关键词: 多电动机同步控制, 多线切割机, 张力控制, 走线系统

Abstract: With rapid development of integrate circuit and photovoltaic industry, silicon material processing technology is becoming more and more appreciated. Especially slicing is a key procedure in silicon material processing. Overall structure of wire-traveling system for multi-wire saw is introduced and its working principle is explained. The kinematics equation of tension control structure for pay-off system is established. The reasons for tension fluctuation are analyzed, and corresponding solution is proposed. After a hardware platform of tension control system is built, indirect tension control is carried out through multi-motor synchronization control. A multi-motor synchronization control method is proposed on the basis of adjacent axis error through definition of tracking error and synchronization error. The integral sliding mode surface is defined for designing control torque, and multi-motor synchronization motion is guaranteed, tension fluctuation is reduced and tension stability is ensured. Experimental results show that the proposed tension control method is very effective. This tension control system has the merits of small tension fluctuation range, high-precision control and convenient adjustment

Key words: Multi-motor synchronization control, Multi-wire saw, Tension control, Wire running system