大口径衍射光栅的污染损伤与清洗技术研究进展

doi:10.3901/JME.2022.09.270

机械工程学报 ›› 2022, Vol. 58 ›› Issue (9): 270-282.doi: 10.3901/JME.2022.09.270

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大口径衍射光栅的污染损伤与清洗技术研究进展

李玉海^1,2, 白清顺¹, 孙浩¹, 张鹏¹, 卢礼华¹, 杜云龙¹, 苗心向², 袁晓东², 刘昊², 韩伟²

1. 哈尔滨工业大学机电工程学院哈尔滨 150001;
2. 中国工程物理研究院激光聚变研究中心绵阳 621900

收稿日期:2021-05-01 修回日期:2021-10-19 出版日期:2022-05-05 发布日期:2022-06-23
通讯作者: 白清顺(通信作者)，男，1974年出生，博士，教授，博士研究生导师。主要研究方向为超洁净制造理论与技术，超精密加工与微纳制造。E-mail：qshbai@hit.edu.cn E-mail:qshbai@hit.edu.cn
作者简介:李玉海，男，1994年出生，博士研究生。主要研究方向为等离子体清洗机理研究及在大口径衍射光栅表面清洗中的应用。E-mail：15546027805@163.com;张鹏，男，1983年出生，博士，副教授，硕士研究生导师。主要研究方向为超精密机电一体化装备研制，超洁净制造理论与技术。E-mail：zp@hit.edu.cn;袁晓东，男，1966年出生，博士，研究员，博士研究生导师。主要研究方向为激光工程和超洁净制造理论与技术。E-mail：xdyuan@caep.cn
基金资助:
国家自然科学基金委员会-中国工程物理研究院NSAF联合基金(U2030109)和国家自然科学基金重点(52075129)资助项目

Research Progress on Contamination Damage and Cleaning Technology of Large-aperture Diffraction Grating

LI Yuhai^1,2, BAI Qingshun¹, SUN Hao¹, ZHANG Peng¹, LU Lihua¹, DU Yunlong¹, MIAO Xinxiang², YUAN Xiaodong², LIU Hao², HAN Wei²

1. Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001;
2. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900

Received:2021-05-01 Revised:2021-10-19 Online:2022-05-05 Published:2022-06-23

摘要/Abstract

摘要： 大口径衍射光栅的污染损伤是目前限制超短超强脉冲激光系统输出能量提升的瓶颈问题。围绕光栅损伤与洁净，分析了衍射光栅的工作原理和结构特性，探究了光栅性能改进措施，得出污染是造成光栅损伤的重要原因之一。在光栅污染损伤过程中，脉冲长度和污染物种类对光栅的损伤特性产生重要影响。并对光栅表面污染物的来源和成分进行分析，认为光栅表面的污染主要分为制作运输污染和运行环境污染两类。多种清洗技术组合是未来发展的重要趋势。分析比较了大口径衍射光栅清洗技术的特点，认为等离子体在线清洗方法可以有效地去除装置运行过程中产生的有机污染物，是未来超短超强脉冲激光系统优选的在线清洗技术。在对比光栅表面污染物表征方式的基础上，综合光栅激光诱导损伤阈值、衍射效率和棱柱机械性能等指标来评价光栅的污染状态和清洗效果。旨在通过大口径衍射光栅的污染损伤特性分析与研究，突破激光系统能量输出的技术瓶颈，拓展大口径光学元件的污染物在线去除思路，为超短超强脉冲激光系统的性能提升奠定基础。

关键词: 大口径衍射光栅, 污染损伤, 激光诱导损伤阈值, 衍射效率, 等离子体清洗

Abstract: The contamination damage of large-aperture diffraction grating is the bottleneck limiting the output energy improvement of ultra-short and ultra-strong pulse laser system at present. Focusing on the damage and cleaning of grating, this study analyzes the working principle and structural characteristics of diffraction grating, explores the improvement measures of grating performance, and concludes that contamination is one of the important causes of grating damage. In the process of grating contamination damage, the pulse length and the type of contaminants have important effects on the grating damage characteristics. The source and composition of the contaminants on the grating surface are analyzed. It is concluded that the contamination on the grating surface can be divided into two categories: manufacturing and transportation contamination, operation environment contamination. The combination of multiple cleaning technologies is an important trend of future development. The characteristics of cleaning technology with large-aperture diffraction grating are analyzed and compared. It is considered that the plasma in-situ cleaning method can effectively remove the organic contaminants produced during the operation of the facility, and it is the preferred in-situ cleaning technology for the future laser system. Based on the comparison of the characterization methods of the surface contaminants of the grating, the contamination state and cleaning effect of the grating were evaluated by combining the parameters of the grating laser-induced damage threshold (LIDT), diffraction efficiency (DE)and prism mechanical properties. The purpose of this study is to break the technical bottleneck of laser system energy output through the analysis and research of contamination damage characteristics of large-aperture diffraction grating, expand the idea of in-situ contaminant removal of large-aperture optical components, and lay a foundation for the performance improvement of ultra-short and ultra-strong pulsed laser system.

Key words: large-aperture diffraction grating, contamination damage, LIDT, diffraction efficiency, plasma cleaning

中图分类号:

TQ413
TJ9

李玉海, 白清顺, 孙浩, 张鹏, 卢礼华, 杜云龙, 苗心向, 袁晓东, 刘昊, 韩伟. 大口径衍射光栅的污染损伤与清洗技术研究进展[J]. 机械工程学报, 2022, 58(9): 270-282.

LI Yuhai, BAI Qingshun, SUN Hao, ZHANG Peng, LU Lihua, DU Yunlong, MIAO Xinxiang, YUAN Xiaodong, LIU Hao, HAN Wei. Research Progress on Contamination Damage and Cleaning Technology of Large-aperture Diffraction Grating[J]. Journal of Mechanical Engineering, 2022, 58(9): 270-282.

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大口径衍射光栅的污染损伤与清洗技术研究进展

Research Progress on Contamination Damage and Cleaning Technology of Large-aperture Diffraction Grating

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