一种基于扫描探针的微纳结构原位在线读写方法

doi:10.3901/JME.2021.05.148

机械工程学报 ›› 2021, Vol. 57 ›› Issue (5): 148-156.doi: 10.3901/JME.2021.05.148

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一种基于扫描探针的微纳结构原位在线读写方法

廖晓波^1,2, 庄健¹, 邓亚楼¹, 王志武¹, 焦阳博翰¹, 蔡勇², 廖璇²

1. 西安交通大学机械工程学院西安 710049;
2. 西南科技大学制造过程测试技术教育部重点实验室绵阳 621010

收稿日期:2020-05-06 修回日期:2021-01-07 出版日期:2021-03-05 发布日期:2021-04-28
通讯作者: 庄健(通信作者),男,1974年出生,博士,教授,博士研究生导师。主要研究方向为微纳测量技术、智能优化算法、机电控制系统。E-mail:zhuangjian@mail.xjtu.edu.cn.
作者简介:廖晓波,男,1982年出生,博士研究生。主要研究方向为微纳检测与制造,机器视觉伺服控制。E-mail:liaoxiaobo@swust.edu.cn
基金资助:
国家自然科学基金（51375363）和四川省科技厅创业人才（2020JDRC0072）资助项目。

An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe

LIAO Xiaobo^1,2, ZHUANG Jian¹, DENG Yalou¹, WANG Zhiwu¹, JIAOYANG Bohan¹, CAI Yong², LIAO Xuan²

1. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049;
2. Key Laboratory of Testing Technology for Manufacturing Process, Minsitry of Education, Southwest University of Science and Technology, Mianyang 621010

Received:2020-05-06 Revised:2021-01-07 Online:2021-03-05 Published:2021-04-28

摘要/Abstract

摘要： 基于扫描探针的弯月形液滴限制电化学沉积方法（Meniscus confined electrochemical deposition，MCED）能够在微纳尺度进行结构制造和表面修饰，近年来受到了众多研究者的广泛关注。然而，在三维微纳结构制造（“写”）过程中，无法在线原位检测（“读”）加工结构形貌，导致其应用受到一定的限制。本研究对比分析了MCED微纳制造方法和扫描电化学池显微镜检测方法（Scanning electrochemical cell microscopy，SECCM）在系统物理配置和原理上的异同；提出SECCM交流调制模式对采用MCED方法制造的微纳结构进行在线原位成像，通过对比SECCM直流和交流模式的检测结果，发现交流模式能够有效克服直流模式对样本表面造成损伤的缺点，且抗干扰能力明显提高，成像图像的MSE降低了27.85%。对比扫描电子显微镜成像结果，验证了交流扫描模式能够较好的对样本进行在线原位成像，增加了MCED试验操作的在线可观测性和操作的准确性。因此，该方法使得在线MCED微纳操作可视、续接、定点修饰等功能成为可能，对扩宽MCED在微纳领域的应用具有重要意义。

关键词: 弯月形液滴限制电化学沉积, 微纳三维打印, 扫描电化学池显微镜交流调制模式, 原位在线成像

Abstract: The meniscus confined electrochemical deposition method (MCED) based on scanning probes has been widely interested by many researchers in recent years, due to its ability to perform shaping and surface modification at the micro-nano scale. However, in the process of three-dimensional micro-nano fabrication, the structure morphology cannot be online "read out" in-situ, which limits its application. The study comparatively analyzed the similarities and differences in system configuration and principle between MCED and scanning electrochemical cell microscopy (SECCM). Secondly, an AC modulation mode of SECCM is proposed to in-situ image the micro-nano structure fabricated by MCED. Comparing the DC mode scanning images with AC mode, it is found that the AC scanning mode can overcome the shortcomings of the damage caused by the DC scanning mode to the surface of the sample, the anti-interference ability of the AC scanning mode is significantly improved, and the MSE of the image is decreased by nearly 27.85%. Finally, by comparing the results of AC scanning mode imaging and scanning electron microscope imaging, it is verified that AC scanning mode can better perform in-situ imaging of samples, reducing the complexity and improving the accuracy of MCED experimental operation, making online MCED micro-nano operation visualization, continuous manufacturing, fixed-point modification, etc. become possible. Therefore, this method will be of great significance for broadening the application of MCED in the micro-nano field.

Key words: meniscus confined electrochemical deposition(MCED), micro-nano three-dimensional printing, AC modulation scanning mode of SECCM, in-situ online imaging

中图分类号:

TG156

廖晓波, 庄健, 邓亚楼, 王志武, 焦阳博翰, 蔡勇, 廖璇. 一种基于扫描探针的微纳结构原位在线读写方法[J]. 机械工程学报, 2021, 57(5): 148-156.

LIAO Xiaobo, ZHUANG Jian, DENG Yalou, WANG Zhiwu, JIAOYANG Bohan, CAI Yong, LIAO Xuan. An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe[J]. Journal of Mechanical Engineering, 2021, 57(5): 148-156.

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一种基于扫描探针的微纳结构原位在线读写方法

An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe

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