关键词: 确定性抛光;非球面光学元件;残余误差;评价方法

Abstract: Residual error evaluation method for deterministic polishing of aspheric optics is studied. Two residual error evaluation methods, which are axis-direction error method and normal error method respectively, are researched theoretically. It’s inferred that the residual error of aspheric surface should be evaluated by normal error method. A new approach is proposed to calculate normal direction residual error on the basis of the axis-direction residual error of the aspheric surface. There exists difference between these two kinds of error which increases from the center of the aspheric optic to the edge through the comparison of them. Taking bonnet polishing and numerical controlled small tool polishing as examples, experiments are made to quantitatively prove that using axis-direction error method to evaluate residual error in deterministic polishing would introduce different degrees of processing error. It’s found that the processing error is positively correlated with the relative aperture of aspheric optics, which is the ratio of the optic’s aperture and vertex’s curvature radius. Therefore, it is recommended to use axis-direction error method instead of normal error method as the evaluation method of the residual error during deterministic polishing aspheric optics with relatively small relative aperture; the opposite is the other way around.

Key words: deterministic polishing;aspheric optics;residual error;evaluation method