微圆弧金刚石刀具刃磨关键技术及应用

doi:10.3901/JME.2023.21.034

机械工程学报 ›› 2023, Vol. 59 ›› Issue (21): 34-42.doi: 10.3901/JME.2023.21.034

• 特邀专栏：高性能超精密制造 • 上一篇下一篇

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微圆弧金刚石刀具刃磨关键技术及应用

刘汉中, 张瑞涛, 宗文俊, 孙涛

哈尔滨工业大学精密工程研究所哈尔滨 450001

收稿日期:2023-01-17 修回日期:2023-07-05 出版日期:2023-11-05 发布日期:2024-01-15
通讯作者: 宗文俊(通信作者)，男，1979年出生，博士，教授，博士研究生导师。主要研究方向为金刚石工具制造技术、超精密加工机理与光学制造技术。E-mail：zongwenjun@hit.edu.cn
作者简介:刘汉中，男，1990年出生，博士，助理研究员。主要研究方向为金刚石晶体研磨与抛光技术。E-mail：liuhanzhong@hit.edu.cn,liuhzhit@gmail.com
基金资助:
基础科研挑战计划资助项目(TZ2018006-0202)。

Key Technologies and Applications for Lapping Micro Round Diamond Tools

LIU Hanzhong, ZHANG Ruitao, ZONG Wenjun, SUN Tao

Center for Precision Engineering, Harbin Institute of Technology, Harbin 450001

Received:2023-01-17 Revised:2023-07-05 Online:2023-11-05 Published:2024-01-15

摘要/Abstract

摘要： 微圆弧金刚石刀具是实现微结构功能表面机械加工的必备工具之一，高性能刀具可提高微结构表面精度和质量一致性。针对机械刃磨技术，研究微圆弧金刚石刀具的定向设计、制造工艺和装备，分析不同定向刀具的切削刃强度与其刀刃圆弧波纹度、锋利度和耐用度的关系。结果表明，微圆弧金刚石刀具的使用性能与其定向方案有关；针对不同定向的刀具，采用专门的刃磨工艺参数可减小因定向不同导致的刀具质量差异。采用最新研制的金刚石刀具专用刃磨机床，可以获得刀刃圆弧波纹度优于30 nm/60°包角、锋利度优于50 nm的微圆弧金刚石刀具。

关键词: 微金刚石刀具, 机械刃磨, 刀具定向设计, 刀具刃磨机床

Abstract: Micro round diamond tool is a requisite tool for machining functional microstructure surfaces, and tools with high performance could improve the accuracy and quality consistency of microstructure surfaces. A mechanical lapping technology including orientation design, lapping process and machine tool of micro round diamond tools are investigated. Relationships between the cutting edge strength of diamond tools with different orientations and the cutting edge waviness, sharpness as well as durability are analyzed. The results indicated that the cutting performance of micro diamond tools is depended on the orientation combinations, and that specialized lapping parameters could reduce the differences of diamond tools with different orientation combinations. Micro diamond tools with cutting edge waviness superior to 30 nm/60° opening angle and sharpness superior to 50 nm can be massively produced utilizing the latest special machine tool for lapping diamond tools.

Key words: micro diamond tools, mechanical lapping, tool orientation design, machine tool for lapping tools

中图分类号:

TG712

刘汉中, 张瑞涛, 宗文俊, 孙涛. 微圆弧金刚石刀具刃磨关键技术及应用[J]. 机械工程学报, 2023, 59(21): 34-42.

LIU Hanzhong, ZHANG Ruitao, ZONG Wenjun, SUN Tao. Key Technologies and Applications for Lapping Micro Round Diamond Tools[J]. Journal of Mechanical Engineering, 2023, 59(21): 34-42.

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微圆弧金刚石刀具刃磨关键技术及应用

Key Technologies and Applications for Lapping Micro Round Diamond Tools

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