• CN:11-2187/TH
  • ISSN:0577-6686

›› 2012, Vol. 48 ›› Issue (21): 190-198.

• 论文 • 上一篇    

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硬脆材料微磨削表面形成机理试验研究

程军;巩亚东;武治政;王超;曹振轩;刘月明   

  1. 东北大学机械工程与自动化学院
  • 发布日期:2012-11-05

Experimental Study on Mechanism of Surface Formation for Micro-grinding of Hard Brittle Material

CHENG Jun;GONG Yadong;WU Zhizheng;WANG Chao;CAO Zhenxuan;LIU Yueming   

  1. School of Mechanical Engineering and Automation, Northeastern University
  • Published:2012-11-05

摘要: 微磨削作为微尺度硬脆材料元器件的一种重要加工方法越来越受到重视,分析硬脆材料微磨削材料去除机理、提出其应为脆性去除与延性去除的综合作用,并就硬脆材料微磨削中材料去除过程与传统磨削方式的不同建立微磨削表面形成模型。为揭示硬脆材料微磨削过程的表面形成机理,验证所提出的微磨削未变形切屑厚度hm与微磨削表面粗糙度Ra计算模型的科学性和准确性,针对钠钙玻璃这一典型硬脆材料设计了正交微磨削试验,就试验结果进行硬脆材料微磨削表面形貌分析,讨论硬脆材料微磨削表面影响因素以及影响规律。基于试验数据结果对所建立微磨削模型的科学性进行了验证,并通过试验获得了微磨削后表面粗糙度Ra从78 nm至0.98 μm的一系列表面,为硬脆材料微磨削表面形成机理研究提供了理论参考与试验依据。

关键词: 表面形成模型, 微磨削, 未变形切屑厚度, 形貌分析

Abstract: Micro-grinding as an method for micro-machining component of hard brittle material gets much more concerns in micro-manufacturing field, a ductile and brittle regime combined process in hard brittle material micro-grinding removal is proposed by analyzing material removal mechanism, the micro-grinding surface formation model is built by concerning and focusing on the differences between convention grinding and micro-grinding process. In order to prove the mathematical models of micro-grinding undeformed chip thickness hm and surface roughness Ra, an micro-grinding orthogonality experiment on soda-lime glass is designed and carried out. From analysis of experiment results, surface topography and surface roughness effects in micro-grinding hard brittle material are revealed, the surface formation model proposed by is also confirmed. A series of micro-machining surfaces of brittle material between Ra 78 nm to 0.98 μm is achieved, and research theory and experimental reference are provided for hard brittle material mciro-grinding surface formation mechanism.

Key words: Micro-grinding, Surface formation model, Topography analysis, Undeformed chip thickness

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