摩擦纳米发电机与等离子体技术的交叉融合

doi:10.3901/JME.2022.21.171

摘要/Abstract

摘要： 简要介绍了等离子体和摩擦纳米发电机（TENG）的相关概念、发展历程及分类，从绿色节能的角度出发阐述了两者相辅相成的发展现状。在此基础上，分别从等离子体对TENG摩擦材料的表面改性和TENG激励的等离子体两个方面展开综述。基于当前的研究进展和存在的关键问题，梳理了通过等离子体表面改性提升TENG输出性能的各类方法，并进一步阐述了等离子体刻蚀和离子注入\辐照的应用现状，对TENG所能激励的不同等离子体电极结构进行了综述，并对其在输出性能的优化、场发射和质谱分析、物质合成与环境应用等领域的应用进展进行了分析。最后，对等离子体和TENG的融合做出总结，阐述了两者现阶段协同发展存在的问题和未来的发展方向，对今后融合发展的、以应用为导向的研究工作提供一定的参考。

关键词: 等离子体, 摩擦纳米发电机, 绿色技术, 等离子体刻蚀, 质谱分析, 物质检测

Abstract: The concepts of plasma and triboelectric nanogenerator (TENG), development history and their classification are briefly introduced. The development status of these two green technologies are reviewed. On this basis, the review is carried out from two aspects:surface modification of friction materials for TENG by plasma and plasma induced by TENG. The different plasma treatment methods to improve the output performance of TENG are reviewed, especially focus on the plasma etching and ion implantation/irradiation. In addition, the different electrode configuration excited by TENG, and their related applications including optimization of output performance, field emission, mass spectrometry analysis, substance synthesis and environmental applications are reviewed. Finally, the combination of plasma and TENG is summarized, and the problems existing in the coordinated development of these two technologies for the state-of-art are analysed, which will certainly helpful for the integrated development of the plasma and TENG.

Key words: plasma, triboelectric nanogenerator, green technologies, plasma etching, mass spectrometry, substance detection

中图分类号:

TH117
O53

陈恕彬, 王慧妍, 李应龙, 王瑞雪, 孔祥号, 夏章川. 摩擦纳米发电机与等离子体技术的交叉融合[J]. 机械工程学报, 2022, 58(21): 171-185.

CHEN Shubin, WANG Huiyan, LI Yinglong, WANG Ruixue, KONG Xianghao, XIA Zhangchuan. Mutual Integration of Triboelectric Nanogenerator and Plasma Technology[J]. Journal of Mechanical Engineering, 2022, 58(21): 171-185.

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