关键词: 轨迹规划, 精度控制, 离散积分, 扫描运动

Abstract: A trajectory planning method and precision control strategies for scan-move of step-scan projection lithography are investigated. The difference of trajectory planning between step-move and scan-move is firstly discussed. Aiming at the requirements of accuracy and strict synchronization of scan-move, several key issues are analyzed. Considering the accuracy losses in discrete-time implementation of trajectory planning algorithm, the integration strategy in discrete-time domain of precision control of trajectory planning is presented with combination of internal integer integration strategy. Furthermore, a compensation method with a correcting factor of constant velocity scan phase is advanced. Experiment results demonstrate that the proposed trajectory planning algorithm and its precision compensation strategy are accurate and effective. These methods are successfully applied in ultra-precision motion control system of 100 nm step-scan projection lithography equipment.

Key words: Discrete-time integration, Precision control, Scan-move, Trajectory planning