applications of SiC nanoparticles: A review[J]. Ceramics International，2022，48：8882-8913.
[3] DEHGHANI H，KHODAEI M，YAGHOBIZADEH O，et al. The effect of AlN-Y₂O₃ compound on properties of pressureless sintered SiC ceramics-A review[J]. International Journal of Refractory Metals and Hard Materials，2021，95：105420.
[4] OGUNTUYI S D，NYEMBWE K，SHONGWE M B，et al. Improvement on the fabrication of SiC materials: Processing，reinforcing phase，fabricating route-A review[J]. International Journal of Lightweight Materials and Manufacture，2023，6：225-237.
[5] WEN D D，WAN L L，ZHANG X H，et al. Grinding performance evaluation of SiC ceramic by bird feather-like structure diamond grinding wheel[J]. Journal of Manufacturing Processes，2023，95：382-391.
[6] 戴剑博，苏宏华，傅玉灿，等. 磨削速度对碳化硅陶瓷磨削损伤影响机制研究[J]. 机械工程学报，2022，58(21)：316-330. DAI Jianbo，SU Honghua，FU Yucan，et al. Effect of grinding speed on mechining damage of silicon carbide ceramics[J]. Journal of Mechanical Engineering，2022，58(21)：316-330.
[7] GAO S，WANG H X，HUANG H，et al. Molecular simulation of the plastic deformation and crack formation in single grit grinding of 4H-SiC single crystal[J]. International Journal of Mechanical Sciences，2023，247：108147.
[8] 丁文锋，曹洋，赵彪，等. 超声振动辅助磨削加工技术及装备研究的现状与展望[J]. 机械工程学报，2022，58(9)：244-269. DING Wenfeng，CAO Yang，ZHAO Biao，et al. Research status and future prospects of ultrasonic vibration-assisted grinding technology and equipment[J]. Journal of Mechanical Engineering，2022，58(9)：244-269.
[9] QIN S Q，ZHU L D，HAO Y P，et al. Theoretical and experimental investigations of surface generation induced by ultrasonic assisted grinding[J]. Tribology International，2023，179：108120.
[10] 赵彪，雷小飞，陈涛，等. 面向航空航天难加工材料磨削过程的模拟与智能控制[J]. 金刚石与磨料磨具工程，2023，43(2)：127-143. ZHAO Biao，LEI Xiaofei，CHEN Tao，et al. Simulation and intelligent control during grinding process for difficult-to-machine materials in aerospace[J]. Diamond and Abrasives Engineering，2023，43(2)：127-143.
[11] CAO Y，ZHAO B，DING W F，et al. On the tool wear behavior during ultrasonic vibration-assisted form grinding with alumina wheels[J]. Ceramics International，2021，47：26465-26474.
[12] CHEN Y，HU Z W，YU Y Q，et al. Processing and machining mechanism of ultrasonic vibration-assisted grinding on sapphire [J]. Materials Science in Semiconductor Processing，2022，142：106470.
[13] 董志刚，马槐遥，康仁科，等. SiC_f/SiC复合材料超声辅助干式侧磨砂轮磨损研究[J]. 机械工程学报，2022，58(15)：134-143. DONG Zhigang，MA Huaiyao，KANG Renke，et al. Study on wear of grinding wheel in ultrasonic assisted dry side grinding of SiC_f/SiC composites[J]. Journal of Mechanical Engineering，2022，58(15)：134-143.
[14] DING W F，HUANG Q，ZHAO B，et al. Wear characteristics of white corundum abrasive wheel in ultrasonic vibration-assisted grinding of AISI 9310 steel[J]. Ceramics International，2023，49：12832-12839.
[15] BHADURI D，SOO S L，NOVOVIC D，et al. Ultrasonic assisted creep feed grinding of Inconel 718[J]. Procedia CIRP，2013，6：615-620.
[16] 丁凯，李奇林，雷卫宁，等. 单颗磨粒超声辅助磨削SiC陶瓷材料去除机理[J]. 中国机械工程，2021，32(19)：2331-2339. DING Kai，LI Qilin，LEI Weining，et al. Material removal mechanism during UAG of SiC ceramic with a brazed single abrasive grain tool[J]. China Mechanical Engineering，2021，32(19)：2331-2339.
[17] WANG Q Y，LIANG Z Q，WANG X B，et al. Modelling and analysis of generation mechanism of micro-surface topography during elliptical ultrasonic assisted grinding[J]. Journal of Materials Processing Technology，2020，279：116585.
[18] LIANG Z Q，WANG X B，WU Y B，et al. An investigation on wear mechanism of resin-bonded diamond wheel in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire[J]. Journal of Materials Processing Technology，2012，212：868-876.
[19] CHEN J B，FANG Q H，WANG C C，et al. Theoretical study on brittle-ductile transition behavior in elliptical ultrasonic assisted grinding of hard brittle materials[J]. Precision Engineering，2016，46：104-117.
[20] ZHAO B，CHANG B Q，WANG X B，et al. System design and experimental research on ultrasonic assisted elliptical vibration grinding of nano-ZrO₂ ceramics[J]. Ceramics International，2019，45：24865-24877.
[21] 梁志强，王西彬，吴勇波，等. 垂直于工件平面的二维超声振动辅助磨削单晶硅表面形成机制的试验研究[J]. 机械工程学报，2010，46(19)：171-176. LIANG Zhiqiang，WANG Xibin，WU Yongbo，et al. Mechanism of surface formation for two-dimensional ultrasonic vibration assisted grinding of monocrystal silicon with vertical workpiece vibration[J]. Journal of Mechanical Engineering，2010，46(19)：171-176.
[22] ZHANG K，YIN Z，DAI C W，et al. Material removal mechanism of SiC ceramics by elliptic ultrasonic vibration-assisted grinding (EUVAG) using single grain[J]. Ceramics International，2023，49：10041，10055.
[23] 李庚卓，吴勇波，汪强. 氮化铝陶瓷的椭圆超声辅助固结磨粒抛光研究[J]. 航空制造技术，2022，65(8)：64-68，75. LI Gengzhuo，WU Yongbo，WANG Qiang. Elliptic ultrasonic assisted fixed-abrasive polishing of AlN ceramics[J]. Aeronautical Manufacturing Technology，2022，65(8)：64-68，75.
[24] WANG Q Y，ZHAO W X，LIANG Z Q，et al. Investigation of diamond wheel topography in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using fractal analysis method[J]. Ultrasonics，2018，84：87-95.
[25] PENG Y F，LIANG Z Q，WU Y B，et al. Effect of vibration on surface and tool wear in ultrasonic vibration-assisted scratching of brittle materials[J]. The International Journal of Advanced Manufacturing Technology，2012，59：67-72.
[26] LI C L，PENG Y，CHEN D L，et al. Theoretical investigation of vertical elliptic vibration-assisted grinding (EVAG) technology[J]. The International Journal of Advanced Manufacturing Technology，2018，94：2315-2324.
[27] STRUG M，DENKENA B，BREIDENSTEIN B，et al. Process-related characteristic-based topography evaluation of wear conditions on grinding wheels[J]. The International Journal of Advanced Manufacturing Technology，2022，120：7707-7720.
[28] DING W F，BARBARA L，ZHU Y J，et al. Review on monolayer CBN superabrasive wheels for grinding metallic materials[J]. Chinese Journal of Aeronautics，2017，30：109-134.
[29] 贾东洲，李长河，张彦彬，等. 垂钛合金生物润滑剂电牵引磨削性能及表面形貌评价[J]. 机械工程学报，2022，58(5)：198-211. JIA Dongzhou，LI Changhe，ZHANG Yanbin，et al. Grinding performance and surface morphology evaluation of titanium alloy using electric traction bio micro lubricant[J]. Journal of Mechanical Engineering，2022，58(5)：198-211.
[30] 杨薇，温学兵，肖红，等. 多孔金属结合剂CBN砂轮的研制及其高效磨削加工钛合金研究[J]. 航空制造技术，2019，62(20)：64-69，82. YANG Wei，WEN Xuebing，XIAO Hong，et al. Study on design and performance of porous metal-bonded CBN abrasive wheels during grinding of Ti-6Al-4V titanium alloy[J]. Aeronautical Manufacturing Technology，2019，62(20)：64-69，82.
[31] 黄保腾，张彦彬，王晓铭，等. SG砂轮磨削镍基合金GH4169砂轮磨损机理与磨削性能的实验评价[J]. 表面技术，2021，50(12)：62-70. HUANG Baoteng，ZHANG Yanbin，WANG Xiaoming，et al. Experimental evaluation of wear mechanism and grinding performance of SG wheel in machining nickel-based alloy GH4169[J]. Surface Technology，2021，50(12)：62-70.