关键词: 摆片质量, 机械参数, 加速度计, 微机械

Abstract: The proof mass of a comb-finger MEMS accelerometer is an important mechanical parameter, which will affect the performance of the accelerometer greatly, so it is necessary to acquire the actual value of the proof mass. A method based on the open-loop frequency response experiment and the static electrostatic force experiment is investigated for this purpose. The equation set which contains the variable of the proof mass can be derived from the open-loop transfer function and the equation of the force balance. Then the actual value of the proof mass can be resolved from the equation set. The experimental results show that the actual value of the proof mass can be es-timated with a high accuracy by this method. It is also a con-venient and useful method to be used in the fieldwork without the special requirement of environment and costly facilities.

Key words: Accelerometer, Mechanical parameters, Micro electromechanical systems, Proof mass