一种基于扫描探针的微纳结构原位在线读写方法
廖晓波, 庄健, 邓亚楼, 王志武, 焦阳博翰, 蔡勇, 廖璇
An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe
LIAO Xiaobo, ZHUANG Jian, DENG Yalou, WANG Zhiwu, JIAOYANG Bohan, CAI Yong, LIAO Xuan
机械工程学报
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2021, (5): 148
-156
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DOI: 10.3901/JME.2021.05.148
