微结构参数对静压气体导轨节流系数和转动刚度的影响

doi:10.3901/JME.2021.03.087

机械工程学报 ›› 2021, Vol. 57 ›› Issue (3): 87-97.doi: 10.3901/JME.2021.03.087

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微结构参数对静压气体导轨节流系数和转动刚度的影响

温众普^1,2, 吴剑威^1,2, 范芯蕊^1,2, 谭久彬^1,2

1. 哈尔滨工业大学超精密光电仪器工程研究所哈尔滨 150001;
2. 超精密仪器技术及智能化工业和信息部重点实验室哈尔滨 150080

收稿日期:2020-02-22 修回日期:2020-06-26 出版日期:2021-02-05 发布日期:2021-03-16
通讯作者: 吴剑威(通信作者),男,1981年出生,博士,副教授,博士研究生导师。主要研究方向为超精密运动与定位技术、精准机器人技术。E-mail:wujianwei@hit.edu.cn
作者简介:温众普,男,1991年出生,博士研究生。主要研究方向为静压气体轴承与导轨。E-mail:15b901027@hit.edu.cn
基金资助:
国家自然科学基金（51675136）和国家科技重大专项（2017ZX02101006-005）资助项目。

Influences of Microstructure Parameters on the Throttling Coefficient and Rotational Stiffness of Aerostatic Guideway

WEN Zhongpu^1,2, WU Jianwei^1,2, FAN Xinrui^1,2, TAN Jiubin^1,2

1. Centre of Ultra-precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001;
2. Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin 150080

Received:2020-02-22 Revised:2020-06-26 Online:2021-02-05 Published:2021-03-16

摘要/Abstract

摘要： 小型复合节流静压气体导轨是保证光刻机高速运动和精确定位的关键部件。为提升导轨的承载力及刚度，在工作面常增加浅腔和沟道等微结构，但微结构对导轨的力学特性、特别是转动刚度的影响一直不清晰。采用网络自适应方法研究了微结构的四个主要参数的影响，以此为依据归纳拟合出修正节流系数，建立了带有修正节流系数的导轨性能半解析模型，揭示了微结构参数微米量级变化对导轨性能的影响规律。以转动刚度最优、兼顾承载力和刚度为原则，归纳了各微结构参数的选取表达式，用于指导同类型静压气体导轨的设计。以光刻机可变狭缝系统为例，采用提出的修正节流系数及微结构选取方法对下层导轨进行设计。试验表明，转动刚度达到10.3×10³ N·m/rad，可以满足高速可变光阑加速扫描运动的需求，验证了方法的准确有效性。

关键词: 静压气体导轨, 微结构, 转动刚度, 节流系数, 网络自适应

Abstract: The small multi-throttle aerostatic guideway is the critical component to solve the high precision and high acceleration motion demand of the lithography machine. Generally, microstructures such as recesses and grooves are added to the working surface to improve the capacity characteristics. However, the influence of microstructure parameters on mechanical properties, especially the rotational stiffness of the guideway is not clear enough. In order to establish the analytical expression with modified throttling coefficient, adaptive finite volume method is used to study the influence of four kinds of microstructure parameters. Based on the principle of highest rotational stiffness, considering capacity and stiffness as well, the selecting expressions of microstructure parameters are summarized, which can be directly used for guiding design work. Taking the guideway in the variable-slit system of the photolithography machine as an example, the modified throttling coefficient function and the selecting method of microstructure parameters proposed are used to design of the small multi-throttle aerostatic guideway. The experiment shows that the rotational rigidity of the guide reaches 10.3×10³ N·m/rad, and the accuracy and effectiveness of the method are verified.

Key words: aerostatic guideway, microstructure, rotational stiffness, throttling coefficient, adaptive modeling

中图分类号:

TG47

温众普, 吴剑威, 范芯蕊, 谭久彬. 微结构参数对静压气体导轨节流系数和转动刚度的影响[J]. 机械工程学报, 2021, 57(3): 87-97.

WEN Zhongpu, WU Jianwei, FAN Xinrui, TAN Jiubin. Influences of Microstructure Parameters on the Throttling Coefficient and Rotational Stiffness of Aerostatic Guideway[J]. Journal of Mechanical Engineering, 2021, 57(3): 87-97.

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微结构参数对静压气体导轨节流系数和转动刚度的影响

Influences of Microstructure Parameters on the Throttling Coefficient and Rotational Stiffness of Aerostatic Guideway

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