微火工品用高结构强度MEMS安保装置

doi:10.3901/JME.2022.17.206

机械工程学报 ›› 2022, Vol. 58 ›› Issue (17): 206-214.doi: 10.3901/JME.2022.17.206

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微火工品用高结构强度MEMS安保装置

胡腾江¹, 任炜^1,2, 赵玉龙¹, 王柯心¹

1. 西安交通大学机械制造系统工程国家重点实验室西安 710049;
2. 陕西应用物理化学研究所应用物理化学重点实验室西安 710061

收稿日期:2021-09-11 修回日期:2022-04-16 发布日期:2022-11-07
作者简介:任炜,男,1982年出生,硕士,高级工程师。主要研究方向为MEMS火工技术。E-mail:rw0192@163.com;赵玉龙,男,1968年出生,博士,教授。主要研究方向为MEMS器件设计。E-mail:zhaoyulong@xjtu.edu.cn;王柯心,男,1997年出生,博士研究生。主要研究方向为MEMS火工品技术。E-mail:wkx741565@stu.xjtu.edu.cn

Research on High Structural Strength MEMS S & A Device for Micro Initiator

HU Tengjiang¹, REN Wei^1,2, ZHAO Yulong¹, WANG Kexin¹

1. State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049;
2. Science and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Research Institute, Xi'an 710061

Received:2021-09-11 Revised:2022-04-16 Published:2022-11-07
Contact: 中国博士后科学基金(2018M640977)和中央高校基本科研业务专项资金(xzy012019004)资助项目。

摘要/Abstract

摘要： 为了在保证MEMS(Micro-electro-mechanical-system)安保装置高精度特征的同时大幅提高器件的结构强度，开展了具有金属/硅基复合结构的高强度MEMS安保装置研究。该MEMS安保装置以硅基为基础，通过在硅隔板上方制作金属增强层，解决了器件高精度与高强度的技术矛盾。该MEMS安保装置采用电热原理实现驱动，在11 V特定周期信号的作用下，器件可以在0.9 s内产生1 mm的往复位移，实现了对安保状态的主动控制。起爆隔爆测试结果表明，在解保状态下，复合隔板未对飞片的飞行状态产生影响，飞片可以顺利飞出；在安全状态下，复合隔板与飞片直接碰撞，硅隔板发生破碎但金属隔板保持完整。在金属隔板的限制下，破碎的硅不会飞出形成二次飞片，因此，有效提高了器件的结构强度，确保了MEMS安保装置良好的隔爆性能。MEMS安保装置的整体尺寸为8 mm×15 mm×0.75 mm，最小线宽为5 μm，抗过载能力为10 000 g。该MEMS安保装置具备微型化、集成化特征。

关键词: MEMS安保装置, 金属/硅基复合隔板, 电热驱动, 状态恢复

Abstract: In order to enhance the fabrication precision and the structural strength of MEMS S&A (Micro-Electro-Mechanical-System Safety-and-Arming)device simultaneously, a novel MEMS S&A device with the metal/silicon composite barrier has been introduced. The device is mainly based on the silicon substrate. By designing the reinforce metal layer on the silicon barrier, the technical contradiction between structural precision and strength can be solved. Based on the electro-thermal principle, the MEMS S&A device can generate 1 mm bi-direction displacement in 0.9 s to achieve status conversion. The detonation tests results show that: Under the armed mode, the flyer can fly out smoothly; Under the safe mode, the flyer will hit the composite barrier directly. The silicon part is broken, but the metal part remains intact. Confined by the metal part, the broken silicon will not fly out to form a secondary flyer. Therefore, the structural strength of the device is effectively improved. The total size of MEMS S&A device is 8 mm×15 mm× 0.75 mm, the minimum structure width is 5 μm, and the anti-overload ability is 10 000 g. This MEMS S&A device characterizes miniaturization and integration.

Key words: MEMS S & A device, metal/silicon composite barrier, electro-thermal actuation, status recovery

中图分类号:

TJ45

胡腾江, 任炜, 赵玉龙, 王柯心. 微火工品用高结构强度MEMS安保装置[J]. 机械工程学报, 2022, 58(17): 206-214.

HU Tengjiang, REN Wei, ZHAO Yulong, WANG Kexin. Research on High Structural Strength MEMS S & A Device for Micro Initiator[J]. Journal of Mechanical Engineering, 2022, 58(17): 206-214.

参考文献

[1] 李东杰，李华梅，谭亮，等. 引信电子安全与解除保险装置发展现状及趋势[J]. 探测与控制学报，2015，37(2)：1-6. LI Dongjie，LI Huamei，TAN Liang，et al. Overview on fuze electronic safety and arming device development[J]. Journal of Detection & Control，2015，37(2)：1-6.
[2] 汪仪林，马秋华，张龙山，等. 引信智能化发展构想[J]. 探测与控制学报，2018，40(3)：1-5. WANG Yilin，MA Qiuhua，ZHANG Longshan，et al. The development visualization of fuze intelligentize[J]. Journal of Detection & Control，2018，40(3)：1-5.
[3] 王辅辅，娄文忠. 微机电技术在引信中的应用综述[J]. 探测与控制学报，2016，38(3)：22-28. WANG Fufu，LOU Wenzhong. Overview on MEMS technology application in fuze[J]. Journal of Detection & Control，2016，38(3)：22-28.
[4] 褚恩义，张方，张蕊，等. 第四代火工品部分概念初步探讨[J]. 火工品，2018(1)：5. CHU Enyi，ZHANG Fang，ZHANG Rui，et al. Preliminary discussion of new concepts of the 4th generation pyrotechnics[J]. Initiators & Pyrotechnics，2018(1)：5.
[5] JEONG Jihun，EOM Junseong，LEE Seungs，et al. Miniature mechanical safety and arming device with runaway escapement arming delay mechanism for artillery fuze[J]. Sensors and Actuators A，2018，279：518-524.
[6] QIN Yu，CHEN Liangyu，HAO Yongping，et al. A study on the elastic coefficients of setback micro-springs for a MEMS safety and arming device[J]. Microsystem Technologies，2020，26： 583-593.
[7] WANG Dakui ，LOU Wenzhong ，FENG Yue ，et al. Design of high-reliability micro safety and arming devices for a small caliber projectile[J]. Micromachines，2017，8(8)：234-244.
[8] FENG Hengzhen，LOU Wengzhong，WANG Dakui，et al. Design，test and analysis of a threshold-value judging mechanism in silicon-based MEMS safety and arming device[J]. Journal of Micromechanics and Microengineering，2019，29：065006-065019.
[9] LAKE R.A.，STARMAN LVA.，COUTU R.A.. electrothermal actuators for integrated MEMS safe and arming devices[C]// Proceedings of the SEM Annual Conference. 2010，June 7-10，Indianapolis，Indiana USA.
[10] 单体强，齐杏林，高敏. 基于微光机电技术的引信电子安全系统控制方法[J]. 探测与控制学报，2016，38(4)：27-32. SHAN Tiqiang，QI Xinglin，GAO Min. Electronic safety and arming system controlling based on MOEMS[J]. Journal of Detection & Control，2016，38(4) ：27-32.
[11] PEZOUS H，ROSSI C，SANCHEZ M，et al. Integration of a MEMS based safe arm and fire device[J]. Sensors & Actuators A，2010，159：157-167.
[12] ZHU Peng ，HOU Gang ，WANG Haoyu ，et al. Design，preparation，and performance of a planar ignitor inserted with PyroMEMS safe and arm device[J]. Microelectromechanical Systems，Journal of，2018，27(6) ：1186-1192.
[13] FENG Hengzhen ，LOU Wenzhong ，WANG Dakui ，et al. Explosion suppression mechanism characteristics of MEMS S&A device with in situ synthetic primer[J]. Micromachines，2018，9(12)：652-666.
[14] 尹明，张晶鑫，王可暄,等. 影响微冲击片换能元性能的关键因素初探[J]. 火工品，2019，4：1-5. YIN Ming，ZHANG Jinxin，WANG Kexuan，et al. A preliminary study on the key factors affecting the performance of micro energy conversion unit of slapper detonator[J]. Initiators & Pyrotechnics，2019，4：1-5.
[15] 张庆明，黄风雷. 超高速碰撞动力学引论[M]. 北京：科学出版社，2000. ZHANG Qinming，HUANG Fenglei. Introduction to hypervelocity impact dynamics[M]. Beijing：Science Press，2000.
[16] HU Tengjiang，ZHAO Yulong，ZHAO You，et al. Integration design of a MEMS based fuze[J]. Sensors & Actuators A，2017，268：193-200.
[17] NOGUCHI K，FUJITA H，SUZUKI M，et al. The measurements of friction on micromechatronics elements[C]// 1991 Proceedings. IEEE Micro Electro Mechanical Systems. 1991，Jan 30-2，Nara，Japan.
[18] ZHANG Yuxing，HUANG Qinan，LI Rengang，et al. Macro-modeling for polysilicon cascaded bent beam electrothermal microactuators[J]. Sensors and Actuators A Physical，2006，128(1) ：165-75.
[19] YANG Yusheng，LIN Yuhsin，HU Yuchiuen，et al. A large-displacement thermal actuator designed for MEMS pitch-tunable grating[J]. Journal of Micromechanics & Microengineering，2009，19(1)：015001-015013.
[20] HU Tengjiang，FANG Kuang，ZHANG Zhiming，et al. The research on MEMS S&A device with metal-silicon composite structure[J]. Journal of Microelectromechanical Systems, 2019，28：1088.

微火工品用高结构强度MEMS安保装置

Research on High Structural Strength MEMS S & A Device for Micro Initiator

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