基于球柱状电流变工具的工件表面形貌演化机理研究

doi:10.3901/JME.2024.09.364

机械工程学报 ›› 2024, Vol. 60 ›› Issue (9): 364-373.doi: 10.3901/JME.2024.09.364

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基于球柱状电流变工具的工件表面形貌演化机理研究

董晓星^1,2,3, 诸铁宇^2,3, 鲁聪达^2,3, 金明生^2,3

1. 嘉兴学院信息科学与工程学院嘉兴 314001;
2. 浙江工业大学机械工程学院杭州 310023;
3. 浙江工业大学特种装备制造与先进加工技术教育部/浙江省重点实验室杭州 310023

收稿日期:2023-06-02 修回日期:2024-02-03 出版日期:2024-05-05 发布日期:2024-06-18
作者简介:董晓星，男， 1995 年出生，博士，讲师。主要研究方向为精密与超精密加工技术。E-mail： dongxiaoxing@zjxu.edu.cn;金明生(通信作者)，男， 1982 年出生，博士，副教授。主要研究方向为精密与超精密加工技术。E-mail： jinmingsheng@zjut.edu.cn
基金资助:
国家自然科学基金(51775510)、浙江省领雁计划(2022C01096)、浙江省自然科学基金(LY21E050012)和嘉兴市科技计划(2023AD11011)资助项目。

Study on the Evolution Mechanism of Workpiece Surface Morphology Based on the Ball-column Electrorheological Polishing Tool

DONG Xiaoxing^1,2,3, ZHU Tieyu^2,3, LU Congda^2,3, JIN Mingsheng^2,3

1. College of Information Science and Engineering, Jiaxing University, Jiaxing 314001;
2. College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310023;
3. Key Laboratory of Special Purpose Equipment and Advanced Processing Technology of Ministry of Education & Zhejiang Province, Zhejiang University of Technology, Hangzhou 310023

Received:2023-06-02 Revised:2024-02-03 Online:2024-05-05 Published:2024-06-18

摘要/Abstract

摘要： 在电流变液体特性基础上，开发一种球柱状电流变抛光工具，研究加工工件表面形貌演化机理。基于Preston方程和赫兹弹性接触摩擦理论，建立球柱状电流变工具的材料去除深度模型与工件表面轮廓演化模型。定点加工实验显示，工件表面轮廓线与理论预测下的轮廓线相近，换算成深度材料去除速率，最大偏差值为55 nm/min。行进加工实验显示，理论计算轮廓在宽度和深度方向上与实际加工区域的测量尺寸接近，表面粗糙度从加工前Ra 78 nm下降至加工后Ra 14 nm。抛光效率随电压或转速的增大而增大，且工件表面粗糙度的稳定值取决于磨粒粒径，越小粒径磨粒的切削刃越小，最终得到的表面粗糙度更低。随加工间距的增大，加工后工件轮廓逐渐由“ U”型向“ W”型转变，该转变过程受电压与转速参数影响，电压占主导地位，转速次之。本文通过对球柱状电流变加工表面形貌演化机理的分析，为电流变面型修整提供了理论依据。

关键词: 电流变抛光, 微加工, 轮廓线, 电场辅助

Abstract: Based on the characteristics of electrorheological liquid, a ball-column electrorheological polishing tool is developed to investigate the evolution mechanism of workpiece surface morphology. The material removal depth model and workpiece surface profile evolution model are established according to the Preston equation and Hertzian elastic contact friction theory. The fixed-point processing experiments show that the workpiece surface profile lines are similar to the predicted under theory, which is calculated as the deviation of the depth material removal rate with a maximum deviation value of 55 nm/min. The moving processing experiments show that the width and depth of the calculated contour are close to the measured dimensions of the actual processing area, and the surface roughness decreased from Ra 78 nm before processing to Ra 14 nm after processing. The polishing efficiency increases with the increase of voltage or rotational speed, and the stable value of surface roughness of the workpiece depends on the abrasive size. The smaller the cutting edge of the abrasive size, the lower the final surface roughness after polishing. When the polishing gap increases, the workpiece surface profile gradually transforms from “U” to “W”, and the transformation process is affected by the voltage and rotational speed, where voltage is dominant, followed by rotational speed. The analysis of evolution mechanism of workpiece surface morphology in ball-column electrorheological polishing provides a theoretical basis for electrorheological profile trimming.

Key words: electrorheological polishing, micromachining, contour profiles, electric field-assisted

中图分类号:

TG161

董晓星, 诸铁宇, 鲁聪达, 金明生. 基于球柱状电流变工具的工件表面形貌演化机理研究[J]. 机械工程学报, 2024, 60(9): 364-373.

DONG Xiaoxing, ZHU Tieyu, LU Congda, JIN Mingsheng. Study on the Evolution Mechanism of Workpiece Surface Morphology Based on the Ball-column Electrorheological Polishing Tool[J]. Journal of Mechanical Engineering, 2024, 60(9): 364-373.

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基于球柱状电流变工具的工件表面形貌演化机理研究

Study on the Evolution Mechanism of Workpiece Surface Morphology Based on the Ball-column Electrorheological Polishing Tool

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