聚合物基表面微结构的逐面式制造技术研究进展

doi:10.3901/JME.2021.21.220

机械工程学报 ›› 2021, Vol. 57 ›› Issue (21): 220-233.doi: 10.3901/JME.2021.21.220

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聚合物基表面微结构的逐面式制造技术研究进展

汪延成^1,2, 刘佳薇², 盘何旻², 梅德庆^1,2

1. 浙江大学流体动力与机电系统国家重点实验室杭州 310027;
2. 浙江大学浙江省先进制造技术重点实验室杭州 310027

收稿日期:2021-04-20 修回日期:2021-08-18 出版日期:2021-11-05 发布日期:2021-12-28
通讯作者: 汪延成(通信作者),男,1982年出生,博士,教授。主要研究方向为机器人智能感知与检测、微制造技术。E-mail:yanchwang@zju.edu.cn
作者简介:刘佳薇,女,1997年出生,硕士研究生。主要研究方向为声表面波辅助光固化三维打印技术。E-mail:21925168@zju.edu.cn;盘何旻,男,1998年出生,硕士研究生。主要研究方向为声表面波辅助光固化三维打印技术。E-mail:22025069@zju.edu.cn;梅德庆,男,1973年出生,博士,教授,博士研究生导师。主要研究方向为微细成形、微制造技术、三维打印技术。E-mail:medqmei@zju.edu.cn
基金资助:
国家自然科学基金（52075484，52175522）和浙江省自然科学基金杰出青年基金（R19E050001）资助项目。

Recent Progress on Manufacturing Technologies in Layer-by-layer Mode for the Fabrication of Polymer-based Surface Microstructures

WANG Yancheng^1,2, LIU Jiawei², PAN Hemin², MEI Deqing^1,2

1. State Key Laboratory of Fluid Power & Mechatronic Systems, Zhejiang University, Hangzhou 310027;
2. Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province, Zhejiang University, Hangzhou 310027

Received:2021-04-20 Revised:2021-08-18 Online:2021-11-05 Published:2021-12-28

摘要/Abstract

摘要： 聚合物基表面微结构在软体机器人、柔性电子器件、仿生机械、生物医学、组织工程等领域有着广泛的应用，将逐面式制造技术应用于聚合物基表面微结构的制造过程可解决传统微压印、光刻、逐点和逐线式制造方法加工周期长、效率低、大面积表面微结构制造脱模难等问题。发展聚合物基表面微结构的逐面式制造技术是当前先进制造技术的研究热点之一，具有广阔的应用前景。首先在阐述了常见的聚合物基表面微结构设计及其制造材料的基础上，重点论述了光刻、纳米压印、数字光投影式3D打印、能场辅助制造、自组装制造等五类逐面式成形制造技术方面的最新研究进展，包括各种制造技术的制造原理、工艺特点及表面微结构的典型应用等。最后，总结预测了聚合物基表面微结构设计、制造及应用方面的发展趋势，并对聚合物基表面微结构的逐面式成形制造技术的未来发展进行了展望。

关键词: 表面微结构, 逐面式, 投影式3D打印, 能场辅助制造, 自组装技术

Abstract: Polymer-based surface microstructures have been widely utilized in soft robotic, flexible electronics, bionic machinery, biomedical, tissue engineering and other fields. The applications of layer-by-layer manufacturing technologies to fabricate polymer-based surface microstructures can solve the problems of traditional micro-imprinting, lithography, point-by-point and line-by-line mode manufacturing processes, such as long processing cycles, low efficiency, and difficulty in demolding large-surfaced microstructures. The development of the manufacturing methods in layer-by-layer mode for polymer-based microstructures becomes the hot topic of advanced manufacturing technology. Firstly, the commonly used polymer-based surface microstructures and their manufacturing materials are presented. Then, the recent progress of lithography, nano-imprinting, digital light processing based 3D printing, energy field-assisted manufacturing, self-assembly technologies are studied, including the manufacturing principle, fabrication process and their typical applications. Finally, the development trends of polymer-based surface microstructure design, fabrication, and applications are summarized and forecasted, and future development trends of polymer-based surface microstructures manufacturing technologies are concluded.

Key words: surface microstructure, layer-by-layer, projection 3D printing, energy field-assisted manufacturing, self-assembly technology

中图分类号:

TH162

汪延成, 刘佳薇, 盘何旻, 梅德庆. 聚合物基表面微结构的逐面式制造技术研究进展[J]. 机械工程学报, 2021, 57(21): 220-233.

WANG Yancheng, LIU Jiawei, PAN Hemin, MEI Deqing. Recent Progress on Manufacturing Technologies in Layer-by-layer Mode for the Fabrication of Polymer-based Surface Microstructures[J]. Journal of Mechanical Engineering, 2021, 57(21): 220-233.

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聚合物基表面微结构的逐面式制造技术研究进展

Recent Progress on Manufacturing Technologies in Layer-by-layer Mode for the Fabrication of Polymer-based Surface Microstructures

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