• CN:11-2187/TH
  • ISSN:0577-6686

›› 2004, Vol. 40 ›› Issue (8): 72-75.

• 论文 • 上一篇    下一篇

多层悬臂梁静电作用下的弯曲及吸合电压分析

聂萌;黄庆安;王建华;戎华   

  1. 东南大学MEMS教育部重点实验室;合肥工业大学理学院
  • 发布日期:2004-08-15

ANALYSIS OF DEFLECTION AND PULL- IN VOLTAGE OF A MULTI-LAYER CANTILEVER UNDER AN ELECTROSTATIC LOAD

Nie Meng;Huang Qing’an;Wang Jianhua;Rong Hua   

  1. Key Laboratory of MEMS of Ministry of Education, Southeast University School of Science, Hefei University of Technology
  • Published:2004-08-15

摘要: 多层悬臂梁MEMS器件具有广泛的应用,其吸合电压对器件性能有重要影响。通过选取合适的挠度试函数,并考虑多层悬臂梁中的绝缘层对等效间隙高度的影响,运用能量法分析了多层悬臂梁在静电作用下的弯曲情况。推导出了梁在发生吸合现象时,其自由端归一化的挠度值和对应的吸合电压的解析表达式。用Coventor软件中的CoSolveEM模块验证所得公式,表明模型具有较高的精度。所得结论对静电执行结构设计具有一定的参考价值。

关键词: 等效间隙高度, 多层悬臂梁, 挠度试函数, 吸合

Abstract: A novel trial solution of deflection for a multi-layer cantilever under an electrostatic load is presented. The relationship between applied voltage and deflection of the cantilever is analyzed by energy method, with effective gap spacing between the multi-layer cantilever and fixed planar electrode below the cantilever taken into account. The value of normalized deflection at the free tip of the multi-layer cantilever is obtained when pull-in phenomena occur, and analytical equation of pull-in voltage has also been obtained. The results are verified through CoSolveEM module in Coventor, showing high accuracy.

Key words: Effective gap spacing, Multi-layer cantilever, Pull-in, Trial solution

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