纳米结构碳膜的横向载流电接触特性研究

doi:10.3901/JME.2023.17.258

机械工程学报 ›› 2023, Vol. 59 ›› Issue (17): 258-267.doi: 10.3901/JME.2023.17.258

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纳米结构碳膜的横向载流电接触特性研究

范雪^1,2, 王刚^1,2, 胡泽龙^1,2

1. 深圳大学机电与控制工程学院深圳 518060;
2. 深圳大学广东省微纳光机电工程技术重点实验室深圳 518060

收稿日期:2022-09-28 修回日期:2023-02-24 出版日期:2023-09-05 发布日期:2023-11-16
通讯作者: 范雪(通信作者),女,1984年出生,博士,副教授。主要研究方向为微电子器件表面摩擦接触特性,跨尺度表面摩擦特性,界面摩擦机理的透射电镜原位研究。E-mail:fanx@szu.edu.cn
作者简介:王刚,男,1994年出生,硕士。主要研究方向为电接触特性。E-mail:1910293022@email.szu.edu.cn;胡泽龙,男,1996年出生,博士研究生。主要研究方向为多尺度接触摩擦特性及机理。E-mail:2150296001@email.szu.edu.cn
基金资助:
国家自然科学基金资助项目（51975382）。

Electrical Contact Properties of Nanostructured Carbon Films under Transverse Current-carrying Condition

FAN Xue^1,2, WANG Gang^1,2, HU Zelong^1,2

1. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060;
2. Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, Shenzhen University, Shenzhen 518060

Received:2022-09-28 Revised:2023-02-24 Online:2023-09-05 Published:2023-11-16

摘要/Abstract

摘要： 针对非晶碳膜和石墨烯纳晶碳膜两种不同纳米结构碳膜，通过导电金刚石与碳膜接触在薄膜内部产生横向载流，利用电接触纳米压痕测试研究得到石墨烯纳晶碳膜在力电耦合下具有良好的力学和电学稳定性。电流密度对两种纳米结构碳膜的力学性能的影响结果表明：非晶碳膜在电流密度增加时产生结构转变，使其力学性能增加，而石墨烯纳晶碳膜则由于原子密度低，导电性好，在电接触下表现出稳定的力学性能。电接触下的碳膜电学特性研究表明：探针与碳膜接触界面存异质结。随着外加电场强度的增加，两种碳膜的电势势垒呈线性增加；随着载荷增加，材料应变使非晶碳膜电势势垒呈线性增加；而石墨烯纳晶碳膜受应力作用下的能带调制作用较弱，电势势垒稳定，并且由于其扩散电导率较高，在电接触卸载中的电流滞后效应较弱。研究结果为纳米结构碳膜在电接触器件表面的应用提供理论基础。

关键词: 碳膜, 电接触, 力学特性, 电学特性, 纳米结构

Abstract: For the two kinds of carbon films with amorphous and graphene nanocrystallite nanostructures, transverse current-carrying condition is formed when the conductive diamond tip contact with the carbon films. Stable mechanical and electrical properties were obtained for the graphene nanocrystallited carbon films under the mechanical-electrical coupling contact. The effect of current density on the mechanical properties is investigated. Results showed that the elastic modulus and hardness of amorphous carbon film increased with the current density due to the structural transformation, and graphene nanocrystallited carbon films exhibited stable mechanical properties because of the low atomic density and high electric conductivity. Electrical property study showed that heterojunction existed between the tip and the carbon films. With the increase of electric field strength, the potential barrier increased linearly. With the increase of load, the potential barrier increased for the amorphous carbon film with material strain, while it is stable for the graphene nanocrystallited carbon film since the energy band modulation is weak under the stress effect. Besides, ascribed to the high diffused conductivity, the current hysteresis effect was weakened during the unloading process of electrical contact. The outcomes provide a theoretical basis for the application of nanostructured carbon films on the surface of electrical contact devices.

Key words: carbon film, electrical contact, mechanical property, electrical property, nanostructure

中图分类号:

TH117

范雪, 王刚, 胡泽龙. 纳米结构碳膜的横向载流电接触特性研究[J]. 机械工程学报, 2023, 59(17): 258-267.

FAN Xue, WANG Gang, HU Zelong. Electrical Contact Properties of Nanostructured Carbon Films under Transverse Current-carrying Condition[J]. Journal of Mechanical Engineering, 2023, 59(17): 258-267.

参考文献

[1] 钟立强,陈文华,钱萍,等. 贮存剖面下电连接器接触性能退化统计建模研究[J]. 机械工程学报,2018,54(24):197-205. ZHONG Liqiang,CHEN Wenhua,QIAN Ping,et al. Statistical modeling of contact performance degradation of the electrical connectors under the storage profile[J]. Journal of Mechanical Engineering,2018,54(24):197-205.
[2] 李杰浩,王军政,汪首坤,等. 电动汽车电接插件接触电阻振动特性的研究[J]. 机械工程学报,2020,56(11):80-88. LI Jiehao,WANG Junzheng,WANG Shoukun,et al. Study on contact resistance characteristics of electrical connectors of power battery module[J]. Journal of Mechanical Engineering,2020,56(11):80-88.
[3] SPROUSTER D,RUFFELL S,BRADBY J,et al. Quantitative electromechanical characterization of materials using conductive ceramic tips[J]. Acta Materialia,2014,71:153-163.
[4] ZHOU H,PEI Y,LI F,et al. Electric-field-tunable mechanical properties of relaxor ferroelectric single crystal measured by nanoindentation[J]. Applied Physics Letters,2014,104(6):061904.
[5] ZHAO G,LIU M,YANG F. The effect of an electric current on the nanoindentation behavior of tin[J]. Acta Materialia,2012,60(9):3773-3782.
[6] CHENG G,ZHANG Z,DING J,et al. Mechanical and electrical properties of GeSb2Te4 film with external voltage applied[J]. Applied Surface Science,2013,285(B):532-537.
[7] 王君雄,丁建宁,程广贵,等. 掺磷纳米硅薄膜的制备及介观力学性质与介观接触电阻的研究[J]. 真空,2009,46(6):47-50. WANG Junxiong,DING Jianning,CHENG Guanggui,et al. Mesoscopic study on mechanic properties and contact resistance of P-doped Si:H nanofilms[J]. Vacuum,2009,46(6):47-50.
[8] RUFFELL S,BRADBY J,FUJISAWA N,et al. Identification of nanoindentation-induced phase changes in silicon by in situ electrical characterization[J]. Journal of Applied Physics,2007,10(8):083531.
[9] BRADBY J,WILLIAMS J,SWAIN M. In situ electrical characterization of phase transformations in Si during indentation[J]. Physical review. B,Condensed matter,2003,67(8):085205.
[10] NILI H,WALIA S,BHASKARAN M,et al. Nanoscale electro-mechanical dynamics of nano-crystalline platinum thin films:An in situ electrical nanoindentation study[J]. Journal of Applied Physics,2014. 116(16):163504.
[11] ZHANG J,XIANG B,HE Q,et al. Large field-induced strains in a lead-free piezoelectric material[J]. Nature Nanotechnology,2011,6(2):97-101.
[12] 李志宏,丁浩,朱世根. 电接触强化对Ni/Cu复合镀层组织与性能的影响[J]. 金属热处理,2020,45(8):228-232. LI Zhihong,DING Hao,ZHU Shigen,Effect of electrical contact strengthening on microstructure and properties of Ni/Cu composite coatings[J]. Heat Treatment of Metals,2020,45(8):228-232.
[13] ROBERTSON J. Diamond-like amorphous carbon[J]. Materials Science and Engineering R,2002,37(4-6):129-281.
[14] MORI K,TAKADA H,SHIMIZU T,et al. The investigation of graphene film as a new electrical contact material[C]//2016 IEEE 62nd Holm Conference on Electrical Contacts (Holm). Clearwater Beach:IEEE,2016,209-214.
[15] ZHU X,ZHAO Y,MA L,et al. Graphene coating makes copper more resistant to plastic deformation[J]. Composites Communications,2019,12:106-111.
[16] WANG C,DIAO D. Cross-linked graphene layer embedded carbon film prepared using electron irradiation in ECR plasma sputtering[J]. Surface and Coatings Technology,2011,206(7):1899-1904.
[17] HU Z,FAN X,CHEN C. The multiscale frictional behaviors of sp² nanocrystallited carbon films with different ion irradiation densities[J]. Friction,2021,9(5):1025-1037.
[18] WANG C,CHEN C,DIAO D. Top surface modification of carbon film on its structure,morphology and electrical resistivity using electron-ion hybrid irradiation in ECR plasma[J]. Surface and Coatings Technology,2016,308(1):50-56.
[19] WANG C,DIAO D. Self-magnetism induced large magnetoresistance at room temperature region in graphene nanocrystallited carbon film[J]. Carbon,2017,112:162-168.
[20] YANG L,HU G,ZHANG D,et al. Nanosized graphene sheets enhanced photoelectric behavior of carbon film on p-silicon substrate[J]. Applied Physics Letters,2016,109(3):031910.
[21] FAN X,NOSE K,DIAO D,et al. Nanoindentation behaviors of amorphous carbon films containing nanocrystalline graphite and diamond clusters prepared by radio frequency sputtering[J]. Applied Surface Science,2013,273:816-823.
[22] ZHAI Z,SHEN H,CHEN J,et al. Evolution of structural and electrical properties of carbon films from amorphous carbon to nanocrystalline graphene on quartz glass by HFCVD[J]. ACS Applied Materials & Interfaces,2018,10(20):17427-17436.
[23] CHEN W,ZHANG X,DIAO D. Low-energy electron excitation effect on formation of graphene nanocrystallites during carbon film growth process[J]. Applied Physics Letters,2017,111(11):114105.
[24] FAN X,DIAO D. Ion excitation and etching effects on top-surface properties of sp²nanocrystallited carbon films[J]. Applied Surface Science,2018,462:669-677.
[25] FERRARI A,ROBERTSON J. Resonant Raman spectroscopy of disordered,amorphous,and diamond like carbon[J]. Physical Review B,2001,64(7):075414.
[26] OLIVER W,PHARR G. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments[J]. Journal of Materials Research,1992,7(6):1564-1583.
[27] ZUO B,MEI Y,ZHI F,et al. First-principles study of five isomers of two-dimensional GeSe under in-plane strain[J]. Acta Physica Sinica,2019,68(11):113103.
[28] LIAO X,ZHANG X,TAKAI K,et al. Electric field induced sp³-to-sp² conversion and nonlinear electron transport in iron-doped diamond-like carbon thin film[J]. Journal of Applied Physics,2010,107(1):013709.
[29] PODSIADLY-PASZKOWSKA A,KRAWIEC M. Electrical and mechanical controlling of the kinetic and magnetic properties of hydrogen atoms on free-standing silicene[J]. Journal of Physics Condensed Matter,2016,28(28):284004.
[30] GOWDA P,RAMAMURTY U,MISRA A. Tuning of the electro-mechanical behavior of the cellular carbon nanotube structures with nanoparticle dispersions[J]. Applied Physics Letters,2014,104(10):1077-3118.
[31] CAI W,WANG J,HE Y,et al. Strain-modulated photoelectric responses from a flexible alpha-In₂Se₃/3R MoS₂ heterojunction[J]. Nanomicro Letter,2021,13(1):34-37.
[32] LIU H,GAO R,YANG J,et al. Graphene/α-tellurene van der Waals heterobilayers:Interlayer coupling and gate-tunable carrier type and Schottky barriers[J]. Applied Surface Science,2020,525(1):1-6.
[33] CHENG Y,LI L,LI L,et al. Linear regulation of electrical characteristics of InSe/Antimonene heterojunction via external electric field and strain[J]. Surfaces and Interfaces,2021,23(1):1-7.

纳米结构碳膜的横向载流电接触特性研究

Electrical Contact Properties of Nanostructured Carbon Films under Transverse Current-carrying Condition

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