关键词: 电极在线制作与检测, 伺服控制策略, 微能脉冲电源, 微三维结构, 微细电火花加工

Abstract: The micro-EDM equipments with three linked axes are developed. The key technique and realization approach of micro-EDM using the equipment are also discussed. The micro-energy pulse power source satisfied with versatile demands is designed by the analysis of the realization approach. To solve the crawl problem of servo mechanism at small feed, a suitable control strategy is applied in the equipment. The microelectrode on-line fabrication and measure is studied and the error of on-line measure is also discussed. The micro-shaft with minimum diameter 12 μm and the micro-hole with minimum diameter 25 μm can be machined stably through lots of experiments on the equipment. And a micro-facial sculpture with free space curved surface and size 1 mm×0.3 mm×0.18 mm is also machined successfully.

Key words: Electrode on-line fabrication and measure, Micro-EDM, Micro-energy pulse power source, Servo control strategy, Three-dimensional microstructure