Abstract: A third-order profile planning method and precision control strategies for point-to-point motion are studied. Several criterions are presented relying on all possible instances for third-order profile planning. Based on these criteria and dynamic constraints, fast and accurate algorithm of profile planning with time-optimality by preprocessing the entire profile as a whole is described. Accuracy losses in discrete time implementation are considered. As a result, an internal integer data integration strategy and a compensation approach based on correcting factor are investigated. Finally, experiment results demonstrate the effectiveness and reliability of the proposed methods. The presented method is successfully applied in semiconductor manufacturing equipments.

Key words: Limitation criteria, Point-to-point motion, Precision control, Profile planning