• CN:11-2187/TH
  • ISSN:0577-6686

›› 1995, Vol. 31 ›› Issue (5): 29-33.

• 论文 • 上一篇    下一篇

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微小尺寸的计算机辅助测量方法

颜云辉;鹫见新一   

  1. 东北大学;日本东北工业技术研究所
  • 发布日期:1995-09-01

COMPUTER AIDED MEASURING METHOD OF MICROSIZE

Yan Yunhui;Shinichi Sumi   

  1. Northeastern university Tohoku National Industrial Research Institute, Sendai, 983, Japan
  • Published:1995-09-01

摘要: 讨论了显微镜-计算机测量系统,提出了用加权最小二乘回归法测量微小尺寸的方法。实测结果表明,这种方法具有良好的稳定性和较高测量精度。研究表明,由于摄象扫描速度等因素的影响,实际测量时应考虑水平方向和垂直方向之间存在的显著差异。

关键词: 二值化, 计算机辅助测量, 图象处理, 象素加权回归法

Abstract: A microscope-TV camera-computer aided measuring system is discussed, and a method of measuring microsize based on the weighted least square regression is proposed. The results of experiment show that the method has a good stability and high precise, and that there is a significant difference between the vertical and horizontal directions because the factors such as the scanning velocity of the camera can affect the values of pixels in CCD, which must be considered in measuring.

Key words: Computer aided measuring, Image process, Pixel, Weighted regression method Binarization