Abstract: Ultra-precision machining is essential method for obtaining the highest quality in terms of form accuracy, surface finish Ultra-precision machining is essential method for obtaining the highest quality in terms of form accuracy, surface finish and surface integrity. As the higher requirements of quality and diversifications for products are put forward, it is essential to improve the precision and efficiency of ultra-precision machining. Ultra-precision machining has become a complicated systems engineering, which involves more and more last research fruits. The conception, application fields, present research status, development tendency, and the key issues of future researches on scientific and technological f of ultra-precision machining are introduced in this paper. Some advanced and typical ultra-precision machine tools, ultra-precision cutting, grinding, and polishing are reviewed and compared in terms of machining accuracy, quality and efficiency. The main problems and miss distance from the advanced technologies of China in ultra-precision machining field are analyzed. In the same time, the probable further trend of ultra-precision machining is forecasted, and the developing countermeasure and strategy of fundamental research, technologies and industry in China are given.

Key words: Development tendency, Present research status, Ultra-precision machining