• CN:11-2187/TH
  • ISSN:0577-6686

›› 2005, Vol. 41 ›› Issue (3): 155-159.

• 论文 • 上一篇    下一篇

等离子浸没离子注入合成TiN/Ti-O梯度薄膜的成分与力学性能

文峰;黄楠;孙鸿;万国江   

  1. 西南交通大学材料科学与工程学院
  • 发布日期:2005-03-15

COMPOSITION AND MECHANICAL PROPERTIES OF TiN/Ti-O GRADIENT FILMS PREPARED BY PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION

Wen Feng;Huang Nan;Sun Hong;Wan Guojiang   

  1. School of Materials Science and Engineering,Southwest Jiaotong University
  • Published:2005-03-15

摘要: 用等离子浸没离子注入和沉积(PIII-D)的方法,采用三种工艺分别在Si、Ti6Al4V和热解碳(LTIC)表面合成了TiN/Ti-O梯度薄膜。用可编程逻辑控制器(PLC)为核心的一套控制系统控制金属源阴极的推进和气体成分的改变。使用纳米压痕仪、针盘式摩擦磨损试验机和结合力测试仪分析了梯度薄膜的力学性能,梯度薄膜硬度最高可达19.5 Gpa,薄膜结合力可达到68 N左右。采用X射线衍射(XRD)分析表明,表层的薄膜为具有金红石结构的氧化钛,二次离子质谱(SIMS) 对薄膜进行了定性分析,证实薄膜具有梯度特性。采用X射线光电子能谱(XPS)对梯度薄膜进行近表面成分分析,结果表明合成的TiN/ Ti-O薄膜是非化学计量的,其成分组成为TiO2、Ti2O3和TiO。使用扫描电镜(SEM)观察了薄膜磨痕、结合力划痕,结果表明,控制合成的TiN/ Ti-O梯度薄膜具有良好的力学性能。

关键词: TiN/Ti-O梯度薄膜, X射线光电子能谱(XPS), 等离子浸没离子注入(PIII)

Abstract: Titanium oxide titanium nitrogen gradient films are prepared on Si, Ti6Al4V and low temperature isotropic carbon(LTIC) by plasma immersion ion implantation and deposition (PIII-D) under three different processes. The pushing of the metal cathode source and the variation of gas composition are controlled by programmable logical control (PLC). The me-chanical properties of the synthesized films are investigated by nano-indentation tests, pin-on-disc wear experiments, and scratch test. The results show that maximum hardness of the gradient films achieves 19.5 Gpa, and the maximum adhesion between films and substrate is 68 N or so. Structure investiga-tion results show that the surface Ti-O layer of the films is rutile structure. The gradient characteristics of the films are supported by qualitative analysis of second ion mass spectroscopy (SIMS). X-ray photoelectron spectra (XPS) analyses the surface of syn-thesized films. The results of XPS show that synthesized films are non-stoichiometric, whose composition are identified as TiO2, Ti2O3 and TiO. Scanning electron microscope (SEM) is used to observed wear trace and scratch trace of the TiN/Ti-O gradient films. The results show that the films have good wear resistance and high adhesion strength.

Key words: Plasma immersion ion implantation(PIII), TiN/Ti-O gradient film, X-ray photoelectron spectra(XPS)

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