关键词: 弹性步行机构, 微电子机械系统, 微机械 微机器人, 压电微驱动器

Abstract: The mathematical model of a micro piezoelectric elastic legged robot in pipeline is found. The robotic structure frequency is worked out with this model, which is nearly equal to the frequency from the robotic structure experiment. It indicates that the analysis on the robot is correct. Furthermore, the work principle and the locomotion characteristics of the robot are researched. Besides, the piezoelectric robotic structure parameters effect on the robotic structure properties is structure parameters’ effect on the robotic structure properties is studied.

Key words: MEMS Micro robot, Micro electromechanical system, New elastic walking mechanism, Piezoelectric micro actuator