仿形喷嘴磨料射流抛光微结构仿真及试验研究

doi:10.3901/JME.2022.15.177

机械工程学报 ›› 2022, Vol. 58 ›› Issue (15): 177-187.doi: 10.3901/JME.2022.15.177

• 特邀专栏：先进磨粒加工技术 • 上一篇下一篇

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仿形喷嘴磨料射流抛光微结构仿真及试验研究

陈逢军¹, 尹业青¹, 胡天²

1. 湖南大学国家高效磨削工程技术研究中心长沙 410082;
2. 湖南艾凯瑞斯智能科技有限公司长沙 410205

收稿日期:2021-08-17 修回日期:2021-12-17 发布日期:2022-10-13
通讯作者: 陈逢军(通信作者),男,1979年出生,副教授,博士研究生导师。主要研究方向为超精密加工与控制、微结构制造。E-mail:abccfj@126.com
作者简介:尹业青,男,1996年生,硕士研究生。主要研究方向为精密与超精密加工。E-mail:chrisyin0919@163.com
基金资助:
国家自然科学基金（51975204）、湖南省重点研发计划（2021GK2025）和湖南省自然科学基金（2021JJ30103）资助项目。

Simulation and Experimental Research on Polishing Microstructure by Using Abrasive Water Jet with Profiling Nozzle

CHEN Fengjun¹, YIN Yeqing¹, HU Tian²

1. National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha 410082;
2. Hunan Accuracy Intelligent Technology Co. Ltd., Changsha 410205

Received:2021-08-17 Revised:2021-12-17 Published:2022-10-13

摘要/Abstract

摘要： 针对微结构阵列抛光受尺寸限制、抛光工具制造困难且容易磨损等问题，结合磨料水射流形状自适应性、加工成本低廉等特点提出一种仿形喷嘴磨料水射流抛光微结构阵列的方法。基于单颗磨粒去除特性与磨粒流场分布推导壁面材料去除模型，仿真分析仿形喷嘴型槽流场以及壁面材料去除特性后，进行了喷嘴类型与工艺参数对壁面抛光效果的影响实验。结果表明，仿形喷嘴2加工的型槽表面效果良好，在加工压力0.8 MPa、磨粒浓度3%、磨料粒径3μm条件下加工30 min后，型槽底壁面以及侧壁面Ra由初始198 nm分别降至69 nm、80 nm，Ra相对差值13.75%，表明型槽侧壁面与底壁面表面加工质量具有较好的一致性。

关键词: 磨料水射流抛光, 微结构, 仿形喷嘴, 材料去除, 仿真分析

Abstract: Aiming at the problems such as difficulty in manufacturing and easy wear of polishing tools due to the limitation of size in polishing microstructure array, a kind of method called abrasive water jet polishing with profiling nozzle is proposed considering the shape adaptability and low processing cost.The abrasive water jet material removal model is deduced based on single particle removal and the distribution characteristics of the abrasive.After simulating the flow field and material removal characteristics, the effects of the nozzle type and process parameters on polishing are tested.The experimental results show that the profiling single nozzle 2 has a good effect on processing the surface of the groove.Under the conditions of processing pressure 0.8 MPa, abrasive particle concentration 3%, abrasive particle size 3 μm and polishing time 30 min, the Ra of the bottom and side wall surfaces of groove decreased from 198 nm to 69 nm and 80 nm with the relative difference of 13.75%, which indicates the quality of the two wall surfaces has a good consistency.

Key words: abrasive water jet machining, microstructure, profiling nozzle, material removal, simulation analysis

中图分类号:

TG156

陈逢军, 尹业青, 胡天. 仿形喷嘴磨料射流抛光微结构仿真及试验研究[J]. 机械工程学报, 2022, 58(15): 177-187.

CHEN Fengjun, YIN Yeqing, HU Tian. Simulation and Experimental Research on Polishing Microstructure by Using Abrasive Water Jet with Profiling Nozzle[J]. Journal of Mechanical Engineering, 2022, 58(15): 177-187.

参考文献

[1] ZHANG S, ZHOU Y, ZHANG H, et al. Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications[J]. International Journal of Machine Tools and Manufacture, 2019, 142:16-41.
[2] DONG X, ZHOU T, PANG S, et al. Defect analysis in microgroove machining of nickel-phosphide plating by small cross-angle microgrooving[J]. Journal of Nanomaterials, 2018, 2018:1-9.
[3] LI H N, AXINTE D. Textured grinding wheels:A review[J]. International Journal of Machine Tools and Manufacture, 2016, 109:8-35.
[4] TONG Chengcheng, ZHANG Guoqing, TO Suet. Wetting characteristics of bare micro-patterned cyclic olefin copolymer surfaces fabricated by ultra-precision raster milling[J]. RSC Advances, 2016, 6(2):1562-1570.
[5] MENG B, ZHENG J, YUAN D, et al. Machinability improvement of silicon carbide via femtosecond laser surface modification method[J]. Applied Physics A, 2019, 125(1):69.
[6] 尹韶辉, 邓子默, 郭源帆, 等.单晶碳化硅的电磁场励磁大抛光模磁流变抛光[J].表面技术, 2020, 49(10):309-315.YIN Shaohui, DENG Zimo, GUO Yuanfan, et al.Magnetorheological polishing using large polishing tool excited by electromagnetic field for silicon carbide wafer[J]. Surface Technology, 2020, 49(10):309-315
[7] YUNG K C, ZHANG S S, DUAN L, et al. Laser polishing of additive manufactured tool steel components using pulsed or continuous-wave lasers[J]. The International Journal of Advanced Manufacturing Technology, 2019, 105(1):425-440.
[8] 邓家云, 潘继生, 张棋翔, 等.单晶Si C基片的化学机械抛光技术研究进展[J].金刚石与磨料磨具工程, 2020, 40(1):79-91.DENG Jiayun, PAN Jisheng, ZHANG Qixiang, et al. Research progress in chemical mechanical polishing of single crystal Si C substrates[J]. Diamond&Abrasives Engineering, 2020, 40(1):79-91.
[9] JI S M, XU Y M, CHEN G D, et al. Comparative study of magnetic abrasive finishing in free-form surface based on different polishing head[C]//Materials Science Forum.Trans Tech Publications Ltd, 2011, 675:593-596.
[10] 路家斌, 熊强, 阎秋生, 等. 6H-SiC单晶紫外光催化抛光中光照方式和磨料的影响[J].金刚石与磨料磨具工程, 2019, 39(3):29-37.LU Jiabin, XIONG Qiang, YAN Qiusheng, et al. Effects of lights modes and abrasives on UV-photocatalysis assisted polishing of 6H-SiC single crystal[J]. Diamond&Abrasives Engineering, 2019, 39(3):29-37.
[11] BEAUCAMP A T. Micro fluid jet polishing[J]. Micro and Nano Fabrication Technology, 2018:333-369.
[12] 陈逢军, 唐宇, 苗想亮, 等.磨料射流表面抛光研究综述[J].表面技术, 2015, 44(11):119-127.CHEN Fengjun, TAGN Yu, MIAO Xiangliang, et al.Review on the abrasive jet surface polishing(AJP) technology[J]. Surface Technology, 2015, 44(11):119-127
[13] BEAUCAMP A, NAMBA Y, MESSELINK W, et al.Surface integrity of fluid jet polished tungsten carbide[J].Procedia CIRP, 2014, 13:377-381.
[14] CAO Z C, CHEUNG C F. Theoretical modelling and analysis of the material removal characteristics in fluid jet polishing[J]. International Journal of Mechanical Sciences, 2014, 89:158-166.
[15] LV Z, HUANG C, ZHU H, et al. A 3D simulation of the fluid field at the jet impinging zone in ultrasonic-assisted abrasive waterjet polishing[J]. The International Journal of Advanced Manufacturing Technology, 2016, 87(9):3091-3103.
[16] 李华, 任坤, 殷振, 等.超声振动辅助磨料流抛光技术研究综述[J].机械工程学报, 2021, 57(9):233-253.LI Hua, REN Kun, YIN Zhen, et al. Review of ultrasonic vibration-assisted abrasive flow polishing technology[J].Journal of Mechanical Engineering, 2021, 57(9):233-253.
[17] CHEN F, WANG H, TANG Y, et al. Novel cavitation fluid jet polishing process based on negative pressure effects[J]. Ultrasonics Sonochemistry, 2018, 42:339-346.
[18] CHEN F, WANG H, YIN S, et al. Cavitation water-suction polishing of metallic materials under negative-pressure effect[J]. Journal of Materials Processing Technology, 2019, 273:116257.
[19] WANG C J, CHEUNG C F, HO L T, et al. A novel multi-jet polishing process and tool for high-efficiency polishing[J]. International Journal of Machine Tools and Manufacture, 2017, 115:60-73.
[20] MATSUMURA T, MURAMATSU T, FUEKI S. Abrasive water jet machining of glass with stagnation effect[J].CIRP Annals, 2011, 60(1):355-358.
[21] TSAI F C, KE J H. Abrasive jet polishing of micro-channels using compound SiC abrasives with compound additives[J]. The International Journal of Advanced Manufacturing Technology, 2013, 67(5-8):1151-1159.
[22] 周忆, 梁德沛.超声研磨硬脆材料的去除模型研究[J].中国机械工程, 2005(8):664-666.ZHOU Yi, LIANG Depei. Study on the theoretic model of ultrasonic polishing[J]. China Mechanical Engineering, 2005(8):664-666.
[23] FINNIE I. Erosion of surfaces by solid particles[J]. Wear, 1960, 3(2):87-103.
[24] BALZ R, MOKSO R, NARAYANAN C, et al. Ultra-fast X-ray particle velocimetry measurements within an abrasive water jet[J]. Experiments in Fluids, 2013, 54(3):1476.
[25] CAO Z C, CHEUNG C F, REN M. Modelling and characterization of surface generation in fluid jet polishing[J]. Precision Engineering, 2016, 43:406-417.

仿形喷嘴磨料射流抛光微结构仿真及试验研究

Simulation and Experimental Research on Polishing Microstructure by Using Abrasive Water Jet with Profiling Nozzle

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