柔性传感器在流动测量中的研究进展与挑战

doi:10.3901/JME.260221

机械工程学报 ›› 2026, Vol. 62 ›› Issue (10): 1-22.doi: 10.3901/JME.260221

• 仪器科学与技术 • 上一篇

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柔性传感器在流动测量中的研究进展与挑战

李佳尧^1,2, 严宇超¹, 张文龙^1,2, 邓进军², 马炳和², 常洪龙², 苑伟政^1,2, 虞益挺^1,2

1. 西北工业大学宁波研究院宁波 315103;
2. 西北工业大学机电学院西安 710072

收稿日期:2025-05-09 修回日期:2025-12-05 发布日期:2026-07-29
作者简介:李佳尧,男,2002年出生,硕士研究生。主要研究方向为柔性MEMS传感器的设计与制造。E-mail:lijiayao@mail.nwpu.edu.cn;严宇超(通信作者),男,1991年出生,博士,副研究员。主要研究方向为柔性MEMS流动感知芯片设计、制造和应用。E-mail:yanyuchao@nwpu.edu.cn;张文龙,男,2002年出生,硕士研究生。主要研究方向为光学MEMS器件的设计与制造。E-mail:wenlongzhang@mail.nwpu.edu.cn;邓进军,男,1978年出生,博士,教授,博士研究生导师。主要研究方向为流动测控微器件、应用微系统及微纳米检测技术。E-mail:dengjj@nwpu.edu.cn;马炳和,男,1972年出生,博士,教授,博士研究生导师。主要研究方向为微机电系统、高性能微传感器技术。E-mail:mabh@nwpu.edu.cn;常洪龙,男,1977年出生,博士,教授,博士研究生导师。主要研究方向为微纳设计理论及方法、微纳传感机理及微弱信号检测与调理技术。E-mail:changhl@nwpu.edu.cn;苑伟政,男,1961年出生,博士,教授,博士研究生导师。主要研究方向为微机电系统(MEMS)。E-mail:yuanwz@nwpu.edu.cn;虞益挺,男,1980年出生,博士,教授,博士研究生导师。主要研究方向为MEMS光功能芯片及先进视觉感知技术。E-mail:yyt@nwpu.edu.cn
基金资助:
国家重点研发计划(2024YFB3212800)、国家自然科学基金(52075455)、宁波市自然科学基金(2022J057)和宁波市重点研发计划(2023Z201，2024Z194)资助项目。

Research Progress and Challenges of Flexible Sensors for Flow Measurement

LI Jiayao^1,2, YAN Yuchao¹, ZHANG Wenlong^1,2, DENG Jinjun², MA Binghe², CHANG Honglong², YUAN Weizheng^1,2, YU Yiting^1,2

1. Ningbo Institute of Northwestern Polytechnical University, Ningbo 315103;
2. School of Mechanical Engineering, Northwestern Polytechnical University, Xi'an 710072

Received:2025-05-09 Revised:2025-12-05 Published:2026-07-29

摘要/Abstract

摘要： 柔性传感器凭借其机械柔性、高灵敏度和复杂曲面适应性，在流动测量领域具有显著优势。与传统刚性传感器相比，柔性传感器能更精准感知复杂流场中的流速、流向及流动状态，已成功应用于工业监测、环境感知及生物医学等领域。综合分析了柔性流动传感器的感测机理与关键技术进展：分析力学、热学、声学及电化学等多物理场耦合的传感机制；探讨基于微机电系统(MEMS)技术的高集成度、微型化与智能化实现路径；针对测量精度、环境适应性及系统集成等挑战，提出材料微结构优化、自适应信号处理算法及多模态数据融合等性能提升策略。未来柔性传感器需在高灵敏-宽量程兼容设计、极端环境鲁棒性强化、嵌入式系统集成与低功耗无线传输等方向持续突破，以支撑智慧医疗、工业物联网与新能源装备等领域的精准流动测量需求。

关键词: 柔性传感器, 流动测量, 感测机理, 协同设计, 微纳制造

Abstract: Flexible sensors demonstrate prominent advantages in flow measurement due to their mechanical flexibility, high sensitivity, and conformability to complex surfaces. Compared to traditional rigid sensors, they achieve higher accuracy in monitoring flow velocity, direction, and state within turbulent fields, with applications spanning industrial monitoring, environmental sensing, and biomedicine. The sensing mechanisms and key technologies of flexible flow sensors are systematically summarized as follows: Multi-physics coupling mechanisms (mechanical, thermal, acoustic, and electrochemical); MEMS-based approaches for miniaturization, integration, and intelligence; performance optimization strategies, including material microstructure design, adaptive signal processing algorithms, and multi-modal data fusion. Future research should focus on compatibility between high sensitivity and wide dynamic range, robustness in harsh environments, embedded system integration, and low-power wireless communication, thereby advancing precision flow measurement for smart healthcare, industrial IoT, and renewable energy systems.

Key words: flexible sensor, flow sensing, transduction mechanisms, integrated design, micro-fabrication techniques

中图分类号:

TH703

李佳尧, 严宇超, 张文龙, 邓进军, 马炳和, 常洪龙, 苑伟政, 虞益挺. 柔性传感器在流动测量中的研究进展与挑战[J]. 机械工程学报, 2026, 62(10): 1-22.

LI Jiayao, YAN Yuchao, ZHANG Wenlong, DENG Jinjun, MA Binghe, CHANG Honglong, YUAN Weizheng, YU Yiting. Research Progress and Challenges of Flexible Sensors for Flow Measurement[J]. Journal of Mechanical Engineering, 2026, 62(10): 1-22.

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链接本文: http://www.cjmenet.com.cn/CN/10.3901/JME.260221

http://www.cjmenet.com.cn/CN/Y2026/V62/I10/1

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柔性传感器在流动测量中的研究进展与挑战

Research Progress and Challenges of Flexible Sensors for Flow Measurement

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