• CN: 11-2187/TH
  • ISSN: 0577-6686

›› 1999, Vol. 35 ›› Issue (1): 39-42.

• Article • Previous Articles     Next Articles

KEY TECHNOLOGIES OF THERMALLY ACTUATED SILICON MICROPUMP

Cui Tianhong;Zhou Zhaoying;Wang Xiaohao;Ye Xiongying;Yang Yue Zhang;Wen dong;Lu Miao;Zhao Yanjun   

  1. Qinghua University Institute No.13, Ministry of Electronic Industry
  • Published:1999-01-01

Abstract: A thermo-driven sillicon micropump with novel structure is presented. The fabrication processes of this micropump are analyzed in summarize and measured in individual experiments.

Key words: MEMS, Micropump, Silicon micromachining

CLC Number: