电场驱动喷射沉积微纳3D打印及其在先进电路和电子制造中的应用

doi:10.3901/JME.2023.09.230

机械工程学报 ›› 2023, Vol. 59 ›› Issue (9): 230-251.doi: 10.3901/JME.2023.09.230

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电场驱动喷射沉积微纳3D打印及其在先进电路和电子制造中的应用

兰红波¹, 李红珂¹, 钱垒², 张广明¹, 于志浩¹, 孙鹏¹, 许权¹, 赵佳伟¹, 王飞¹, 朱晓阳¹

1. 青岛理工大学山东省增材制造工程技术研究中心青岛 266520;
2. 香港理工大学工业与系统工程系香港 999077

收稿日期:2022-05-08 修回日期:2022-11-24 出版日期:2023-05-05 发布日期:2023-07-19
通讯作者: 朱晓阳(通信作者),男,1988年出生,博士,副教授,博士研究生导师。主要研究方向为微尺度3D打印工艺及装备研发、微光学器件的设计与制造、透明导电薄膜以及柔性电子3D打印。E-mail:zhuxiaoyang@qtech.edu.cn E-mail:zhuxiaoyang@qtech.edu.cn
作者简介:兰红波,男,1970年出生,博士,教授,博士研究生导师。主要研究方向为微纳尺度3D打印、复合材料3D打印、多材料3D打印、大面积纳米压印光刻、微纳制造。E-mail:hblan@126.com李红珂,男,1992年出生,博士研究生。主要研究方向为3D打印与微纳制造。E-mail:lhk1164072308@163.com
基金资助:
国家自然科学基金(52175331)、山东省自然科学基金重大基础研究(ZR2020ZD04)和山东省高等学校青创科技支持计划(2020KJB003)资助项目。

Electric-field-driven Jet Deposition Micro-nano 3D Printing and Its Applications in Manufacturing Advanced Circuits and Electronics

LAN Hongbo¹, LI Hongke¹, QIAN Lei², ZHANG Guangming¹, YU Zhihao¹, SUN Peng¹, XU Quan¹, ZHAO Jiawei¹, WANG Fei¹, ZHU Xiaoyang¹

1. Shandong Engineering Research Center for Additive Manufacturing, Qingdao University of Technology, Qingdao 266520;
2. Department of Industrial&Systems Engineering, The Hong Kong Polytechnic University, Hong Kong 999077

Received:2022-05-08 Revised:2022-11-24 Online:2023-05-05 Published:2023-07-19

摘要/Abstract

摘要： 微纳3D打印是近年出现的一种颠覆性新技术,经过10多年的迅猛发展,国内外学者已经提出10多种微纳3D打印工艺,但现有微纳3D打印大都面临打印材料和基材的普适性和兼容性差、大面积宏/微跨尺度结构制造困难、生产成本高,尤其是还存在成形效率(尺寸)和打印精度相矛盾的挑战性难题。经过近10年的研究与技术攻关,提出并建立了一种电场驱动喷射沉积微纳3D打印新技术,围绕该技术在基础理论、数值模拟、关键技术和装备、打印材料、实验研究和工艺优化、工程应用等方面开展了较为系统和深入研究。主要综述了电场驱动喷射沉积微纳3D打印基本原理和近年取得重要进展,尤其是系统介绍了该技术在先进电路和电子制造中的典型应用,旨在为先进电路和电子的制造提供了一种低成本、普适性好的具有工业化应用前景的全新解决方案。

关键词: 微纳尺度3D打印, 电场驱动喷射沉积, 微纳增材制造, 先进电路, 电子制造

Abstract: Micro-nano 3D printing is a disruptive new technology that has emerged in recent years. More than a dozen micro-nano 3D printing processes have been proposed after nearly ten years of rapid development. However, most of the existing micro-nano 3D printing technologies face a series of challenges, such as poor universality and compatibility of printing materials and substrates, difficulties in manufacturing large area macro/micro cross-scale structures, high production costs, and especially the challenging problem of conflicting forming efficiency (size) and printing accuracy. After a decade of technical research, An original electric-field-driven jet deposition micro-nano 3D printing new technology has been proposed and developed. Furthermore, a series of basic theories, numerical simulations, key technologies and equipment, printing materials, experimental research and process optimization, engineering applications, and other aspects have been carried out in more systematic and in-depth research. The basic principles of electric-field-driven jet deposition micro-nano 3D printing and the significant progress achieved in recent years are reviewed, especially the typical applications of the technology in advanced circuit and electronics manufacturing are systematically introduced, aiming to provide a new solution for the manufacturing of advanced circuits and electronics with low cost and good universality with industrial application prospects.

Key words: micro-nano scale 3D printing, electric-field-driven jet deposition, micro-nano additive manufacturing, advanced circuits, electronic manufacture

中图分类号:

TG156

兰红波, 李红珂, 钱垒, 张广明, 于志浩, 孙鹏, 许权, 赵佳伟, 王飞, 朱晓阳. 电场驱动喷射沉积微纳3D打印及其在先进电路和电子制造中的应用[J]. 机械工程学报, 2023, 59(9): 230-251.

LAN Hongbo, LI Hongke, QIAN Lei, ZHANG Guangming, YU Zhihao, SUN Peng, XU Quan, ZHAO Jiawei, WANG Fei, ZHU Xiaoyang. Electric-field-driven Jet Deposition Micro-nano 3D Printing and Its Applications in Manufacturing Advanced Circuits and Electronics[J]. Journal of Mechanical Engineering, 2023, 59(9): 230-251.

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电场驱动喷射沉积微纳3D打印及其在先进电路和电子制造中的应用

Electric-field-driven Jet Deposition Micro-nano 3D Printing and Its Applications in Manufacturing Advanced Circuits and Electronics

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