Abstract: Considering the mechanical behavior analysis of graphene film for micro-pressure sensor, the load-deflection models in graphene film are established based on the large deflection elastic theory of circular film. With regard to the typical load-deflection models, the effects of the film parameters, including elastic modulus and film layer, on deflection deformation and vibration behavior are computed numerically and simulated by using nonlinear statics analysis and mode analysis units with ANSYS software. The results show that the prestressing force has a significant impact on the deflection deformation at low load, and especially there is a linear relation between load and deflection in the pressure range from 0 to 3.6 kPa. However, a decreasing effect on the deflection deformation is produced by the above-mentioned film parameters with the increase of pressure load. Also, the natural frequency and mode shape characteristics mainly depend on the prestressing force instead of these two film parameters. This phenomenon verifies the used validity of spherical shell theoretical model because of the average relative error less than 0.49% between the analytical solution and ANSYS simulation results in the presence of prestressing force in the aforementioned pressure range.

Key words: graphene films, large deflection, mechanical characteristics, modeling and simulation