关键词: LuGre, 纳米操作, 纳米定位, 黏滑驱动

Abstract: Two stick-slip inertial stages respectively for horizontal and vertical positioning are designed and built particularly for nanomanipulation inside a scanning electron microscope (SEM). The flexible hinges of drive mechanism and rubber ring for finely adjusting friction are applied to assure the entire structure compact. Due to linear dynamics of piezoelectric transducer and nonlinear friction in the stick-slip stage, a dynamical model representation based on LuGre model is presented and verified by being compared with experimental results. With largest sizes of 24 mm×24 mm×17 mm and 24 mm×24 mm×34 mm, both of horizontal and vertical stages have resolutions of 8 nm and strokes of 50 mm, while their abilities to lift up to 66g are also be demonstrated. A two-tip manipulation of nanowires is performed in assistant of the nanopositioners developed, and the excellent performance of the nanopositioner in SEM is demonstrated.

Key words: LuGre, Nanomanipulation, Nanopositioning, Stick-slip