规则图案影响的氮化硅陶瓷激光辅助磨削机理与质量分析

doi:10.3901/JME.2022.15.152

摘要/Abstract

摘要： 针对氮化硅陶瓷加工效率低、质量难以稳定控制的难点问题，提出采用激光诱导微沟槽辅助磨削加工方法，开展陶瓷表面激光诱导规则图案的实验设计及磨削机理研究。根据激光辅助磨削加工方法，搭建激光辅助磨削加工实验系统，并设计了环形、棋盘形、圆弧形等3种规则图案表面微结构。通过对3种规则图案的微沟槽影响的磨削力学和几何学分析，再结合磨削工艺走刀设计，测量氮化硅陶瓷磨削力以及表面粗糙度。研究结果表明：激光诱导微沟槽辅助磨削可以显著降低工程陶瓷的磨削力以及表面粗糙度，从而有效提高工程陶瓷磨削加工效率与质量。经过激光诱导微织构的表面在40μm磨削深度下的磨削力与10μm磨削深度下未经过激光辅助的磨削力接近，且加工质量最大可提升6%左右。同时，通过磨削力和加工质量对比分析表明环形规则图案是最佳的激光诱导微沟槽轨迹。

关键词: 氮化硅, 激光诱导微沟槽, 磨削机理, 磨削力, 粗糙度

Abstract: In order to solve the problem of difficult machining of silicon nitride ceramics, the laser induced micro-groove assisted grinding is studied.According to the mechanism of laser-assisted grinding, an experimental system of laser-assisted grinding is built, and three kinds of regular pattern surface microstructures, such as ring, checkerboard and arc, are designed.Through the grinding mechanics and geometry analysis of the influence of three kinds of regular patterns micro-grooves, and then combined with the grinding process cutter design, the grinding force and surface roughness of silicon nitride ceramics are measured.The results show that the laser induced micro-groove assisted grinding can reduce the grinding force and surface roughness of engineering ceramics, so as to improve the grinding efficiency and quality of engineering ceramics.The grinding force of the surface with laser induced micro-texture at 40 μm grinding depth is similar to that of the surface without laser assisted grinding at 10 μm grinding depth, and the machining quality can be improved up to 6%.Meanwhile, comparison of grinding force and machining quality shows that the ring regular pattern is the best laser induced micro-groove trajectory.

Key words: silicon nitride, laser induced micro-groove, grinding mechanism, grinding force, surface roughness

中图分类号:

TG580

郑迪昊, 钱炜, 吴重军, 郭维诚. 规则图案影响的氮化硅陶瓷激光辅助磨削机理与质量分析[J]. 机械工程学报, 2022, 58(15): 152-165.

ZHENG Dihao, QIAN Wei, WU Chongjun, GUO Weicheng. Mechanism and Quality Analysis of Laser Assisted Grinding of Silicon Nitride Ceramics Influenced by Regular Patterns[J]. Journal of Mechanical Engineering, 2022, 58(15): 152-165.

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