关键词: 薄膜力传感器, 点啮合, 丝网印制, 压敏电阻油墨

Abstract: Aim at meshing force detection between single-point meshing objects, thin film single-point force sensor is brought forward. According to the actual condition of larger force between single-point meshing objects, axially piezoresistive effect of carbon molybdenum disulfide piezoresistive ink is utilized to realize the detection of the mutual force. On the basis of researching the mature technologies of silk-screen printing, a thin film single-point force sensor of 0.15 mm thick is made by using silk-screen printing technologies. Test and analysis show that the thin film single-point force sensor can detect the meshing force between single-point meshing objects, and it has good performance such as a sensitivity of 962.5 /N and a resolution of 0.002 N.

Key words: Piezoresistive ink, Point meshing, Silk-screen printing, Thin film force sensor