一种非球面超精密单点磨削与形状误差补偿技术

›› 2010, Vol. 46 ›› Issue (23): 186-191.

一种非球面超精密单点磨削与形状误差补偿技术

陈逢军;尹韶辉;范玉峰;朱勇建;刘庆

湖南大学机械与运载工程学院;湖南大学国家高效磨削工程技术研究中心

发布日期:2010-12-05

Ultra-precision Single-point Grinding Technique and Profile Error Compensation Method for Machining Aspheric Mould

CHEN Fengjun;YIN Shaohui;FAN Yufeng;ZHU Yongjian;LIU Qing

College of Mechanical and Vehicle Engineering, Hunan University National Engineering Research Center for High Efficiency Grinding, Hunan University

Published:2010-12-05

摘要/Abstract

摘要： 随着各种小型的非球面光学零部件的广泛应用，其成型模具的制造精度要求也日趋提高。针对目前我国尚未完全掌握非球面模具的超精密磨削技术的情况，对超精密单点磨削和形状误差补偿方法进行研究。利用在位接触式的测量系统的测量数据重构实际的磨削轮廓曲线。根据实际磨削轮廓与目标轮廓之间的法向距离，求解出法向残余误差，并提出基于超精密单点斜轴磨削的形状误差补偿方法。利用超精密磨床对口径为6 mm的超硬碳化钨的非球面光学模具进行超精密磨削、在位测量与误差补偿试验，经过两次循环，其形状精度(Peak to valley, PV)从449 nm改善至182 nm。

关键词: 单点磨削, 非球面模具, 碳化钨磨削, 误差补偿, 形状误差

Abstract: With the widespread application of various small aspheric optical components, high-precision manufacturing technology of forming molds is deeply demanded. However, the ultra-precision grinding technology of small aspheric moulds is still undeveloped in domestic research. An ultra-precision single-point grinding technique and profile error compensation mode of aspheric mould are studied. Through processing the measured data generated from contact on-machine measurement, the actual ground profile is reconstructed. Normal residual error is obtained through calculating the normal distance between actual ground profile and target profile, subsequently, a compensation method of profile error based on ultra-precision single-point inclined axis grinding is proposed. An experimental test is conducted to grind an aspheric tungsten carbide mould of aperture 6 mm，and the profile accuracy is gradually improved from peak to valley 449 nm to 182 nm after two-time compensation cycle.

Key words: Aspheric mould, Error compensation, Profile error, Single point grinding, Tungsten carbide grinding

中图分类号:

TG58

陈逢军;尹韶辉;范玉峰;朱勇建;刘庆. 一种非球面超精密单点磨削与形状误差补偿技术[J]. , 2010, 46(23): 186-191.

CHEN Fengjun;YIN Shaohui;FAN Yufeng;ZHU Yongjian;LIU Qing. Ultra-precision Single-point Grinding Technique and Profile Error Compensation Method for Machining Aspheric Mould[J]. , 2010, 46(23): 186-191.

[1]	王晓慧, 郭士意, 车冬冬, 兰国生. 基于集合概念的虚公差理论与应用[J]. 机械工程学报, 2019, 55(7): 172-177.
[2]	董泽园, 李杰, 刘辛军, 梅斌, 陈俊宇. 数控机床两种几何误差建模方法有效性试验研究[J]. 机械工程学报, 2019, 55(5): 137-147.
[3]	侯尧华, 张定华, 张莹. 薄壁件加工误差补偿建模与学习控制方法[J]. 机械工程学报, 2018, 54(17): 108-115.
[4]	赵春华, 梁志鹏, 秦红玲. 基于对称度在线检测及补偿的深孔内键槽插削加工方法研究[J]. 机械工程学报, 2018, 54(11): 222-232.
[5]	史晓佳, 张福民, 曲兴华, 刘柏灵, 王俊龙. KUKA工业机器人位姿测量与在线误差补偿[J]. 机械工程学报, 2017, 53(8): 1-7.
[6]	李杰, 谢福贵, 刘辛军, 梅斌, 董泽园. 五轴数控机床空间定位精度改善方法研究现状^*[J]. 机械工程学报, 2017, 53(7): 113-128.
[7]	谢晋, 孙晋祥, 黎宇弘, 李青, 李楠. F-Theta自由曲面透镜的精密与镜面磨削^*[J]. 机械工程学报, 2016, 52(17): 72-77.
[8]	高健, 黄沛霖, 文章, 张亚莉, 邓海祥. 复杂曲面零件加工精度原位检测系统的残余误差补偿^*[J]. 机械工程学报, 2016, 52(15): 139-146.
[9]	侯志泉, 熊万里, 吕浪, 杨明智, 刘能文, 谭艳. 轴颈形状误差对液体静压主轴回转精度的影响^*[J]. 机械工程学报, 2016, 52(15): 147-154.
[10]	郭前建, 赵国勇, 程祥, 齐晓霓. 双转台五轴机床空间误差补偿技术研究^*[J]. 机械工程学报, 2016, 52(13): 189-194.
[11]	陈冰, 郭兵, 赵清亮, 王金虎, 葛成. 树脂基圆弧金刚石砂轮的在位精密成形修整技术[J]. 机械工程学报, 2016, 52(11): 193-200.
[12]	傅玉灿田霖徐九华杨路赵家延. 磨削过程建模与仿真研究现状[J]. 机械工程学报, 2015, 51(7): 197-205.
[13]	杨利坡;于丙强;李荣民;刘宏民;杜长征. 冷轧带钢板形检测误差及异常信号补偿模型[J]. , 2014, 50(6): 30-38.
[14]	孙世政;彭东林;武亮;汤其富. 时栅动态测量误差建模与补偿技术研究[J]. , 2014, 50(22): 10-15.
[15]	郭兵;赵清亮;李洪亮. 无结合剂碳化钨非球面模具的超精密磨削加工[J]. , 2014, 50(13): 190-195.