Abstract: The friction free x-y stage proposed is supported by an elastic guide way and driven by an elastic transmitting mechanism, so that the effect of mechanical friction and backlash are eliminated and higher resolution is obtained. There is no any special high Precision manufacture required for any components. The experiment test have proven that micro-position stage has a submicron position accuracy and 0.01μm motion resolution. The construction and performances of the stage also presented.

Key words: Microfabrication, Micro-positioning stage, Submicron lithography, xy stage