• CN: 11-2187/TH
  • ISSN: 0577-6686
KEY TECHNOLOGIES OF THERMALLY ACTUATED SILICON MICROPUMP
Cui Tianhong;Zhou Zhaoying;Wang Xiaohao;Ye Xiongying;Yang Yue Zhang;Wen dong;Lu Miao;Zhao Yanjun
. 1999, (1): 39 -42 .