圆形压电振膜静态位移模型及参数优化分析

doi:10.3901/JME.2018.10.001

机械工程学报 ›› 2018, Vol. 54 ›› Issue (10): 1-9.doi: 10.3901/JME.2018.10.001

• 仪器科学与技术 • 下一篇

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圆形压电振膜静态位移模型及参数优化分析

梁鑫, 胡院林, 王文

上海交通大学制冷与低温研究所上海 200240

收稿日期:2017-08-05 修回日期:2017-12-15 出版日期:2018-05-20 发布日期:2018-05-20
通讯作者: 王文(通信作者),男,1967年出生,教授,博士研究生导师。主要研究方向为微型制冷技术与微型动力机械、热力过程优化与联供技术、低温两相流、热管、高效换热器与电子设备热控制。主持参加多项国家科学自然基金,国家973项目等。E-mail:wenwang@sjtu.edu.cn
作者简介:梁鑫,男,1992年出生。主要研究方向为高效换热与微泵振动。E-mail:1320468265@qq.com;胡院林,男,1991年出生。博士研究生。主要研究方向为微型动力机械与高效热管换热。E-mail:huyuanlin65@sjtu.edu.cn
基金资助:
国家自然科学基金资助项目（51576123）。

Analytical Deflection Model and Parametric Optimization of a Circular Diaphragm-type Piezoactuator

LIANG Xin, HU Yuanlin, WANG Wen

Institute of Refrigeration and Cryogenics, Shanghai Jiao Tong University, Shanghai 200240

Received:2017-08-05 Revised:2017-12-15 Online:2018-05-20 Published:2018-05-20

摘要/Abstract

摘要： 结合薄膜变形原理和压电本构方程，在电压激励条件下，对弹性压电薄膜驱动器进行受力分析，建立压电驱动器横向位移计算模型。在文献提供的几何参数和材料物理参数的基础上，对比理论，文献试验以及模拟仿真的结果，偏差不超过10%，验证理论模型可行。并通过试验测试，进一步分析模型计算结果的准确性，结果表明理论计算与试验数据最大误差在7%以内。基于建立的数学模型，分析不同电压、不同半径比以及不同压电厚度和弹性膜厚度对圆形压电驱动器横向位移的影响。结果表明：圆形压电驱动器中心的横向位移随电压线性变化；在压电驱动器厚度和材料物理参数一定时，压电层与弹性层半径比为0.75时，压电驱动器中心横向位移最大；当电压、材料物理参数以及压电驱动器半径比固定的条件下，分析压电厚度和弹性膜厚度对圆形压电驱动器横向位移影响机理，在压电驱动器总厚度一定条件下，得到最优的压电厚度占总厚度的比值。通过分析不同几何参数对压电驱动器横向位移的影响，指导和优化压电驱动器的结构设计。

关键词: 薄膜压电驱动器, 参数优化, 力学分析, 压电效应

Abstract: With the theory of thin diaphragm deformation and the piezoelectric constitutive equation, under the constant voltage conditions, an analytical model on deflection of a circular piezoelectric actuator is proposed to investigate the stress distribution of the actuator. Based on the geometric parameters and material properties of the literatures, the model results agree with the literature experimental data and simulations within 10%. Furthermore, the accuracy of model results is also validated by experiments with the maximal offset less than 7%. Thus, the model results are used for studying the impacts on piezoelectric actuator displacement in the different parameters, which include the voltage, the radius ratio and the thickness of piezoelectric layer and elastic layer. The results show that:the displacement of circular piezoelectric actuator linearly varies with the voltage, and the optimized radius ratio of piezoelectric layer and elastic layer is 0.75 to obtain the maximal center displacement of circular piezoelectric actuator. Moreover, when the voltage, material properties and radius ratio are fixed, the impacts on the displacement of circular piezoelectric diaphragm under the different thickness of piezoelectric layer and elastic layer are analyzed. With the fixed thickness of the multi-layer, the optimal thickness ratio of piezoelectric layer and elastic layer is obtained by analytical model results. By analyzing the different influences of these parameters, the structure design of a circular piezoelectric actuator is guided and optimized.

Key words: parameter optimization, piezoactuator, piezoelectric effect, strain

中图分类号:

TH113

梁鑫, 胡院林, 王文. 圆形压电振膜静态位移模型及参数优化分析[J]. 机械工程学报, 2018, 54(10): 1-9.

LIANG Xin, HU Yuanlin, WANG Wen. Analytical Deflection Model and Parametric Optimization of a Circular Diaphragm-type Piezoactuator[J]. Journal of Mechanical Engineering, 2018, 54(10): 1-9.

参考文献

[1] 于月民, 冷劲松. 新型压电旋转驱动器的设计与性能测试[J]. 机械工程学报, 2015, 51(8):185-190. YU Yuemin, LENG Jinsong. Design and performance testing of a new type of piezoelectric rotary actuator[J]. Journal of Mechanical Engineering, 2015, 51(8):185-190.
[2] BABOROWSKI J, MURALT P, LEDERMANN N, et al. PZT coated membrane structures for micromachined ultrasonic transducers[J]. Proceedings of the IEEE Ultrasonics Symposium, 2002, 2:483-486.
[3] 卢晓光. 压电薄膜微力传感器特性研究[D]. 大连:大连理工大学, 2006. LU Xiaoguang, Study on microforce sensor based on piezoelectric thin film[D]. Dalian:Dalian University of Technology, 2006.
[4] 金雷, 贾振元, 刘巍. 压电力传感器晶片与电极接触刚度影响研究[J]. 机械工程学报, 2016, 52(22):15-23. JIN Lei, JIA Zhenyuan, LIU Wei. Research on the influence of the contact stiffness of the electric power sensor wafers with the electrode contact[J]. Journal of Mechanical Engineering,2016,52(22):15-23.
[5] GOMES L T. Effect of damping and relaxed clamping on a new vibration theory of piezoelectric diaphragms[J]. Sensors and Actuators A:Physical, 2011, 169(1):12-17.
[6] CUI Q, LIU C, ZHA X F. Modeling and numerical analysis of a circular piezoelectric actuator for valveless micropumps[J]. Journal of Intelligent Material Systems and Structures, 2008, 19(10):1195-1205.
[7] DESHPANDE M, SAGGERE L. An improved analytical model for deflections of a circular multi-layer piezoelectric actuator[C]//ASME 2005 International Mechanical Engineering Congress and Exposition, New York. 2005:415-423.
[8] DESHPANDE M, SAGGERE L. An analytical model and working equations for static deflections of a circular multi-layered diaphragm-type piezoelectric actuator[J]. Sensors and Actuators A:Physical, 2007, 136(2):673-689.
[9] LI S, CHEN S. Analytical analysis of a circular PZT actuator for valveless micropumps[J]. Sensors and Actuators A:Physical, 2003, 104(2):151-161.
[10] ZHANG T, WANG Q M. valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices[J]. Journal of Power Sources, 2005, 140(1):72-80.
[11] RIHAN Y. Design and simulation of a valveless piezoelectric micropump for fuel delivery in fuel cell devices[J]. Journal of New Technology and Materials, 2014, 2(1):5.
[12] HUANG C H, LIN Y C, MA C C. Theoretical analysis and experimental measurement for resonant vibration of piezoceramic circular plates[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2004, 51(1):12-24.
[13] KHORSHIDI K, REZAEI E, GHADIMI A A, et al. Active vibration control of circular plates coupled with piezoelectric layers excited by plane sound wave[J]. Applied Mathematical Modelling, 2015, 39(3):1217-1228.
[14] 范勇. 压电致动式微泵的驱动装置结构[D]. 西安:西安电子科技大学, 2001 FAN Yong, Analysis and design on the actuator structure of micro pump with piezoelectric actuator[D].Xi'an:Xidian University, 2001.
[15] WANG D H, HUO J. Modeling and testing of the static deflections of circular piezoelectric unimorph actuators[J]. Journal of Intelligent Material Systems and Structures, 2010, 21(16):1603-1616.
[16] KAN J W, TANG K H, ZHU G. Study on a piezohydraulic pump for linear actuators[J]. Sensors and Actuators 2009, 149:331-339.
[17] KUHN P. Die maxwellgleichung mit wechselnden Randbedingungen (the maxwell equation with mixed boundary conditions)[J]. Mathematik und Informatik of the University of Essen, 2011, 12:1-58.
[18] 陈位宫, 胡德淦, 郁建伟. 工程力学[M]. 北京:高等教育出版社, 2012. CHEN Weigong, HU Degan, YU Jianwei. Engineering mechanics[M]. Beijing:Higher Education Press, 2012.
[19] 王春雷, 李吉超, 赵明磊. 压电铁电物理[M]. 北京:科学出版社, 2009. WANG Chunlei,LI Jichao,ZHAO Minglei. Piezoelectric ferroelectric physics[M]. Beijing:Science Press, 2009.
[20] 王矜奉, 苏文斌, 王春明. 压电振动理论与应用[M]. 北京:科学出版社, 2011. WANG Jinfeng,SU Wenbin,WANG Chunming. Theory and application of piezoelectric vibration[M]. Beijing:Science Press, 2011.
[21] TIMOSHENKO S P, WOINOWSKY K S. Theory of plates and shells[M]. New York:McGraw-Hill, 1959.
[22] JONES R M. Mechanics of composite materials[M]. Washington, D C:Scripta Book Company, 1975.
[23] DONG S, UCHINO K, LI L, et al. Analytical solutions for the transverse deflection of a piezoelectric circular axisymmetric unimorph actuator[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency control, 2007, 54(6):1240-1249.

圆形压电振膜静态位移模型及参数优化分析

Analytical Deflection Model and Parametric Optimization of a Circular Diaphragm-type Piezoactuator

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