大负载高精度光栅拼接柔顺并联机构的设计方法

doi:10.3901/JME.2020.19.113

机械工程学报 ›› 2020, Vol. 56 ›› Issue (19): 113-121.doi: 10.3901/JME.2020.19.113

• 特邀专栏：纪念张启先院士诞辰95周年 • 上一篇下一篇

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大负载高精度光栅拼接柔顺并联机构的设计方法

吴石磊¹, 邵忠喜¹, 苏海军², 富宏亚¹

1. 哈尔滨工业大学机电工程学院哈尔滨 150001;
2. 俄亥俄州立大学机械与航空航天工程系哥伦布 43210 美国

收稿日期:2020-06-03 修回日期:2020-08-05 出版日期:2020-10-05 发布日期:2020-11-17
通讯作者: 富宏亚(通信作者),男,1963年出生,教授,博士研究生导师。主要研究方向为纤维铺放技术,复合材料缠绕成型技术和精密非标数控设备研制等。E-mail:hongyafu@hit.edu.cn
作者简介:吴石磊,男,1991年出生,博士研究生。主要研究方向为柔性机构建模、精密定位机器人系统。E-mail:wushilei2009@163.com
基金资助:
国家自然科学基金资助项目（51475114）。

Structure Design Method of Complaint Parallel Mechanism for Grating Tiling with Heavy Load Capacity and High Precision

WU Shilei¹, SHAO Zhongxi¹, SU Haijun², FU Hongya¹

1. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001;
2. Department of Mechanical and Aerospace Engineering, The Ohio State University, Columbus 43210, United States

Received:2020-06-03 Revised:2020-08-05 Online:2020-10-05 Published:2020-11-17

摘要/Abstract

摘要： 由于加工工艺的限制，通常采用多块小口径光栅机械式拼接的方法来制备大尺寸光栅。为保证打靶成功，要求光栅拼接机构可以实现纳米级的运动精度。基于压电陶瓷驱动的柔顺并联机构可以达到纳米级的运动精度，但是柔性关节的引入降低了机构的承载能力。为解决柔顺并联机构中存在的“大负载”与“高精度”之间的矛盾，引入驱动与承载单元解耦的思想，基于约束设计法提出一种满足大口径光栅拼接机构大行程、大负载、高精度要求的新型光栅拼接柔顺并联机构，该机构具有刚柔混合、串并混联、三面正交、单点支撑、存在一条恰约束被动支链的特点。为实现光栅拼接机构的高精度运动，对设计的新型光栅拼接机构进行运动学分析，并搭建试验系统测试拼接机构的运动精度。试验结果表明利用所提设计方法设计的光栅拼接柔顺并联机构能满足拼接机构的任务要求。

关键词: 光栅拼接, 柔顺并联机构, 大负载, 运动学分析

Abstract: Due to the limitation of the processing technology, the large-aperture grating is usually tiled by using mechanical tiling technique with small segments. In order to guarantee the success of target shooting, the grating tiling mechanism is required to achieve nano-scale motion accuracy. The compliant parallel mechanism actuated by piezoelectric can achieve nano-scale motion accuracy, however, flexible joints reduce the bearing capacity of the mechanism. To solve the contradiction between "heavy load" and "high precision" in the compliant parallel mechanism. A class grating compliant parallel mechanism with large stroke, heavy load capacity, high precision is proposed based on constraint-based method by decoupling driving and moving units. And, it has the characteristics of rigid-flexible hybrid, series-parallel hybrid, three orthogonal planes, single point supporting, and precisely constrained passive chain. To realize high precision motion, the kinematics analysis of the grating tiling mechanism was carried out. Finally, a series of experiments are carried out to test the motion accuracy. The experimental results show that the compliant parallel mechanism can meet the requirements of grating tiling tasks.

Key words: grating tiling, complaint parallel mechanism, heavy load capacity, kinematics analysis

中图分类号:

TH12

吴石磊, 邵忠喜, 苏海军, 富宏亚. 大负载高精度光栅拼接柔顺并联机构的设计方法[J]. 机械工程学报, 2020, 56(19): 113-121.

WU Shilei, SHAO Zhongxi, SU Haijun, FU Hongya. Structure Design Method of Complaint Parallel Mechanism for Grating Tiling with Heavy Load Capacity and High Precision[J]. Journal of Mechanical Engineering, 2020, 56(19): 113-121.

参考文献

[1] BAI Qingshun,LIANG Yingchun,CHENG Kai,et al. Design and analysis of a novel large-aperture grating device and its experimental validation[J]. Proceedings of the Institution of Mechanical Engineers Part B,Journal of Engineering Manufacture,2013,227(9):1349-1359.
[2] SHAO Zhongxi,WU Shilei,WU Jinguo,et al. A novel 5-DOF high-precision compliant parallel mechanism for large-aperture grating tiling[J]. Mechanical Sciences,2017,8(2):349-358.
[3] 邵忠喜,韩德东,周维江,等. 机械式光栅拼接稳定性全闭环控制技术研究[J]. 机械工程学报,2015,51(10):205-212. SHAO Zhongxi,HAN Dedong,ZHOU Weijiang,et al. Research on the full closed-loop control technology to the stability of the mechanical grating tiling[J]. Journal of Mechanical Engineering,2015,51(10):205.
[4] 邵忠喜,吴石磊,富宏亚. 一种新型大口径光栅拼接柔性定位机构刚度分析[J]. 机械工程学报,2018,54(13):117-125. SHAO Zhongxi,WU Shilei,FU Hongya. Stiffness analysis of a novel flexible positioning mechanism for large-aperture grating tiling[J]. Journal of Mechanical Engineering,2018,54(13):117-125.
[5] WANG Yong,LIU Zhigang,BO Feng,et al. Design and control of an ultra-precision stage used in grating tiling[J]. Chinese Journal of Mechanical Engineering,2007,20(1):1-4.
[6] HORNUNG M,BÖDEFELD R,SIEBOLD M,et al. Alignment of a tiled-grating compressor in a high-power chirped-pulse amplification laser system[J]. Applied optics,2007,46(30):7432-7435.
[7] QIAO J,KALB A,GUARDALBEN M J,et al. Large-aperture grating tiling by interferometry for petawatt chirped pulse amplification systems[J]. Optics Express,2007,15(15):9562-9574.
[8] Blanchot N,Bar E,Behar G,et al. Experimental demonstration of a synthetic aperture compression scheme for multi-petawatt high-energy lasers[J]. Optics express,2010,18(10):10088-10097.
[9] 邱丽芳,王晶琳,刘宁宁. 基于拉力带参数的IST-LEJ设计与分析[J]. 机械工程学报,2018,54(13):94-101. QIU Lifang,WANG Jinglin,LIU Ningning. Design and analysis of IST-LEJ based on tension band parameters[J]. Journal of Mechanical Engineering,2018,54(13):94-101.
[10] XIE Zhongtian,QIU Lifang,YANG Debin. Design and analysis of a variable stiffness inside-deployed lamina emergent joint[J]. Mechanism and Machine Theory,2018,120:166-177.
[11] 李佳杰,陈贵敏. 柔性二级差动式微位移放大机构优化设计[J]. 机械工程学报,2019,55(21):21-28. LI Jiajie,CHEN Guimin. Optimal design of a compliant two-stage differential displacement amplification mechanism[J]. Journal of Mechanical Engineering,2019,55(21):21-28.
[12] CHEN Guimin,MA Yakun,LI Jiajie. A tensural displacement amplifier employing elliptic-arc flexure hinges[J]. Sensors & Actuators A Physical,2016,247(247):307-315.
[13] LI Jiajie,CHEN Guimin. A general approach for generating kinetostatic models for planar flexure-based compliant mechanisms using matrix representation[J]. Mechanism and Machine Theory,2018,129:131-147.
[14] WANG Ruizhou,ZHANG Xianmin. Optimal design of a planar parallel 3-DOF nanopositioner with multi-objective[J]. Mechanism and Machine Theory,2017,112:61-83.
[15] WANG Nianfeng,ZHANG Zhiyuan,ZHANG Xianmin,et al. Optimization of a 2-DOF micro-positioning stage using corrugated flexure units[J]. Mechanism and Machine Theory,2018,121:683-696.
[16] WANG Nianfeng,LIANG Xiaohe,ZHANG Xianmin. Stiffness analysis of corrugated flexure beam used in compliant mechanisms[J]. Chinese Journal of Mechanical Engineering,2015,28(4):776-784.
[17] WANG Nianfeng,ZHANG Zhiyuan,Yue FUE Fan,et al. Design and analysis of translational joints using corrugated flexural beams with conic curve segments[J]. Mechanism and Machine Theory,2019,132:223-235.
[18] 王念峰,张志远,张宪民,等. 三种两自由度柔顺精密定位平台的性能对比与分析[J]. 机械工程学报,2018,54(13):102-109. WANG Nianfeng,ZHANG Zhiyuan,ZHANG Xianmin,et al. Performance comparison and analysis of three 2-DOF compliant precision positioning stages[J]. Journal of Mechanical Engineering,2018,54(13):102-109.
[19] 于靖军,郝广波,陈贵敏,等. 柔性机构及其应用研究进展[J]. 机械工程学报,2015,51(13):53-68. YU Jingjun,HAO Guangbo,CHEN Guimin,et al. State-of-art of compliant mechanisms and their applications[J]. Journal of Mechanical Engineering,2015,51(13):53-68.
[20] 于靖军,裴旭,毕树生,等. 柔性铰链机构设计方法的研究进展[J]. 机械工程学报,2010,46(13):2-13. YU Jingjun,PEI Xu,BI Shusheng,et al. State-of-arts of design method for flexure mechanisms[J]. Journal of Mechanical Engineering,2010,46(13):2-13.
[21] 李海洋,郝广波,于靖军,等. 空间平动柔性并联机构的系统设计方法研究[J]. 机械工程学报,2018,54(13):57-65. LI Haiyang,HAO Guangbo,YU Jingjun,et al. Systematic approach to the design of spatial translational compliant parallel mechanisms[J]. Journal of Mechanical Engineering,2018,54(13):57-65.
[22] MURPHY M D,MIDHA A,HOWELL L L. The topological synthesis of compliant mechanisms[J]. Mechanism and Machine Theory,1996,31(2):185-199.
[23] BLANDING D L. Exact constraint:Machine design using kinematic principle[M]. New York:ASME Press, 1999.
[24] HAO Guangbo,KONG Xianwen. A structure design method for compliant parallel manipulators with actuation isolation[J]. Mechanical Sciences,2016,7(2):247-253.
[25] SU Haijun,DOROZHKIN D V,VANCE J M. A screw theory approach for the conceptual design of flexible joints for compliant mechanisms[J]. Journal of Mechanisms and Robotics,2009,1(4):041009.
[26] YU Jingjun,LI Shouzhong,PEI Xu,et al. Type synthesis principle and practice of flexure systems in the framework of screw theory part I:General methodology[C]//2010 ASME International Design Engineering Conference,Aug. 15-18,2010,Montreal,Canada. New York:ASME,2010:DETC2010-28783.
[27] KONG Xianwen,GOSSELIN C M. Type synthesis of parallel mechanisms[M]. Springer,2007.
[28] YUE Yi,GAO Feng,GE Hao. The reducible design of 6-DOF parallel micro manipulator based on screw theory[C]//13th World Congress in Mechanism and Machine Science,Guanajuato,México,19-25 June,2011:117-185.

大负载高精度光栅拼接柔顺并联机构的设计方法

Structure Design Method of Complaint Parallel Mechanism for Grating Tiling with Heavy Load Capacity and High Precision

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