• CN: 11-2187/TH
  • ISSN: 0577-6686
AN EXPERIMENTAL INVESTIGATION ON TOTALLY ELASTIC-DEFORMATION BASED MICRO-POSITION STAGE WITH ULTRA-PRECISION
Rong Yiming;Zhu Yaoxiang;Luo Zhengbi;Zhang Qichang
. 1994, (5): 16 -21 .