基于电场驱动喷射微3D打印的大面积微透镜阵列制造研究

doi:10.3901/JME.2021.23.195

机械工程学报 ›› 2021, Vol. 57 ›› Issue (23): 195-208.doi: 10.3901/JME.2021.23.195

扫码分享

基于电场驱动喷射微3D打印的大面积微透镜阵列制造研究

李红珂¹, 胡玉杰¹, 朱晓阳¹, 兰红波¹, 李政豪¹, 杨建军¹, 章圆方², 彭子龙¹, 李宗安³, 杨继全³

1. 青岛理工大学山东省增材制造工程技术研究中心青岛 266520;
2. 新加坡科技与设计大学数字制造与设计中心新加坡 487372 新加坡;
3. 南京师范大学电气与自动化工程学院南京 210046

收稿日期:2020-12-25 修回日期:2021-07-23 出版日期:2021-12-05 发布日期:2022-02-28
通讯作者: 朱晓阳(通信作者),男,1988年出生,博士,副教授,博士研究生导师。主要研究方向为微尺度3D打印工艺及装备研发、微光学器件的设计与制造、透明导电薄膜以及柔性电子3D打印。E-mail:zhuxiaoyang@qtech.edu.cn
作者简介:李红珂,男,1992年出生,博士研究生。主要研究方向为3D打印与微纳制造。E-mail:lhk1164072308@163.com;兰红波,男,1970年出生,博士,教授,博士研究生导师。主要研究方向为微纳尺度3D打印、复合材料3D打印、多材料3D打印、大面积纳米压印光刻、微纳制造。E-mail:hblan99@126.com
基金资助:
国家自然科学基金（51705271，51775288）、山东省高等学校青创科技支持计划（2020KJB003）和山东省重点研发（2019GGX104060）资助项目。

Fabrication of Larger-area Microlenses Arrays Based on Electric-field-driven Jet Micro-scale 3D Printing Technology

LI Hongke¹, HU Yujie¹, ZHU Xiaoyang¹, LAN Hongbo¹, LI Zhenghao¹, YANG Jianjun¹, ZHANG Yuanfang², PENG Zilong¹, LI Zongan³, YANG Jiquan³

1. Shandong Engineering Research Center for Additive Manufacturing, Qingdao University of Technology, Qingdao 266520;
2. Digital Manufacturing and Design Centre, Singapore University of Technology and Design, Singapore 487372 Singapore;
3. School of Electrical and Automation Engineering, Nanjing Normal University, Nanjing 210046

Received:2020-12-25 Revised:2021-07-23 Online:2021-12-05 Published:2022-02-28

摘要/Abstract

摘要： 大面积圆形、柱状及梯度折射率微透镜阵列在裸眼3D、光学传感、仿生学、医疗内窥镜等领域具有非常广泛的需求，然而，如何实现大面积多类型微透镜阵列的简单化、低成本、高效率制造是学术界与产业界共同面临的一项挑战性难题。基于电场驱动喷射微3D打印技术，提出了一种可实现大面积多类型微透镜阵列制备的新方法，通过实验揭示了主要工艺参数（电压、气压，打印速度）对制备的不同类型微透镜形貌与质量的影响与规律，利用提出的方法并结合优化的工艺参数，在玻璃基底上分别实现了面积为120 mm×120 mm、100 cm×45 cm的圆形与柱状微透镜阵列的制造，在柔性PET基底上实现了面积为160 mm×160 mm的圆形微透镜阵列的制造，利用电场驱动喷射微3D打印的多层打印模式实现了折射率梯度变化范围为0.1的梯度折射率微透镜阵列的制造。实验结果表明，制备的微透镜阵列具有良好的几何与光学性能，基于电场驱动喷射微3D打印大面积、多类型微透镜阵列制造方法具有效率高、成本低、批量化的显著优势，为大面积多类型微透镜阵列制造提供了一种全新的解决方案。

关键词: 大面积微透镜阵列, 电场驱动喷射微3D打印, 圆形微透镜, 柱状微透镜, 梯度折射率微透镜

Abstract: Large-area circular, cylindrical and gradient index microlens arrays (MLAs) have a wide range of applications in naked-eye 3D, optical sensing, bionics and medical endoscopes. However, simplification, low-cost, and high-efficiency manufacturing of large-area and multi-type MLAs still remains challenges in academia and industry. A novel large-area and multi-type MLAs fabrication method based on electric-field-driven jet micro-scale 3D printing technology is proposed. A series of experiments are conducted to reveal the influence law of process parameters (driving voltage, air pressure, printing speed) for the fabricated MLAs with different types. As results, the success fabrication of circular MLA with area of 120 mm×120 mm and cylindrical MLA with area of 100 cm×45 cm on glass substrates can be achieved easily via the proposed method and the optimized process parameters. Large area circular MLA can also be fabricated on flexible PET substrate with printing area of 160 mm×160 mm. Moreover, the fabrication of gradient index MLAs with the gradient of refractive index of 0.1 can be realized through multi-layer printing mode of electric-field-driven jet micro-scale 3D printing. All the fabricated large-area MLAs have good geometric and optical properties. The proposed technique is a promising novel tool for the inexpensive and widely-suited fabrication method of large area and multi-type MLAs, which provides a brand-new solution for MLA manufacturing.

Key words: large-area microlens arrays, electric-field-driven jet 3D printing, circular microlens, cylindrical microlens, gradient index microlens

中图分类号:

TH164

李红珂, 胡玉杰, 朱晓阳, 兰红波, 李政豪, 杨建军, 章圆方, 彭子龙, 李宗安, 杨继全. 基于电场驱动喷射微3D打印的大面积微透镜阵列制造研究[J]. 机械工程学报, 2021, 57(23): 195-208.

LI Hongke, HU Yujie, ZHU Xiaoyang, LAN Hongbo, LI Zhenghao, YANG Jianjun, ZHANG Yuanfang, PENG Zilong, LI Zongan, YANG Jiquan. Fabrication of Larger-area Microlenses Arrays Based on Electric-field-driven Jet Micro-scale 3D Printing Technology[J]. Journal of Mechanical Engineering, 2021, 57(23): 195-208.

参考文献

[1] YUAN W,LI L H,LEE W B,et al. Fabrication of microlens array and its application:A review[J]. Journal of Mechanical Engineering,2018,31(1):16-24.
[2] 杨文超,吴亚东,赵思蕊,等. 体感交互的裸眼3D展示系统设计与实现[J]. 西南科技大学学报,2017,32(1):85-91. YANG Wenchao,WU Yadong,ZHAO Sirui,et al. Design and implementation of auto stereoscopic 3D exhibition system based on gesture recognition[J]. Journal of Southwest University of Science and Technology,2017,32(1):85-91.
[3] SHAHINI A,JIN H,ZHOU Z,et al. Toward individually tunable compound eyes with transparent graphene electrode[J]. Bioinspiration & Biomimetics,2017,12(4):046002.
[4] 王丹艺,薛常喜,李闯,等. 基于微透镜阵列的电子内窥镜光学系统设计[J]. 光学学报,2018,38(2):313-318. WANG Danyi,XUE Changxi,LI Chuang,et al. Design of electronic endoscope optical system based on microlens array[J]. Acta Optica Sinica,2018,38(2):313-318.
[5] JUNG H,JEONG K H. Monolithic polymer microlens arrays with high numerical aperture and high packing density.[J]. ACS Applied Materials & Interfaces,2015,7(4):2160.
[6] 孙艳军,陈哲,冷雁冰,等. 基于矩形微透镜阵列的红外焦平面集成技术研究[J]. 红外技术,2014,36(3):225-228. SUN Yanjun,CHEN Zhe,LENG Yanbing,et al. Study on the integration of square aperture spherical micro-lens arrays and infrared focal plane[J]. Infrared Technology,2014,36(3):225-228.
[7] 徐礼威. 微透镜阵列超精密切削加工技术研究[D]. 哈尔滨:哈尔滨工业大学,2015. XU Liwei. Research on ultra-precision turning technology of microlens array[D]. Harbin:Harbin Institute of Technology,2015.
[8] WANG M,YU W,GU E,et al. A novel thermal reflow method for the fabrication of microlenses with an ultrahigh focal number[J]. RSC Advances,2015,5(44):35311-35316.
[9] LIAN Z J,HUNG S Y,SHEN M H,et al. Rapid fabrication of semiellipsoid microlens using thermal reflow with two different photoresists[J]. Microelectronic Engineering,2014,115:46-50.
[10] CHEW W C,WU T J,WU W J,et al. Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement[J]. Journal of Micromechanics and Microengineering,2013,23(6):065008.
[11] ZANG Z,TANG X,LIU X,et al. Fabrication of high quality and low cost microlenses on a glass substrate by direct printing technique[J]. Applied Optics,2014,53(33):7868-7871.
[12] WANG L,LUO Y,LIU Z Z,et al. Fabrication of microlens array with controllable high NA and tailored optical characteristics using confined ink-jetting[J]. Applied Surface Science,2018,417-442.
[13] ZHU X,LI Z,HU Y,et al. Facile fabrication of defogging microlens arrays using electric field-driven jet printing[J]. Optics & Laser Technology,2019,123:105943.
[14] BI X,LI W. Fabrication of flexible microlens arrays through vapor-induced dewetting on selectively plasma-treated surfaces[J]. Journal of Materials Chemistry C,2015,3(22):5825-5834.
[15] JIANG C,LI X,TIAN H,et al. Lateral flow through a parallel gap driven by surface hydrophilicity and liquid edge pinning for creating microlens array[J]. ACS Applied Materials & Interfaces,2014,6(21):18450-18456.
[16] LI X,TIAN H,DING Y,et al. Electrically templated dewetting of a UV-curable prepolymer film for the fabrication of a concave microlens array with well-defined curvature[J]. ACS Applied Materials & Interfaces,2013,5(20):9975-9982.
[17] WANG L,LIU H,JIANG W,et al. Capillary number encouraged the construction of smart biomimetic eyes[J]. Journal of Materials Chemistry C,2015,3(23):5896-5902.
[18] WANG L,LI F,LIU H,et al. Graphene-based bioinspired compound eyes for programmable focusing and remote actuation[J]. ACS Applied Materials & Interfaces,2015,7(38):21416-21422.
[19] LU D X,ZHANG Y L,HAN D D,et al. Solvent-tunable PDMS microlens fabricated by femtosecond laser direct writing[J]. Journal of Materials Chemistry C,2015,3(8):1751-1756.
[20] ZHENG C,HU A,KIHM K D,et al. Femtosecond laser fabrication of cavity microball lens (CMBL) inside a PMMA substrate for super-wide angle imaging[J]. Small,2015,11(25):3007-3016.
[21] MENG X,CHEN F,YANG Q,et al. Simple fabrication of closed-packed IR microlens arrays on silicon by femtosecond laser wet etching[J]. Applied Physics A,2015,121(1):157-162.
[22] OU Y,YANG Q,CHEN F,et al. Direct fabrication of microlens arrays on PMMA with laser-induced structural modification[J]. IEEE Photonics Technology Letters,2015,27(21):2253-2256.
[23] XIE D,CHANG X,SHU X,et al. Rapid fabrication of thermoplastic polymer refractive microlens array using contactless hot embossing technology[J]. Optics Express,2015,23(4):5154-5166.
[24] KIM Y K,JU J H,KIM S M. Replication of a glass microlens array using a vitreous carbon mold[J]. Optics Express,2018,26(12):14936-14944.
[25] PRIBOSEK J,DIACI J. Electromagnetic microforging apparatus for low-cost fabrication of molds for microlens arrays[J]. Journal of Micromechanics and Microengineering,2015,25(6):065018.
[26] ZHOU L,DONG X X,LV G C,et al. Fabrication of concave microlens array diffuser films with a soft transparent mold of UV-curable polymer[J]. Optics Communications,2015,342:167-172.
[27] ZHU X,XU Q,HU Y,et al. Flexible biconvex microlens array fabrication using combined inkjet-printing and imprint-lithography method[J]. Optics & Laser Technology,2019,115:118-124.
[28] 刘昌. 微透镜阵列的快刀伺服超精密加工技术研究[D]. 长春:长春理工大学,2020. LIU Chang. Study on ultra precision machining technology of fast tool servo for microlens array[D]. Changchun:Changchun University of Science and Technology,2020.
[29] CHEN L,KIRCHBERG S,JIANG B Y,et al. Fabrication of long-focal-length plano-convex microlens array by combining the micro-milling and injection molding processes[J]. Applied Optics,2014,53(31):7369-7380.
[30] KIM H S,KIM C K,JANG H W. Fabrication of a microball lens array for OLEDs fabricated using a monolayer microsphere template[J]. Electronic Materials Letters,2013,9(1):39-42.
[31] WATANABE K,MORITA T,KOMETANI R,et al. Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor deposition[J]. Journal of Vacuum Science & Technology B:Microelectronics and Nanometer Structures Processing,Measurement,and Phenomena,2004,22(1):22-26.
[32] JI S,YIN K,MACKEY M,et al. Polymeric nanolayered gradient refractive index lenses:Technology review and introduction of spherical gradient refractive index ball lenses[J]. Optical Engineering,2013,52(11):112105
[33] ZHOU F,CAO W,DONG B,et al. Additive manufacturing of a 3D terahertz gradient-refractive index lens[J]. Advanced Optical Materials,2016,4(7):1034-1040.
[34] HERNANDEZ-SERRANO A I,WEIDENBACH M,BUSCH S F,et al. Fabrication of gradient-refractive- index lenses for terahertz applications by three- dimensional printing[J]. Journal of the Optical Society of America B-optical Physics,2016,33(5):928-931.
[35] SUTANTO E,TAN Y,ONSES M S,et al. Electrohydrodynamic jet printing of micro-optical devices[J]. Manufacturing Letters,2014,2(1):4-7.
[36] COPPOLA S,PAGLIARULO V,VESPINI V,et al. Direct fabrication of polymer micro-lens array[C]//Optical Measurement Systems for Industrial Inspection X. International Society for Optics and Photonics,2017,10329:103294Q.
[37] LUO Z,YIN K,DONG X,et al. Optimal condition for employing an axicon-generated Bessel beam to fabricate cylindrical microlens arrays[J]. Journal of Physics D:Applied Physics,2018,51(18):185104.
[38] ZHONG K,GAO Y,LI F,et al. Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique[J]. Optik-International Journal for Light and Electron Optics,2014,125(10):2413-2416.
[39] LIU X Q,CHEN Q D,GUAN K M,et al. Dry-etching-assisted femtosecond laser machining[J]. Laser & Photonics Reviews,2017,11(3):1600115.
[40] HU Y,ZHU X,LI H,et al. Fabrication of large-area cylindrical microlens array based on electric-field-driven jet printing[J]. Microsystem Technologies,2019,25(12):4495-4503.

基于电场驱动喷射微3D打印的大面积微透镜阵列制造研究

Fabrication of Larger-area Microlenses Arrays Based on Electric-field-driven Jet Micro-scale 3D Printing Technology

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价

[1]	黄金杰, 赵欣. 3D打印中的分层计算研究进展[J]. 机械工程学报, 2024, 60(17): 235-262.
[2]	张驰, 刘富初, 穆英朋, 吴丁一, 吴明, 林雨霄, 韩光超, 樊自田. 基于浆料直写成形的多孔氧化铝陶瓷孔隙率与抗弯强度的相关性研究[J]. 机械工程学报, 2024, 60(17): 330-338.
[3]	喻康, 傅建中, 贺永. 面向软组织缺损修复的组织工程支架研究进展[J]. 机械工程学报, 2024, 60(15): 255-271.
[4]	张鹏, 尹来容, 仝永刚, 黄龙. 基于间隙预测模型的自动铺带轨迹优化方法[J]. 机械工程学报, 2024, 60(5): 296-316.
[5]	杨贞, 梁庆宣, 段玉冰, 刘攀, 王昕, 李涤尘. 多层级异质异构吸波超材料功能化设计及熔融沉积3D打印[J]. 机械工程学报, 2024, 60(3): 319-327.
[6]	石岩, 张恒. 面向选区激光熔化增材制造的多孔结构设计与力学性能分析[J]. 机械工程学报, 2023, 59(18): 175-185.
[7]	任磊, 韩家祥, 张新民, 郭强, 崔晓斌. 圆弧投影法在圆柱立铣刀容屑槽刃磨中的应用[J]. 机械工程学报, 2023, 59(17): 335-348.
[8]	杨三锋, 黄向明, 明阳, 任莹晖. 新型磁流变-剪切增稠阻尼器的力学模型及试验研究[J]. 机械工程学报, 2023, 59(16): 418-426.
[9]	郑联语, 付强, 樊伟, 张学鑫, 刘新玉, 曹彦生. 基于双目视觉和先验加工数据的大型筒件原位位姿感知方法[J]. 机械工程学报, 2023, 59(11): 129-146.
[10]	黄胜, 李涤尘, 张晓宇, 崔滨, 李青宇, 张安峰. 多光束变光斑激光定向能量沉积工艺及分析模型[J]. 机械工程学报, 2023, 59(9): 285-297.
[11]	杨伟东, 刘志越, 王媛媛, 朱东彬, 张争艳. 3DP工艺中STL模型中心排样策略研究[J]. 机械工程学报, 2023, 59(1): 249-258.
[12]	张俊, 鲍雨菲, 方汉良, 宋亚庆. 新型5轴混联加工单元的后置处理算法[J]. 机械工程学报, 2023, 59(1): 298-308.
[13]	郭飞, 汪汝健, 张云, 周华民, 李德群. 塑料注射成型工艺参数优化的模糊规则网络模型[J]. 机械工程学报, 2022, 58(20): 206-220.
[14]	张莉彦, 高丽洁, 马昊鹏, 焦志伟, 杨卫民, 于源. 非溶剂致相分离法3D打印聚醚酰亚胺宏/微观多孔结构的成型工艺研究[J]. 机械工程学报, 2022, 58(15): 283-291.
[15]	敖晓辉, 刘检华, 夏焕雄, 何奇阳, 任策. 选择性激光熔化工艺的介-微观建模与仿真方法综述[J]. 机械工程学报, 2022, 58(5): 239-257.