Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (19): 164-175.doi: 10.3901/JME.2023.19.164
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CHEN Xin, CHEN Yun, YANG Zhijun, GAO Jian, CHEN Xun
Received:
2023-04-01
Revised:
2023-08-23
Online:
2023-10-05
Published:
2023-12-11
CLC Number:
CHEN Xin, CHEN Yun, YANG Zhijun, GAO Jian, CHEN Xun. Research Advances in Several Key Technologies for High Precision and High Efficiency Manufacturing of Electronic Devices[J]. Journal of Mechanical Engineering, 2023, 59(19): 164-175.
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