关键词: 等离子体浸没离子注入, 方轨形靶, 流体模拟

Abstract: Plasma immersion nitrogen ion implantation of squares leeper target of SS304 stainless steel is presented. The experimental results show that the surface microhardness is substantially increased and the tribological properties are also greatly improved, in which the properties of the top surface is more modified than that of the side surfaces. The plasma dynamic process is simulated by two-dimensional fluid model in the PIII of the square target. It is found that the implanted dose peaks in the center of the top surface, and the dose implanting into the side surfaces is much less than that of the top surface owing to that the ions flowing nearby are absorbed by both of the side surface and the bottom extension surface, thereby leading to different modified results.

Key words: Fluid simulation, Plasma immersion ion implantation, Square sleeper target