二维运动平台气浮静压导轨承载性能计算与研究

doi:10.3901/JME.2022.23.240

摘要/Abstract

摘要： 为了进一步探索和研究气浮静压润滑支承机理及气浮静压导轨承载性能，提出并研制了一种具有气浮静压润滑支承的精密二维运动平台。结合气浮静压导轨的物理模型建立了其笛卡儿坐标系下的控制方程，采用有限差分方法和流量平衡原理对其控制方程进行了离散差分推导，运用超松弛迭代以及二分快速寻找收敛区间法对其承载性能进行数值计算并开展了实验研究。结果表明：气浮静压导轨承载性能受节流器类型的影响比较显著，多节流孔节流器的承载性能明显优于单节流孔节流器；供气压力对气浮静压导轨承载性能影响显著，供气压力越高其承载性能越强；同等条件下气浮静压导轨组合形式承载性能均优于单独形式承载性能；气浮静压导轨的承载性能实验测试结果和数值计算结果具有较好的一致性，验证了数值计算的有效性。相关研究对推动和促进气浮静压轴承和导轨在精密运动机构和测量设备的研究和工程应用具有较好的借鉴和指导意义。

关键词: 气浮静压导轨, 运动平台, 承载性能, 有限差分, 节流器

Abstract: In order to further explore and study the mechanism of the aerostatic lubrication support and the bearing performance of the aerostatic guideway, a precision two-dimensional motion platform with the aerostatic lubrication support is proposed and developed. Combined with the physical model of the aerostatic guideway, the governing equations in Cartesian coordinate systems are established. The discrete difference derivation of the governing equations is carried out by the finite difference method and the flow balance principle, and the bearing performance is numerically calculated and experimentally studied by the over-relaxation iteration and the dichotomy fast search convergence interval method. The results show that the bearing performance of the aerostatic guideway is significantly affected by the type of the restrictor, and the bearing performance of the restrictor of multiple orifices is obviously better than that of the restrictor of single orifice; The higher the gas supply pressure is, the stronger the bearing performance is; Under the same conditions, the bearing performance of the combined form of the aerostatic guideway is better than that of the single form; The experimental results of the bearing performance of the aerostatic guideway are in good agreement with the numerical results, which verifies the effectiveness of the numerical calculation. The relevant research has good reference and guiding significance for promoting the research and engineering application of the aerostatic bearing and guideway in precision motion mechanism and measuring equipment.

Key words: aerostatic guideway, motion platform, bearing performance, finite difference, restrictor

中图分类号:

TH133

卢志伟, 刘锡尧, 鹿菡, 黄鹏, 朱思达, 刘波, 张君安. 二维运动平台气浮静压导轨承载性能计算与研究[J]. 机械工程学报, 2022, 58(23): 240-250.

LU Zhiwei, LIU Xiyao, LU Han, HUANG Peng, ZHU Sida, LIU Bo, ZHANG Junan. Calculation and Research on Bearing Performance of the Aerostatic Guideway of Two-dimensional Motion Platform[J]. Journal of Mechanical Engineering, 2022, 58(23): 240-250.

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