Research Progress of Ultrasonic Assisted Micro-plastic Forming Process

doi:10.3901/JME.2024.18.089

Abstract

Abstract: With the development of the manufacturing technology, products tend to be miniaturized and precised. Metal microplastic forming technology has the advantages of low cost, high efficiency and high precision, and has been widely used in important fields such as micro-electromechanical systems, aerospace, biomedicine and military. In particular, the ultrasonic-assisted microplastic forming process has many advantages such as reducing forming load, reducing tool/mold cavity-sample interface friction, improving forming surface quality, increasing forming limit and uniformity, etc. It was effectively solved the forming defects caused by size effects, and it had become an important application of the development direction of the metal microplastic forming technology. Based on the review of the research status of ultrasonic-assisted microplastic forming process, mechanism and theoretical model, the effects of different ultrasonic vibration modes (tool vibration, workpiece vibration, tool-workpiece composite vibration) on the forming quality and mechanical properties during the microplastic forming process were analyzed. The future development trend of ultrasonic-assisted microplastic forming process was prospected. Research on the coupling mechanism of ultrasonic action and size effect and its quantitative analysis, and the synergistic application of multi-energy fields and composite processes will be new directions to exploring microplastic forming technology.

Key words: ultrasonic vibration, micro-plastic forming process, vibration modes, forming mechanism

CLC Number:

TG301

WAN Weiqiang, HAN Guangchao, WANG Xinyun, Lü Pei, LIU Fuchu, HU Jitao, BAI Wei, XU Linhong. Research Progress of Ultrasonic Assisted Micro-plastic Forming Process[J]. Journal of Mechanical Engineering, 2024, 60(18): 89-115.

References

[1] XU J，WANG X，WANG C，et al. A review on micro/nanoforming to fabricate 3D metallic structures[J]. Advanced Materials，2021，33(6)：202000893.
[2] CHAN W L，FU M W，LU J. Experimental and simulation study of deformation behavior in micro- compound extrusion process[J]. Materials and Design，2011，32(2)：525-534.
[3] HUANG Y M，WU Y S，HUANG J Y. The influence of ultrasonic vibration-assisted micro-deep drawing process[J]. The International Journal of Advanced Manufacturing Technology，2014，71(5)：1455-1461.
[4] FU M W，CHAN W L. A review on the state-of-the-art microforming technologies[J]. The International Journal of Advanced Manufacturing Technology，2013，67(9)：2411-2437.
[5] FU M W，CHAN W L. Micro-scaled progressive forming of bulk micropart via directly using sheet metals[J]. Materials & Design，2013，49(8)：774-783.
[6] FU M W，WANG J L. Size effects in multi-scale materials processing and manufacturing[J]. International Journal of Machine Tools and Manufacture，2021，167(5)：103755.
[7] RAULEA L V，GOVAERT L E，BAAIJENS F P T. Grain and specimen size effects in processing metal sheets[C]//Advanced Technology of Plasticity 1999：Proceedings of the 6th International Conference on Technology of Plasticity，Nuremberg，September 19-24，1999. Vol. 2. Springer，1999：939-944.
[8] PRADEEP RAJA C，RAMESH T. Influence of size effects and its key issues during microforming and its associated processes：A review[J]. Engineering Science and Technology，an International Journal，2021，24(2)：556-570.
[9] 曹伯楠，孟宝，赵越超，等. 特种能场辅助微塑性成形技术研究及应用[J]. 精密成形工程，2019，11(3)：14-27. CAO Bonan，MENG Bao，ZHAO Yuechao，et al. Research and application of energy field assisted microforming technology[J]. Journal of Netshape Forming Engineering，2019，11(3)：14-27.
[10] SHAO G，LI H，ZHAN M. A Review on ultrasonic- assisted forming：Mechanism，model，and process[J]. Chinese Journal of Mechanical Engineering，2021，34(1)：1-24.
[11] 胡俊，路腾腾，申昱. 超声辅助纯钛拉伸试验研究[J]. 精密成形工程，2018，10(4)：75-78. HU Jun，LU Tengteng，SHEN Yu. Ultrasonic vibration tensile test on pure titanium[J]. Journal of Netshape Forming Engineering，2018，10(4)：75-78.
[12] WANG C，ZHANG W，CHENG L，et al. Investigation on microsheet metal deformation behaviors in ultrasonic- vibration-assisted uniaxial tension with aluminum alloy 5052[J]. Materials，2020，13(3)：637.
[13] WANG X，WANG C，LIU Y，et al. An energy based modeling for the acoustic softening effect on the Hall- Petch behavior of pure titanium in ultrasonic vibration assisted micro-tension[J]. International Journal of Plasticity，2021，136(1)：102879.
[14] WANG C，LIU H，WANG C，et al. Interactive effects of height-to-diameter ratio and strain on tribological behavior in micro compression of pure nickel cylinder[J]. International Journal of Mechanical Sciences，2018，144(8)：452-460.
[15] MA J，ZHAO X，GUO Y，et al. Mechanical behavior and material property of low-carbon steel undergoing low- frequency vibration-assisted upsetting[J]. Journal of Materials Research and Technology，2022，16(1-2)：1846-1855.
[16] WANG X，QI Z，CHEN W. Investigation of Ti-45Nb alloy’s mechanical and microscopic behaviors under transverse ultrasonic vibration-assisted compression[J]. Materials Science and Engineering：A，2022，832(1)：142401.
[17] LOU Y，HE J S，CHEN H，et al. Effects of vibration amplitude and relative grain size on the rheological behavior of copper during ultrasonic-assisted microextrusion[J]. The International Journal of Advanced Manufacturing Technology，2017，89(5)：2421-2433.
[18] BUNGET C，NGAILE G. Influence of ultrasonic vibration on micro-extrusion[J]. Ultrasonics，2011，51(5)：606-616.
[19] HAN G，WAN W，ZHANG Z，et al. Experimental investigation into effects of different ultrasonic vibration modes in micro-extrusion process[J]. Journal of Manufacturing Processes，2021，67(4)：427-437.
[20] MALEKIPOUR E，SHARIFI E，MAJD N S，et al. Observation on the behavior of ultrasonic micro-hammer and its effects on the deep drawing process：Numerical simulation and experimental study[J]. Ultrasonics，2022，119(2)：106566.
[21] ZHAO J，WANG T，JIA F，et al. Experimental investigation on micro deep drawing of stainless steel foils with different microstructural characteristics[J]. Chinese Journal of Mechanical Engineering，2021，34(1)：1-11.
[22] CAO M Y，LI J C，YUAN Y N，et al. Flexible die drawing of magnesium alloy sheet by superimposing ultrasonic vibration[J]. Transactions of Nonferrous Metals Society of China，2017，27(1)：163-171.
[23] CHENG Z，LI Y，LI J，et al. Ultrasonic assisted incremental sheet forming：Constitutive modeling and deformation analysis[J]. Journal of Materials Processing Technology，2022，299(1)：117365.
[24] 陈晓晓. 铝合金薄板超声辅助渐进成形塑性软化机理及成形性能探究[D]. 济南：山东大学，2019. CHEN Xiaoxiao. Study on plastic softening mechanism and forming properties of ultrasonic-assisted incremental sheet forming of aluminum alloy sheets[D]. Jinan：Shandong University，2019.
[25] LI Y，CHEN X，SUN J，et al. Effects of ultrasonic vibration on deformation mechanism of incremental point-forming process[J]. Procedia Engineering，2017，207(11)：777-782.
[26] WU B，LU J，WU Z，et al. Mechanical properties and microstructure of AZ31 magnesium alloy processed by intermittent ultrasonic-assisted equal channel angular pressing[J]. Journal of Materials Engineering and Performance，2021，30(1)：346-356.
[27] DJAVANROODI F，AHMADIAN H，KOOHKAN K，et al. Ultrasonic assisted-ECAP[J]. Ultrasonics，2013，53(6)：1089-1096.
[28] AMINI S，HOSSEINPOUR GOLLO A，PAKTINAT H. An investigation of conventional and ultrasonic-assisted incremental forming of annealed AA1050 sheet[J]. The International Journal of Advanced Manufacturing Technology，2017，90(5)：1569-1578.
[29] LI M，ZHANG Q，HAN B，et al. Investigation on microstructure and properties of AlxCoCrFeMnNi high entropy alloys by ultrasonic impact treatment[J]. Journal of Alloys and Compounds，2020，816(3)：152626.
[30] YAO Z，KIM G Y，FAIDLEY L，et al. Effects of superimposed high-frequency vibration on deformation of aluminum in micro/meso-scale upsetting[J]. Journal of Materials Processing Technology，2012，212(3)：640-646.
[31] LIN J，LI J，LIU T，et al. Evaluation of friction reduction and frictionless stress in ultrasonic vibration forming process[J]. Journal of Materials Processing Technology，2021，288(2)：116881.
[32] ZHAI J，GUAN Y，LI Y，et al. The surface effect of ultrasonic vibration in double cup extrusion test[J]. Journal of Materials Processing Technology，2022，299(6)：117344.
[33] HUANG Y M，CHANG Y M. The reducing of springback angle on micro-bending process with ultrasonic assistance[J]. Journal of the Chinese Society of Mechanical Engineers，Series C：Transactions of the Chinese Society of Mechanical Engineers，2014，35(4)：321-325.
[34] 李凯辉. 金属薄板超声柔性冲头微冲压成形方法应用与质量评估[D]. 深圳：深圳大学，2015. LI Kaihui. Quality evaluation and application of flexible- punch micro-ultrasonic sheet-metal forming[D]. Shenzhen：Shenzhen University，2015.
[35] 王良江. 聚合物微结构超声波压印工艺研究[D]. 大连：大连理工大学，2012. WANG Liangjiang. Study of ultrasonic imprinting for polymer microstructure[D]. Dalian：Dalian University of Technology，2012.
[36] 刘艳雄. 超声波辅助大塑性变形细化材料晶粒研究[D]. 武汉：武汉理工大学，2012. LIU yanxiong. Study on grain refinement of materials by ultrasonic assisted large plastic deformation[D]. Wuhan：Wuhan University of Technology，2012.
[37] 姚喆赫. 超声能场在金属微/介观成形中的作用理论及实验研究[D]. 杭州：浙江大学，2016. YAO Zhehe. Theories and experimental studies on effects of ultrasonic energy field in micro/meso metal forming[D]. Hangzhou：Zhejiang University，2016.
[38] BLAHA F，LANGENECKER B. Tensile deformation of zinc crystal under ultrasonic vibration[J]. Naturwissenschaften，1955，42(556)：1-10.
[39] YAO Z，KIM G Y，WANG Z，et al. Acoustic softening and residual hardening in aluminum：Modeling and experiments[J]. International Journal of Plasticity，2012，39(12)：75-87.
[40] NEVILL G E. Effect of vibrations on the yield strength of a low carbon steel[J]. Materials Science，Engineering，Physics，1957：57：751-758.
[41] HU J，SHIMIZU T，YANG M. Investigation on ultrasonic volume effects：Stress superposition，acoustic softening and dynamic impact[J]. Ultrasonics sonochemistry，2018，48(11)：240-248.
[42] YAO Z，KIM G Y，FAIDLEY L，et al. Micro pin extrusion of metallic materials assisted by ultrasonic vibration[C]//International Manufacturing Science and Engineering Conference：Vol. 49460. 2010：647-651.
[43] WANG C J，LIU Y，GUO B，et al. Acoustic softening and stress superposition in ultrasonic vibration assisted uniaxial tension of copper foil：Experiments and modeling[J]. Materials & Design，2016，112(12)：246-253.
[44] HUANG Z，LUCAS M，ADAMS M J. Influence of ultrasonics on upsetting of a model paste[J]. Ultrasonics，2002，40(1-8)：43-48.
[45] ZHUANG X C，WANG J P，ZHENG H，et al. Forming mechanism of ultrasonic vibration assisted compression[J]. Transactions of Nonferrous Metals Society of China，2015，25(7)：2352-2360.
[46] DAUD Y，LUCAS M，HUANG Z. Modelling the effects of superimposed ultrasonic vibrations on tension and compression tests of aluminium[J]. Journal of Materials Processing Technology，2007，186(1-3)：179-190.
[47] LIU T，LIN J，GUAN Y，et al. Effects of ultrasonic vibration on the compression of pure titanium[J]. Ultrasonics，2018，89(4)：26-33.
[48] TIEJUN G，XIAOJUN L，KUN Y，et al. Effects of ultrasonic vibration on tensile properties of TC1 titanium alloy sheet[J]. Rare Metal Mat. Eng.，2019，48(1)：286-292.
[49] KANG J，LIU X，XU M. Plastic deformation of pure copper in ultrasonic assisted micro-tensile test[J]. Materials Science and Engineering：A，2020，785(5)：139364.
[50] SIU K W，NGAN A H W，JONES I P. New insight on acoustoplasticity-ultrasonic irradiation enhances subgrain formation during deformation[J]. International Journal of Plasticity，2011，27(5)：788-800.
[51] DUTTA R K，PETROV R H，DELHEZ R，et al. The effect of tensile deformation by in situ ultrasonic treatment on the microstructure of low-carbon steel[J]. Acta Materialia，2013，61(5)：1592-1602.
[52] JIANG S，YANG T，SUN H. Influence of ultrasonic vibration on tensile properties and dislocation distribution of titanium foil[J]. Journal of Materials Engineering，2019，47(2)：84-89.
[53] DESHPANDE A，HSU K. Acoustic energy enabled dynamic recovery in aluminium and its effects on stress evolution and post-deformation microstructure[J]. Materials Science and Engineering：A，2018，711(1)：62-68.
[54] DUTTA R K，PETROV R H，HERMANS M J M，et al. Accommodation of plastic deformation by ultrasound- induced grain rotation[J]. Metallurgical and Materials Transactions A，2015，46(8)：3414-3422.
[55] MAO Q，COUTRIS N，RACK H，et al. Investigating ultrasound-induced acoustic softening in aluminum and its alloys[J]. Ultrasonics，2020，102(3)：106005.
[56] MENG B，CAO B N，WAN M，et al. Constitutive behavior and microstructural evolution in ultrasonic vibration assisted deformation of ultrathin superalloy sheet[J]. International Journal of Mechanical Sciences，2019，157(7)：609-618.
[57] ZHOU H，CUI H，QIN Q H，et al. A comparative study of mechanical and microstructural characteristics of aluminium and titanium undergoing ultrasonic assisted compression testing[J]. Materials Science and Engineering A，2017，682(6)：376-388.
[58] HUANG H，PEQUEGNAT A，CHANG B H，et al. Influence of superimposed ultrasound on deformability of Cu[J]. Journal of Applied Physics，2009，106(11)：113514.
[59] ZHOU H，CUI H，QIN Q H，et al. A comparative study of mechanical and microstructural characteristics of aluminium and titanium undergoing ultrasonic assisted compression testing[J]. Materials Science and Engineering：A，2017，682(1)：376-388.
[60] FARTASHVAND V，ABDULLAH A，VANINI S A S. Investigation of Ti-6Al-4V alloy acoustic softening[J]. Ultrasonics Sonochemistry，2017，38(9)：744-749.
[61] LIU Y，WANG C，BI R. Acoustic residual softening and microstructure evolution of T2 copper foil in ultrasonic vibration assisted micro-tension[J]. Materials Science and Engineering：A，2022，841(4)：143044.
[62] HUNG J C，TSAI Y C. Investigation of the effects of ultrasonic vibration-assisted micro-upsetting on brass[J]. Materials Science and Engineering A，2013，580(9)：125-132.
[63] MENG B，CAO B N，WAN M，et al. Ultrasonic- assisted microforming of superalloy capillary：Modeling and experimental investigation[J]. Journal of Manufacturing Processes，2020，57(9)：589-599.
[64] AHMADI F，FARZIN M，MANDEGARI M. Effect of grain size on ultrasonic softening of pure aluminum[J]. Ultrasonics，2015，63(12)：111-117.
[65] SHIMIZU T，KOSUGE S，YANG M. Grain size effect on transferability in micro-coining process assisted by ultrasonic vibration[J]. Manufacturing Review，2015，2(4)：5.
[66] ZHAI J，GUAN Y，WANG W，et al. Studies on ultrasonic vibration-assisted coining of micro-cylinder[J]. International Journal of Advanced Manufacturing Technology，2019，100(5-8)：2031-2044.
[67] LOU Y，HE J S，CHEN H，et al. Effects of vibration amplitude and relative grain size on the rheological behavior of copper during ultrasonic-assisted microextrusion[J]. International Journal of Advanced Manufacturing Technology，2017，89(5-8)：2421-2433.
[68] BAI Y，YANG M. The influence of superimposed ultrasonic vibration on surface asperities deformation[J]. Journal of Materials Processing Technology，2016，229(3)：367-374.
[69] KUMAR V C，HUTCHINGS I M. Reduction of the sliding friction of metals by the application of longitudinal or transverse ultrasonic vibration[J]. Tribology International，2004，37(10)：833-840.
[70] SIEGERT K，ULMER J. Reduction of sliding friction by ultrasonic waves[J]. Production Engineering，1998，5(1)：9-12.
[71] CAO M Y，LI J C，LIU Y Y，et al. Frictional characteristics of sheet metals with superimposed ultrasonic vibrations[J]. Journal of Central South University，2018，25(8)：1879-1887.
[72] SOFUOGLU H，RASTY J. On the measurement of friction coefficient utilizing the ring compression test[J]. Tribology International，1999，32(6)：327-335.
[73] HUNG J C，TSAI Y C，HUNG C. Frictional effect of ultrasonic-vibration on upsetting[J]. Ultrasonics，2007，46(3)：277-284.
[74] WANG C，LIU H，WANG C，et al. Interactive effects of height-to-diameter ratio and strain on tribological behavior in micro compression of pure nickel cylinder[J]. International Journal of Mechanical Sciences，2018，144(6)：452-460.
[75] XIE Z，GUAN Y，ZHU L，et al. Investigations on the surface effect of ultrasonic vibration-assisted 6063 aluminum alloy ring upsetting[J]. The International Journal of Advanced Manufacturing Technology，2018，96(9)：4407-4421.
[76] CHANG C C，HUANG C K. Effects of surface roughness on tribological characteristics in micro double cup extrusion of aluminum[J]. Key Engineering Materials，2010，419-420(10)：5-8.
[77] YAO Z，KIM G Y，FAIDLEY L，et al. Experimental study of high-frequency vibration assisted micro/mesoscale forming of metallic materials[J]. Journal of Manufacturing Science and Engineering，Transactions of the ASME，2011，133(6)：061009.
[78] SHAHROKH R，GHAEI A，FARZIN M，et al. Experimental and numerical investigation of ultrasonically assisted micro-ring compression test[J]. International Journal of Advanced Manufacturing Technology，2018，95(9-12)：3487-3495.
[79] ZHA C，ZHA S. Experimental investigation of friction based on ultrasonic vibration[J]. UPB Scientific Bulletin，Series D：Mechanical Engineering，2020，82(4)：17-28.
[80] BUSCHHAUSEN A，WEINMANN K，LEE J Y，et al. Evaluation of lubrication and friction in cold forging using a double backward-extrusion process[J]. Journal of Materials Processing Tech.，1992，33(1-2)：95-108.
[81] HUNG J C，HUANG C C. Evaluation of friction in ultrasonic vibration-assisted press forging using double cup extrusion tests[J]. International Journal of Precision Engineering and Manufacturing，2012，13(12)：2103-2108.
[82] WAN W，CHENG J，XU L，et al. Investigation on friction characteristics of micro double cup extrusion assisted by different ultrasonic vibration modes[J]. The International Journal of Advanced Manufacturing Technology，2022，123(7)：2549-2560.
[83] HUNG J C，HUANG C C. Evaluation of friction in ultrasonic vibration-assisted press forging using double cup extrusion tests[J]. International Journal of Precision Engineering and Manufacturing，2012，13(12)：2103-2108.
[84] XU L，LEI Y，ZHANG H，et al. Research on the micro- extrusion process of copper T2 with different ultrasonic vibration modes[J]. Metals，2019，9(11)：1209.
[85] HU J，SHIMIZU T，YOSHINO T，et al. Ultrasonic dynamic impact effect on deformation of aluminum during micro-compression tests[J]. Journal of Materials Processing Technology，2018，258(8)：144-154.
[86] RUSINKO A. Non-classical problems of irreversible deformation in terms of the synthetic theory[J]. Acta Polytechnica Hungarica，2010，7(3)：25-62.
[87] RUSINKO A. Analytical description of ultrasonic hardening and softening[J]. Ultrasonics，2011，51(6)：709-714.
[88] XIE Z，GUAN Y，LIN J，et al. Constitutive model of 6063 aluminum alloy under the ultrasonic vibration upsetting based on Johnson-Cook model[J]. Ultrasonics，2019，96(7)：1-9.
[89] LIN J，LI J，LIU T，et al. Investigation on ultrasonic vibration effects on plastic flow behavior of pure titanium：Constitutive modeling[J]. Journal of Materials Research and Technology，2020，9(3)：4978-4993.
[90] SIDDIQ A，EL SAYED T. Acoustic softening in metals during ultrasonic assisted deformation via CP-FEM[J]. Materials Letters，2011，65(2)：356-359.
[91] SIDDIQ A，EL SAYED T. A thermomechanical crystal plasticity constitutive model for ultrasonic consolidation[J]. Computational Materials Science，2012，51(1)：241-251.
[92] SEDAGHAT H，XU W，ZHANG L. Ultrasonic vibration-assisted metal forming：Constitutive modelling of acoustoplasticity and applications[J]. Journal of Materials Processing Technology，2019，265(2)：122-129.
[93] KUMARI M，RAY K K. Effect of the mode of deformation on activation volume of a material[J]. Materials Science and Engineering：A，2016，650(1)：335-344.
[94] PRABHAKAR A，VERMA G C，KRISHNASAMY H，et al. Dislocation density based constitutive model for ultrasonic assisted deformation[J]. Mechanics Research Communications，2017，85(10)：76-80.
[95] HALL E O. The deformation and ageing of mild steel：III discussion of results[J]. Proceedings of the Physical Society. Section B，1951，64(9)：747.
[96] PETCH N J. The cleavage strength of polycrystals[J]. Journal of the Iron and Steel Institute，1953，174：25-28.
[97] BATA V，PERELOMA E V. An alternative physical explanation of the Hall-Petch relation[J]. Acta Materialia，2004，52(3)：657-665.
[98] LI Y，CHENG Z，CHEN X，et al. Constitutive modeling and deformation analysis for the ultrasonic- assisted incremental forming process[J]. The International Journal of Advanced Manufacturing Technology，2019，104(5)：2287-2299.
[99] STORCK H，LITTMANN W，WALLASCHEK J，et al. The effect of friction reduction in presence of ultrasonic vibrations and its relevance to travelling wave ultrasonic motors[J]. Ultrasonics，2002，40(1-8)：379-383.
[100] TEIDELT E，STARCEVIC J，POPOV V L. Influence of ultrasonic oscillation on static and sliding friction[J]. Tribology Letters，2012，48(1)：51-62.
[101] DUPONT P，ARMSTRONG B，HAYWARD V. Elasto-plastic friction model：contact compliance and stiction[C]//Proceedings of the 2000 American Control Conference. ACC (IEEE cat. no. 00CH36334)：Vol. 2. IEEE，2000：1072-1077.
[102] DAHL P R. Solid friction damping of mechanical vibrations[J]. AIAA Journal，1976，14(12)：1675-1682.
[103] GUTOWSKI P，LEUS M. The effect of longitudinal tangential vibrations on friction and driving forces in sliding motion[J]. Tribology International，2012，55(11)：108-118.
[104] GUTOWSKI P，LEUS M. Computational model for friction force estimation in sliding motion at transverse tangential vibrations of elastic contact support[J]. Tribology International，2015，90(10)：455-462.
[105] TSAI C C，TSENG C H. The effect of friction reduction in the presence of in-plane vibrations[J]. Archive of Applied Mechanics，2006，75(2)：164-176.
[106] UDAYKANT JADAV P，AMALI R，ADETORO O B. Analytical friction model for sliding bodies with coupled longitudinal and transverse vibration[J]. Tribology International，2018，126(8)：240-248.
[107] DAHL P R. A solid friction model[R]. Aerospace Corp El Segundo Ca，1968.
[108] BAI Y，YANG M. Investigation on mechanism of metal foil surface finishing with vibration-assisted micro-forging[J]. Journal of Materials Processing Technology，2013，213(3)：330-336.
[109] ZHOU H，CUI H，QIN Q H. Influence of ultrasonic vibration on the plasticity of metals during compression process[J]. Journal of Materials Processing Technology，2018，251(1)：146-159.
[110] HAN G，LI K，PENG Z，et al. A new porous block sonotrode for ultrasonic assisted micro plastic forming[J]. The International Journal of Advanced Manufacturing Technology，2017，89(5)：2193-2202.
[111] 彭卓，韩光超，李凯，等. 超声辅助微挤压成形系统设计[J]. 振动与冲击，2017，36(15)：259-264. PENG Zhuo，HAN Guangchao，LI Kai，et al. Design of an ultrasonic-assisted micro extrusion forming system[J]. Journal of Vibration and Shock，2017，36(15)：259-264.
[112] ZHAO Y，ZHAI J，GUAN Y，et al. Molecular dynamics study of acoustic softening effect in ultrasonic vibration assisted tension of monocrystalline/ polycrystalline coppers[J]. Journal of Materials Processing Technology，2022，307(9)：117666.
[113] YIN Z，YANG M. Investigation on deformation behavior in the surface of metal foil with ultrasonic vibration-assisted micro-forging[J]. Materials，2022，15(5)：1907.
[114] LOU Y，LIU X. Ultrasonic flexible microextrusion forming of ZK60 Mg alloy at room temperature[C]//IOP Conference Series：Materials Science and Engineering：Vol. 490. IOP Publishing，2019：52007.
[115] WANG C J，LIU Y，ZHANG B，et al. Development of ultrasonic vibration assisted uniaxial tension device and utilization in evaluation of micro tension deformation behavior of copper foil[J]. Ferroelectrics，2017，521(1)：53-60.
[116] WANG C，LIU Y，SHAN D，et al. Investigations on mechanical properties of copper foil under ultrasonic vibration considering size effect[J]. Procedia Engineering，2017，207(11)：1057-1062.
[117] XIE Z D，GUAN Y J，YU X H，et al. Effects of ultrasonic vibration on performance and microstructure of AZ31 magnesium alloy under tensile deformation[J]. Journal of Central South University，2018，25(7)：1545-1559.
[118] SIDDIQ A，EL SAYED T. Ultrasonic-assisted manufacturing processes：Variational model and numerical simulations[J]. Ultrasonics，2012，52(4)：521-529.
[119] 路腾腾，申昱，于沪平，等. 超声振动对纯钛TA1微圆柱体压缩过程的影响[J]. 塑性工程学报，2016，23(6)：14-18. LU Tengteng，SHEN Yu，YU Huping，et al. Influence of ultrasonic vibration on pure titanium TA1 micro cylinder compression[J]. Journal of Plasticity Engineering，2016，23(6)：14-18.
[120] 魏丽. 超声振动对AZ31镁合金室温塑性变形过程的影响[D]. 重庆：重庆大学，2010. WEI Li. Effect of ultrasonic vibration on plastic deformation process of AZ31 magnesium alloy at room temperature[D]. Chongqing：Chongqing University，2010.
[121] HUNG J C，LIN C C. Investigations on the material property changes of ultrasonic-vibration assisted aluminum alloy upsetting[J]. Materials & Design，2013，45(3)：412-420.
[122] HUNG J C，CHIANG M C. The influence of ultrasonic-vibration on double backward-extrusion of aluminum alloy[C]//Proceedings of the World Congress on Engineering：Vol. 2. Citeseer，2009：1-3.
[123] 龙敏. 常温下超声波微挤压成形对ZK60镁合金流变行为的影响[D]. 深圳：深圳大学，2015. LONG Min. Effect of ultrasonic micro-extrusion forming on ZK60 Mg alloy rheological behavior at room temperature[D]. Shenzhen：Shenzhen University，2015.
[124] 陈恒. 超声波辅助微挤压成形性能与微观组织演变规律[D]. 深圳：深圳大学，2015. CHEN Heng. Deformation properties and microstructure evolution during ultrasonic vibration-assisted microextrusion[D]. Shenzhen：Shenzhen University，2015.
[125] LUO F，WANG B，LI Z W，et al. Time factors and optimal process parameters for ultrasonic microchannel formation in thin sheet metals[J]. International Journal of Advanced Manufacturing Technology，2017，89(1-4)：255-263.
[126] LIU C T，XU X G，ZHANG D，et al. Effect of ultrasonic vibration on forming force and forming quality in micro-punching with a flexible punch[J]. Scientific Reports，2022，12(1)：16851.
[127] YANG R X，WANG B，XU B，et al. Influence of ultrasound on forming force in thin sheetmetal microforming using molten plastic as flexible punch[J]. Materials & Design，2021，212(12)：110239.
[128] WANG C，CHENG L，LIU Y，et al. Ultrasonic flexible bulging process of spherical caps array as surface texturing using aluminum alloy 5052 ultra-thin sheet[J]. Journal of Materials Processing Technology，2020，284(10)：116725.
[129] ZHA C，CHEN W. Theories and experiments on effects of acoustic energy field in micro-square cup drawing[J]. The International Journal of Advanced Manufacturing Technology，2019，104(9)：4791-4802.
[130] ZHA C，ZHA S. Experimental study on influence of ultrasonic vibration on forming limit[J]. Mechanics & Industry，2022，23(7)：14.
[131] WANG C J，LIU Y，GUO B，et al. Acoustic softening and stress superposition in ultrasonic vibration assisted uniaxial tension of copper foil：Experiments and modeling[J]. Materials and Design，2016，112(12)：246-253.
[132] WEN T，WEI L，CHEN X，et al. Effects of ultrasonic vibration on plastic deformation of AZ31 during the tensile process[J]. International Journal of Minerals，Metallurgy，and Materials，2011，18(1)：70-76.
[133] 张曼曼. 超声振动辅助TA2纯钛箔板塑性变形行为与微冲裁机理研究[D]. 哈尔滨：哈尔滨工业大学，2015. ZHANG Manman. Investigation on ultrasonic vibration- assisted plastic deformation behaviors and micro- blanking mechanism using TA2 pure titanium foil[D]. Harbin：Harbin Institute of Technology，2015.
[134] 顾晓猛. 金属薄板超声微拉伸性能测试[D]. 深圳：深圳大学，2015. GU Xiaomeng. The performance testing of sheet metal ultrasound micro-tensile[D]. Shenzhen：Shenzhen University，2015.
[135] DAUD Y，LUCAS M，HUANG Z. Superimposed ultrasonic oscillations in compression tests of aluminium[J]. Ultrasonics，2006，44(12)：511-515.
[136] 庞思勤，马春峰，周天丰，等. 超声振动辅助微镦粗仿真及试验研究[J]. 哈尔滨工业大学学报，2021，53(1)：70-77. PANG Siqing，MA Chunfeng，ZHOU Tianfeng，et al. Simulation and experiment study on ultrasonic vibration assisted micro upsetting[J]. Journal of Harbin Institute of Technology，2021，53(1)：70-77.
[137] 王志海. 超声辅助微塑性成形过程超声尺度效应研究[D]. 杭州：杭州电子科技大学，2017. WANG Zhihai. Study on the ultrasonic scale effect of ultrasonic assisted micro plastic forming[D]. Hangzhou：Hanzhou Electronic Science and Technology University，2017.
[138] BUNGET C，NGAILE G. Influence of ultrasonic vibration on micro-extrusion[J]. Ultrasonics，2011，51(5)：606- 616.
[139] GANIEV M M，VAGAPOV I K，GANIEV I M. Ultrasonic micro-forging by two coaxial longitudinal waveguides with a fixed gap：model and application[J]. Journal of Materials Processing Technology，2021，288(2)：116905.
[140] ABRAMOV O V. Ultrasound in liquid & solid metals[M]. Boca Raton：CRC Press，1994.
[141] 陈长新，韩光超，彭卓，等. 超声辅助微挤压成形数值模拟研究[C]//2016年全国超声加工技术研讨会论文集，2016：132-136. CHEN Changxin，HAN Guangchao，PENG Zhuo，et al. Numerical simulation research of ultrasonic-assisted micro-extraction forming[C]//Proceedings of the 2016 National Symposium on Ultrasonic Machining Technology，2016：132-136.
[142] 韩光超，刘军，温晓宁，等. 基于不同振动模式的超声辅助拉深精密成形工艺[J]. 锻压技术，2021，46(9)：118-123. HAN Guangchao，LIU Jun，WEN Xiaoning，et al. Precision forming process by ultrasonic assisted deep drawing based on different vibration modes[J]. Forging & StampingTechnology，2021，46(9)：118-123.
[143] 韩光超，石秋雨，沈豫楚，等. 多模式超声振动等径角挤压超细晶纯铝成形机理研究[J]. 机械工程学报，2021，57(23)：241-251. HAN Guangchao，SHI Qiuyu，SHEN Yuchu，et al. Research on the forming mechanism of multi-mode ultrasonic assisted equal channel angular pressing for ultrafine grained 1070 pure aluminum[J]. Journal of Mechanical Engineering，2021，57(23)：241-251.