硅片磨床用空气静压主轴动态特性研究

doi:10.3901/JME.2025.05.108

机械工程学报 ›› 2025, Vol. 61 ›› Issue (5): 108-116.doi: 10.3901/JME.2025.05.108

• 特邀专栏：高性能静压轴承 • 上一篇

扫码分享

硅片磨床用空气静压主轴动态特性研究

徐嘉慧, 康仁科, 朱祥龙, 董志刚, 李猛

大连理工大学高性能精密制造全国实验室大连 116024

收稿日期:2024-03-25 修回日期:2024-10-09 发布日期:2025-04-15
作者简介:徐嘉慧，女，1996年出生，博士研究生。主要研究方向为半导体磨削技术与装备。E-mail：xjh1639360785@163.com;朱祥龙(通信作者)，男，1981年出生，教授，博士研究生导师。主要研究方向为难加工材料超精密加工、测量、监控一体化技术与装备(单晶硅、碳化硅、蓝宝石等硬脆材料，超高强度钢)。E-mail：zhuxianglong@163.com
基金资助:
国家重点研发计划(2020YFB2007600)和国家自然科学基金(51991372)资助项目。

Research on Dynamic Characteristics of Air Static Pressure Spindle for Silicon Wafer Grinding Machine

XU Jiahui, KANG Renke, ZHU Xianglong, DONG Zhigang, LI Meng

National Laboratory of High Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024

Received:2024-03-25 Revised:2024-10-09 Published:2025-04-15

摘要/Abstract

摘要： 空气静压主轴是硅片超精密磨床的关键部件，其刚度是影响硅片磨削后表面磨纹生成的重要因素。首先基于功率谱密度分析方法，分析了硅片磨削后磨纹的频率组成；接着建立了考虑结合面刚度和磨削力的主轴转子动力学模型，分析了轴向刚度和径向刚度对转子频率的影响，推导出转子频率与轴向刚度和径向刚度之间的关系方程。仿真计算结果表明，与轴向刚度相比，径向刚度对磨纹的影响更加敏感；最后，为了降低硅片磨纹的幅值，确定了硅片磨床用空气静压主轴刚度的最优设计指标：轴向刚度为800～1 000 N/μm，径向刚度为90～110 N/μm时，转子频率处于300～410 Hz之间。并设计了一种改进的主轴转子结构方案，该方案下磨纹幅值可以减小20 nm，为硅片磨床用空气静压主轴设计提供参考。

关键词: 硅片磨床, 空气静压主轴, 轴向刚度, 径向刚度

Abstract: The air-bearing spindle is a critical component of the ultra-precision grinding machine for silicon wafers, and its stiffness significantly influences the formation of surface grinding marks on the wafer. First, based on the power spectral density analysis method, the frequency composition of the grinding marks on silicon wafers after grinding is analyzed. Subsequently, a rotor dynamics model of the spindle considering the stiffness of the contact surfaces and grinding forces is established to analyze the impact of axial and radial stiffness on the rotor frequencies. The relationship equation between the rotor frequency and the axial and radial stiffness is derived. Simulation results indicate that compared to axial stiffness, radial stiffness has a more sensitive effect on the grinding marks. Finally, to reduce the amplitude of the silicon wafer grinding marks, the optimal design criteria for the stiffness of the air-bearing spindle used in silicon wafer grinders are determined: an axial stiffness of 800 to 1 000 N/μm and a radial stiffness of 90 to 110 N/μm, resulting in rotor frequencies between 300 and 410 Hz. An improved spindle rotor structure is designed under which the amplitude of the grinding marks can be reduced by 20 nm. It provides a reference for the design of air-bearing spindles for silicon wafer grinders.

Key words: silicon wafer grinding machine, air static pressure spindle, axial stiffness, radial stiffness

中图分类号:

TH113

徐嘉慧, 康仁科, 朱祥龙, 董志刚, 李猛. 硅片磨床用空气静压主轴动态特性研究[J]. 机械工程学报, 2025, 61(5): 108-116.

XU Jiahui, KANG Renke, ZHU Xianglong, DONG Zhigang, LI Meng. Research on Dynamic Characteristics of Air Static Pressure Spindle for Silicon Wafer Grinding Machine[J]. Journal of Mechanical Engineering, 2025, 61(5): 108-116.

参考文献

[1] 高尚，王紫光，康仁科，等. 工件旋转法磨削硅片的磨粒切削深度模型[J]. 机械工程学报，2016，52(17)：86-93. GAO Shang，WANG Ziguang，KANG Renke，et al. Model of grain depth of cut in wafer rotation grinding method for silicon wafers[J]. Journal of Mechanical Engineering，2016，52(17)：86-93.
[2] 崔海龙，岳晓斌，张连新，等. 基于数值模拟的小孔节流空气静压轴承静动态特性研究[J]. 机械工程学报，2016，52(9)：116-121. CUI Hailong，YUE Xiaobin，ZHANG Lianxin，et al. Static and dynamic characteristics of aerostatic bearing based on numerical simulation[J]. Journal of Mechanical Engineering，2016，52(9)：116-121.
[3] 雷群，袁雅阁，杜建军，等. 飞刀铣削中高速气浮电主轴转子动态特性研究[J]. 机械工程学报，2021，57(13)：45-54. LEI Qun，YUAN Yage，DU Jianjun，et al. Study on rotor dynamics characteristics of high speed aerostatic motorized spindle during fly-cutter milling process[J]. Journal of Mechanical Engineering，2021，57(13)：45-54.
[4] DU J J，ZHANG G Q，LIU T，et al. Improvement on load performance of externally pressurized gas journal bearings by opening pressure-equalizing grooves[J]. Tribology International，2014，73：156-166.
[5] CUI H L，WANG Y，YUE X B，et al. Numerical analysis of the dynamic performance of aerostatic thrust bearings with different restrictors[J]. Proceedings of the Institution of Mechanical Engineers，Part J：Journal of Engineering Tribology，2019，233(3)：406-423.
[6] 池长青. 气体动静压轴承的动力学及热力学[M]. 北京：航空航天大学出版社，2008. CHI Changqing. Dynamics and thermodynamics of gas dynamic and static pressure bearings[M]. Beijing：University of Aeronautics and Astronautics Press，2008.
[7] 王海明，叶乐志，李世玉. 大尺寸晶圆磨削减薄设备气浮主轴承载特性研究[J]. 电子工业专用设备，2020，49(5)：6-12+63. WANG Haiming，YE Lezhi，LI Shiyu. Research on large size wafer grinding to reduce the bearing characteristics of thin equipment air floating spindle[J]. Equipment for Electronic Products Manufacturing，2020，49(5)：6-12+63.
[8] 贾谦，林铿，杨帅，等. 结构和工况参数对电主轴动静压轴承性能的影响[J]. 航空动力学报，2023，38(5)：1270-1280. JIA Qian，LIN Keng，YANG Shuai，et al. Influence of structure and working condition parameters on performance of motorized spindle’s hybrid bearings[J]. Journal of Aerospace Power，2023，38(5)：1270-1280.
[9] 唐璐阳，张小龙，郭文军，等. 空气静压主轴有限元建模及动态特性研究[J]. 组合机床与自动化加工技术，2020(2)：38-42. TANG Luyang，ZHANG Xiaolong，GUO Wenjun，et al. Finite element modeling and dynamic characteristics of aerostatic spindle[J]. Modular Machine Tool & Automatic Manufacturing Technique，2020(2)：38-42.
[10] AKHONDZADEH M，VAHDATI M. Study of variable depth air pockets on air spindle vibrations in ultra-precision machine tools[J]. The International Journal of Advanced Manufacturing Technology，2014，73：681-686.
[11] LI J，HUANG M，LIU P. Analysis and experimental verification of dynamic characteristics of air spindle considering varying stiffness and damping of radial bearings[J]. International Journal of Advanced Manufacturing Technology，2019，104：2939-2950.
[12] CHEN S S，CHEUNG C F，ZHANG F H，et al. Three-dimensional modelling and simulation of vibration marks on surface generation in ultra-precision grinding[J]. Precision Engineering，2018，53：221-235.
[13] AN C H，ZHANG Y，XU Q，et al. Modeling of dynamic characteristic of the aerostatic bearing spindle in an ultra-precision fly cutting machine[J]. International Journal of Machine Tools & Manufacture，2010，50(4)：374-385.
[14] CHEN M J，LI M Q，CHENG J，et al. Study on the optical performance and characterization method of texture on KH₂PO₄ surface processed by single point diamond turning[J]. Applied Surface Science，2013，279(15)：233-244.
[15] PENG Z，KIRK T B. Two-dimention fast Fourier transform and power spectrumfor wear particle analysis[J]，Tribology International，1997，30(8)：583-590.
[16] 闫英，周平，郭晓光，等. PSD法在超精密加工质量评价中的应用[J]. 实验室科学，2018，21(4)：11-14. YAN Ying，ZHOU Ping，GUO Xiaoguang，et al. Application of PSD method in ultra-precision machining quality evaluation[J]. Laboratory Science，2018，21(4)：11-14.
[17] 于光，李鹏，赵清亮，等. 超精密加工表面特性的功率谱密度表征与分析[J]. 哈尔滨工业大学学报，2010，42(1)：29-32. YU Guang，LI Peng，ZHAO Qingliang，et al. Characterization of ultra-precision machined surfaces with power spectral density[J]. Journal of Harbin Institute of Technology，2010，42(1)：29-32.
[18] 徐嘉慧，冯艳冰，龚维纬，等. 抛光机用空气静压轴承静态特性研究[J]. 组合机床与自动化加工技术，2023(1)：34-37. XU Jiahui，FENG Yanbing，GONG Weiwei，et al. Study on static characteristics of aerostatic bearing for polishing machine[J]. Modular Machine Tool ＆ Automatic Manufacturing Technique，2023(1)：34-37.
[19] 许光立. 空气主轴振动动态建模与测试研究[D]. 武汉：华中科技大学，2017. XU Guangli. The research on air spindle vibration dynamic model and measurement[D]. Wuhan：Huazhong University of Science and Technology，2017.
[20] ZHU X L，LI Y，DONG Z G，et al. Study into grinding force in back grinding of wafer with outer rim[J]. Advances in Manufacturing，2020，8(3)：361-368.

硅片磨床用空气静压主轴动态特性研究

Research on Dynamic Characteristics of Air Static Pressure Spindle for Silicon Wafer Grinding Machine

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 3

编辑推荐

Metrics

本文评价

[1]	岳松洁, 程凯, 白清顺, 丁辉, 赵亮, 高思煜. 基于超精密磨削耦合效应的空气静压主轴设计分析方法与试验验证[J]. 机械工程学报, 2025, 61(5): 40-49.
[2]	史江海, 冯鑫, 曹宏瑞. 高转速效应下空气静压主轴微铣削加工表面形貌预测研究[J]. 机械工程学报, 2025, 61(3): 259-271.
[3]	王洪昌;蒋书运;梁玉飞. 基于分子电流法轴向永磁轴承轴向刚度的分析[J]. , 2009, 45(5): 102-107.