坐标统一用三棱台标准器设计与精度分析

doi:10.3901/JME.2024.22.204

机械工程学报 ›› 2024, Vol. 60 ›› Issue (22): 204-211.doi: 10.3901/JME.2024.22.204

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坐标统一用三棱台标准器设计与精度分析

程真英^1,2, 龚文超^1,2, 刘云龙^1,2, 黄强先^1,2, 李瑞君^1,2

1. 合肥工业大学仪器科学与光电工程学院合肥 230009;
2. 合肥工业大学测量理论与精密仪器安徽省重点实验室合肥 230009

收稿日期:2023-12-01 修回日期:2024-03-18 出版日期:2024-11-20 发布日期:2025-01-02
作者简介:程真英,女,1980年出生,博士,副教授。主要研究方向为仪器精度理论及其应用和微纳测量技术与系统。Email:chengzhenying01@hfut.edu.cn;李瑞君(通信作者),男,1976年出生,博士,教授,博士研究生导师。主要研究方向为微纳测量技术与系统、光电检测技术与系统及精密控制技术与系统。E-mail:rj-li@hfut.edu.cn

Design and Precision Analysis of High-precision Triangular Prism Standard Device for Coordinate Unification

CHENG Zhenying^1,2, GONG Wenchao^1,2, LIU Yunlong^1,2, HUANG Qiangxian^1,2, Li Ruijun^1,2

1. School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009;
2. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei 230009

Received:2023-12-01 Revised:2024-03-18 Online:2024-11-20 Published:2025-01-02
About author:10.3901/JME.2024.22.204

摘要/Abstract

摘要： 为解决具有深孔、微槽、弧面等复杂特征微器件的高精度测量问题，需要采用微纳米接触式测头和白光干涉测头进行复合测量。而在这两种测头构成的复合测量系统中，现有标准器无法对其进行高精度的坐标统一。因此，根据两种测头的测量原理，提出一种三棱台标准器来实现坐标统一。根据三棱台标准器的结构特点，基于几何原理，建立标准器几何参数及其平面度对基准点坐标精度影响的数学模型。根据数学模型进行数值仿真，进一步分析标准器几何误差对基准点求解精度的影响，为标准器参数设计提供设计依据。最后，采用设计加工的标准器对微纳米三坐标测量机与白光干涉仪进行了测头坐标系统一化试验和精度分析。结果表明，采用三棱台标准器能够实现接触式测头和白光干涉测头坐标系统一，坐标统一化配准精度可达2.259 μm。该方法为复合测量中标准器的设计与分析提供参考依据。

关键词: 标准器, 坐标统一, 复合测量, 微纳米接触式测头, 白光干涉测头

Abstract: In order to solve the problem of high-precision measurement of micro-devices with complex features such as deep holes, micro-grooves and curved surfaces, it is necessary to use micro-nano contact probes and white light interference probes for composite measurement. In the composite measurement system composed of these two probes, the existing standard instrument cannot unify the coordinates with high precision. Therefore, according to the measurement principle of the two probes, a triangular prism standard is proposed to achieve coordinate unification. According to the structural features of the triangular prism standard, based on the geometric principle, a mathematical model of the influence of the geometric parameters of the standard and its flatness on the coordinate accuracy of the reference point is established. According to the mathematical model, the numerical simulation is carried out, and the influence of the geometric error of the standard on the accuracy of the reference point is further analyzed, which provides the design basis for the parameter design of the standard. Finally, the unified experiment and accuracy analysis of the probe coordinate system of the micro-nano coordinate measuring machine and the white light interferometer are carried out by using the designed and processed standard. The results show that the coordinate unification of the contact probe and the white light interference probe can be realized by using the high-precision triangular prism standard, and the coordinate unification registration accuracy can reach 2.259 μm. This method provides a reference for the design and analysis of the standard in composite measurement.

Key words: standard device, coordinate unification, composite measurement, micro-nano contact probe, white light interferometer microscope

中图分类号:

TB92
TH72

程真英, 龚文超, 刘云龙, 黄强先, 李瑞君. 坐标统一用三棱台标准器设计与精度分析[J]. 机械工程学报, 2024, 60(22): 204-211.

CHENG Zhenying, GONG Wenchao, LIU Yunlong, HUANG Qiangxian, Li Ruijun. Design and Precision Analysis of High-precision Triangular Prism Standard Device for Coordinate Unification[J]. Journal of Mechanical Engineering, 2024, 60(22): 204-211.

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坐标统一用三棱台标准器设计与精度分析

Design and Precision Analysis of High-precision Triangular Prism Standard Device for Coordinate Unification

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